JPS63110558U - - Google Patents

Info

Publication number
JPS63110558U
JPS63110558U JP206587U JP206587U JPS63110558U JP S63110558 U JPS63110558 U JP S63110558U JP 206587 U JP206587 U JP 206587U JP 206587 U JP206587 U JP 206587U JP S63110558 U JPS63110558 U JP S63110558U
Authority
JP
Japan
Prior art keywords
gas
generated
vacuum
view
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP206587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP206587U priority Critical patent/JPS63110558U/ja
Publication of JPS63110558U publication Critical patent/JPS63110558U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Manufacture And Refinement Of Metals (AREA)
JP206587U 1987-01-10 1987-01-10 Pending JPS63110558U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP206587U JPS63110558U (enrdf_load_stackoverflow) 1987-01-10 1987-01-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP206587U JPS63110558U (enrdf_load_stackoverflow) 1987-01-10 1987-01-10

Publications (1)

Publication Number Publication Date
JPS63110558U true JPS63110558U (enrdf_load_stackoverflow) 1988-07-15

Family

ID=30780554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP206587U Pending JPS63110558U (enrdf_load_stackoverflow) 1987-01-10 1987-01-10

Country Status (1)

Country Link
JP (1) JPS63110558U (enrdf_load_stackoverflow)

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