JPS63110394U - - Google Patents

Info

Publication number
JPS63110394U
JPS63110394U JP229687U JP229687U JPS63110394U JP S63110394 U JPS63110394 U JP S63110394U JP 229687 U JP229687 U JP 229687U JP 229687 U JP229687 U JP 229687U JP S63110394 U JPS63110394 U JP S63110394U
Authority
JP
Japan
Prior art keywords
suction pad
conveying device
moving
moving means
suctions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP229687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP229687U priority Critical patent/JPS63110394U/ja
Publication of JPS63110394U publication Critical patent/JPS63110394U/ja
Pending legal-status Critical Current

Links

Landscapes

  • De-Stacking Of Articles (AREA)
  • Specific Conveyance Elements (AREA)
JP229687U 1987-01-09 1987-01-09 Pending JPS63110394U (US07321065-20080122-C00160.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP229687U JPS63110394U (US07321065-20080122-C00160.png) 1987-01-09 1987-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP229687U JPS63110394U (US07321065-20080122-C00160.png) 1987-01-09 1987-01-09

Publications (1)

Publication Number Publication Date
JPS63110394U true JPS63110394U (US07321065-20080122-C00160.png) 1988-07-15

Family

ID=30781007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP229687U Pending JPS63110394U (US07321065-20080122-C00160.png) 1987-01-09 1987-01-09

Country Status (1)

Country Link
JP (1) JPS63110394U (US07321065-20080122-C00160.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04340245A (ja) * 1991-03-23 1992-11-26 Tokyo Electron Ltd ウエハ移送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04340245A (ja) * 1991-03-23 1992-11-26 Tokyo Electron Ltd ウエハ移送装置

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