JPS63110153A - Flexible chemical vessel - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a chemical container for coating a wafer surface, which is used when manufacturing semiconductors.

[Conventional technology]

Conventionally, containers for this virtue have been glass bottles or plastic containers, with a fixed internal volume and a structure in which the liquid surface comes into contact with the outside air by adjusting the amount of chemical solution.

[Problem that the invention seeks to solve]

The conventional containers described above, regardless of the amount of drug solution in the container,
Since the volume is fixed, when applying a chemical onto the wafer surface, the method of supplying the chemical has the following drawbacks.

First, when suctioning and supplying from a container using a pump, the inside of the container is opened to atmospheric pressure, so as the amount of chemical solution decreases, outside air enters the container and the liquid surface comes into contact with the outside air, causing deterioration of the chemical solution. is promoting.

Second, when supplying under pressure by pressurizing the container using an inert chamber 2, as the viscosity of the drug solution increases, the pressurizing force also increases.
Since the s''2 gas is easily mixed into the chemical solution, air bubbles are likely to be generated when the atmospheric pressure is released immediately before or after application, resulting in poor application.

Thirdly, in any of the above cases, since outside air enters the container, dirt (fine particles) is likely to get mixed into the chemical solution.

In contrast to the conventional containers described above, the present invention makes the container flexible so that the volume inside the container is always the same as the drug solution 1, and the drug can be transferred to, stored, and removed from the container without contact with the outside air. It has an original content that enables the extraction and supply of chemical solutions.

[Means for solving problems]

The container of the present invention is basically a flexible, thin-walled bag made of metal or plastic sheet material, since the injection of the drug solution into the container and the removal and supply of the drug solution from the container are carried out by changing the volume of the container. For semiconductor manufacturing, a double membrane structure container (bag) consisting of a clean and chemical-resistant wetted container (inner bag) and a protective container (outer bag) that also serves as a shield from ultraviolet rays and prevents chemical leakage.
and a connection port with the outside for injecting and extracting a chemical solution [Embodiment] Next, the present invention will be described with reference to the drawings.

FIG. 1 is an external view of one embodiment of the present invention.

The inner bag 1 accommodates the medicinal solution and has an integrally shaped bottom with a connection port to the outside. The outer bag 2 serves as a shield against ultraviolet rays and protects the inner bag 1. The inner bag 1 and the outer bag 2 are flexible and deform due to external pressure, and the volume changes depending on the amount of the drug inside. This is an example of a chemical solution supply system. FIG. 2(a) shows pump supply, and FIG. 2(b) shows container pressurized supply.

[Example 2] FIG. 3 is a longitudinal sectional view of Example 2 of the present invention.

In this embodiment, since the strength of the container is increased, the medicinal solution can be put in and taken out of the container by compressing it by applying direct pressure to the container (the container itself becomes a bellows pump), and the container is also strong when being transported. This has the advantage that the container can be made larger.

〔Effect of the invention〕

As explained above, the present invention provides flexibility to the chemical liquid container so that the chemical liquid inside can be put in and taken out without exposing it to the outside air, which has the effect of preventing deterioration of the chemical liquid and preventing dust from getting mixed in. Further, when the chemical solution is supplied from the container by pressurizing N2 gas, there is no mixing of the pressurized gas with the chemical solution, and the generation of bubbles in the coating solution can be prevented.

Additionally, used containers can be incinerated as a single-use item.6D, containers (
(b) In addition to expecting a reduction in revenue costs, the drug manufacturer can always inject the drug into new, clean containers without contacting the outside air, which has the effect of eliminating the need for filtering in the drug supply system on the user side.

[Brief explanation of the drawing]

Fig. 1 is an external view of an embodiment of the present invention, Fig. 2 is a diagram showing an example of a chemical liquid supply system using the container shown in Fig. 1, and Fig. 2 (a) is a chemical liquid pump supply system. , (b) shows the container pressurized supply system. FIG. 3 shows a longitudinal sectional view of the second embodiment. ■・・・Container inner bag, 2・・・Container outer bag, 3
... Connection port reinforcement, 4 ... Cap, 6
... Container of the present invention, 7 ... Pump, 8
・・・・・・Air operated pulp, 9・・・・・・
Suck back, 10... Application nozzle, 11...
...pressurized container. \, -・ Fig. 2 Fig. 3 Concave

Claims (1)

[Claims] In containers for chemical solutions that are applied onto wafer surfaces in semiconductor manufacturing, the shape of the containers is soft and deformable, so that the internal volume of the containers can be freely varied, making it possible to inject chemicals into the containers and take them out from the containers. A flexible drug solution container that can be used without contacting the outside air.