JPS63110053U - - Google Patents

Info

Publication number

JPS63110053U

JPS63110053U JP108687U JP108687U JPS63110053U JP S63110053 U JPS63110053 U JP S63110053U JP 108687 U JP108687 U JP 108687U JP 108687 U JP108687 U JP 108687U JP S63110053 U JPS63110053 U JP S63110053U

Authority

JP

Japan

Prior art keywords

piezoresistive element

conductivity type

type

semiconductor

lead

Prior art date

1987-01-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000004065 semiconductor Substances 0.000 claims 4
• 239000000758 substrate Substances 0.000 claims 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
• 229920005591 polysilicon Polymers 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 7
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• 238000000034 method Methods 0.000 description 1