JPS63110037U - - Google Patents
Info
- Publication number
- JPS63110037U JPS63110037U JP199487U JP199487U JPS63110037U JP S63110037 U JPS63110037 U JP S63110037U JP 199487 U JP199487 U JP 199487U JP 199487 U JP199487 U JP 199487U JP S63110037 U JPS63110037 U JP S63110037U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cassette
- support
- frame
- rotated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 17
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 2
Landscapes
- Pile Receivers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP199487U JPS63110037U (enrdf_load_html_response) | 1987-01-09 | 1987-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP199487U JPS63110037U (enrdf_load_html_response) | 1987-01-09 | 1987-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110037U true JPS63110037U (enrdf_load_html_response) | 1988-07-15 |
Family
ID=30780418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP199487U Pending JPS63110037U (enrdf_load_html_response) | 1987-01-09 | 1987-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110037U (enrdf_load_html_response) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003000472A1 (en) * | 2001-06-25 | 2003-01-03 | Takehide Hayashi | System for conveying and transferring semiconductor or liquid crystal wafer one by one |
| WO2003024673A1 (en) * | 2001-09-12 | 2003-03-27 | Takehide Hayashi | Robot hand with positioning function for semiconductor wafer and liquid crystal glass substrate |
-
1987
- 1987-01-09 JP JP199487U patent/JPS63110037U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003000472A1 (en) * | 2001-06-25 | 2003-01-03 | Takehide Hayashi | System for conveying and transferring semiconductor or liquid crystal wafer one by one |
| WO2003024673A1 (en) * | 2001-09-12 | 2003-03-27 | Takehide Hayashi | Robot hand with positioning function for semiconductor wafer and liquid crystal glass substrate |