JPS63110037U - - Google Patents

Info

Publication number
JPS63110037U
JPS63110037U JP199487U JP199487U JPS63110037U JP S63110037 U JPS63110037 U JP S63110037U JP 199487 U JP199487 U JP 199487U JP 199487 U JP199487 U JP 199487U JP S63110037 U JPS63110037 U JP S63110037U
Authority
JP
Japan
Prior art keywords
wafer
cassette
support
frame
rotated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP199487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP199487U priority Critical patent/JPS63110037U/ja
Publication of JPS63110037U publication Critical patent/JPS63110037U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
JP199487U 1987-01-09 1987-01-09 Pending JPS63110037U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP199487U JPS63110037U (enrdf_load_html_response) 1987-01-09 1987-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP199487U JPS63110037U (enrdf_load_html_response) 1987-01-09 1987-01-09

Publications (1)

Publication Number Publication Date
JPS63110037U true JPS63110037U (enrdf_load_html_response) 1988-07-15

Family

ID=30780418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP199487U Pending JPS63110037U (enrdf_load_html_response) 1987-01-09 1987-01-09

Country Status (1)

Country Link
JP (1) JPS63110037U (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003000472A1 (fr) * 2001-06-25 2003-01-03 Takehide Hayashi Systeme de transport et de transfert de plaquette de semi-conducteur ou de cristaux liquides, une par une
WO2003024673A1 (fr) * 2001-09-12 2003-03-27 Takehide Hayashi Main de robot a fonction de positionnement pour tranche en semiconducteur et substrat de verre a cristaux liquides

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003000472A1 (fr) * 2001-06-25 2003-01-03 Takehide Hayashi Systeme de transport et de transfert de plaquette de semi-conducteur ou de cristaux liquides, une par une
WO2003024673A1 (fr) * 2001-09-12 2003-03-27 Takehide Hayashi Main de robot a fonction de positionnement pour tranche en semiconducteur et substrat de verre a cristaux liquides

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