JPS63110037U

JPS63110037U -

Info

Publication number: JPS63110037U
Application number: JP199487U
Authority: JP
Priority date: 1987-01-09
Filing date: 1987-01-09
Publication date: 1988-07-15

Description

[Brief explanation of the drawing]

第１図及び第２図はこの考案によるウエーハの
位置決め揃え装置の一実施例の正面図及び側面図
、第３図は第１図の支持ローラ部の正面図、第４
図は第３図の支持ローラの側面断面図、第５図及
び第６図は第１図の位置決めローラ手段部の正面
図及び側面図、第７図はカセツトの斜視図、第８
図はウエーハの正面図、第９図及び第１０図は従
来のウエーハの位置決め揃え装置の平面図及び正
面図である。１……半導体ウエーハ、１ａ……オリエンテー
シヨンフラツト、２……カセツト、２ａ……収容
溝、１０……受台、１１……枠体、１３……押上
げ体、１４……上下動駆動源、１５……支持枠、
１６，１７……支持ローラ、２０……レバー、２
２……位置決めローラ手段、２３……回動枠、２
４……支持軸、２５……位置決めローラ。なお、
図中同一符号は同一又は相当部分を示す。 1 and 2 are front and side views of an embodiment of the wafer positioning and alignment device according to this invention, FIG. 3 is a front view of the support roller section of FIG. 1, and FIG.
5 and 6 are front and side views of the positioning roller means shown in FIG. 1, FIG. 7 is a perspective view of the cassette, and FIG.
This figure is a front view of a wafer, and FIGS. 9 and 10 are a plan view and a front view of a conventional wafer positioning and alignment apparatus. DESCRIPTION OF SYMBOLS 1...Semiconductor wafer, 1a...Orientation flat, 2...Cassette, 2a...Accommodating groove, 10...Scraper, 11...Frame, 13...Pushing body, 14...Vertical movement Drive source, 15... Support frame,
16, 17...Support roller, 20...Lever, 2
2... Positioning roller means, 23... Rotating frame, 2
4...Support shaft, 25...Positioning roller. In addition,
The same reference numerals in the figures indicate the same or corresponding parts.

Claims

[Scope of utility model registration request]

A large number of storage grooves in the vertical direction are provided facing the inner surfaces of both side walls, and each of these storage grooves accommodates a cassette in which a semiconductor wafer is stored in an upright position, a pedestal on which the cassette is placed in a predetermined position, and a pedestal in which the cassette is placed in a predetermined position. On the other hand, a frame body that is horizontally moved relative to the one pitch of the housing groove, supported vertically movably on the lower side of this frame body,
The upper part has an arcuate surface and a support groove is provided, and the push-up body is placed below the wafers in the cassette and is raised by a vertical drive means to support one wafer and push it upwards into the cassette, and the frame. a support frame fixed to the upper side of the body; an upper support roller rotatably supported at the upper part of the front surface of the support frame to rotatably receive the outer circumference of the pushed-up wafer from above; and the support frame. The levers are rotatably supported at the lower ends of the levers that are rotated on both sides of the front of the lower part of the lever. A pair of support rollers on both sides that allow the wafer to pass and rise, and that rotatably support the wafer from both sides of the lower part of the outer circumference by closing and rotating both of the levers inward after the wafer has passed, and the support frame. The wafer is disposed at the bottom of the roller, and is normally rotated by a rotational drive source to a position with the tip facing downward, and when the wafer is supported by each of the support rollers,
A movable frame that rotates forward and whose tip protrudes from below the front surface of the support frame, is rotatably supported by the end of the movable frame, and as the movable frame rotates forward, it comes into contact with the lower end of the wafer. The wafer is rotated by a rotational drive source, and when the wafer is rotated and the orientation flat reaches the bottom, the contact is separated, and the wafer is equipped with a positioning roller that positions the wafer in this position and pushes the wafers in the cassette one by one. A semiconductor wafer positioning device that raises, positions, lowers, and stores semiconductor wafers in a cassette.