JPH0632688Y2 - Cassette holding mechanism - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field to which the Invention belongs] The present invention relates to a cassette in which a sample substrate (hereinafter referred to as a mask glass) such as a mask glass or a wafer in a semiconductor device manufacturing apparatus is loaded one by one, and The present invention relates to the structure of a magazine that stores a plurality of cassettes.

[Prior Art] An example of a conventional magazine will be described with reference to FIGS. 8 and 9. A plurality of cassettes 15 in each of which one mask glass 12 is loaded by a spring 13 and a presser 14 are stored in the magazine 11, and the magazines 11 correspond to the respective cassettes 15.
The cassette 15 is guided and carried in and out by a fixed rotating body 16 that is provided on the inner wall 11A and that rotates in the vertical direction and a fixed rotating body 17 that rotates in the horizontal direction. This is because the fixed rotating body 16 and the like are for preventing slipping and dusting or abrasion between the cassette 15 and the guide (not shown) without this. However, since the fixed rotating body 16 and the like are used, the wear between the cassette 15 and the cassette 15 is small, and it is unstable when the magazine 11 is moved. In particular, when the magazine 11 is tilted toward the opening direction of the magazine 11, the cassette 15 falls off from the magazine 11. was there.

Therefore, as shown in FIG. 10, the back wall 11 of the magazine 11 is
A movement prevention mechanism 21 is provided at each stage of B
5 is engaged with a protrusion 22 attached to the front surface of the device 5. First
FIG. 1 shows the details of the movement prevention mechanism 21 and the like. A pair of bars 2 is attached to the tip of a mounting member 23 fixed to the back wall 11B.
One end of 4 is rotatably attached, a rotatable roller 25 is attached to the other end of the bar 24, and a tension spring 26 is attached in the middle between the pair of bars 24 to urge them in a constantly facing direction. Has been done.

As shown by the solid line in FIG. 11, the force of the tension spring 26 is such that even if the magazine 11 moves or tilts when the roller 25 is engaged with the protrusion 22 and the force acts on the cassette 15, the roller 25 moves. Is immovable, but when a force is applied to the cassette 15 in order to convey the cassette 15 into an apparatus using the magazine 11 at a designated place, it is the first
The roller 25 is sized to open as shown by the alternate long and short dash line in FIG. However, this method has a complicated structure.
Further, a portion for accommodating the movement prevention mechanism 21 and the projection 22 is required in the magazine 11, and the magazine 11 becomes large, and the device using the magazine 11 also becomes large and the cost becomes high.

[Object of the Invention] The present invention eliminates such drawbacks, and its purpose is to:
An object of the present invention is to provide a cassette holding mechanism that prevents movement of the cassette when the magazine is tilted without changing the conventional magazine to a large extent.

[Points of the Invention] The cassette holding mechanism of the present invention includes a cassette in which sample substrates are loaded one by one, a magazine for storing a plurality of such cassettes, and a cassette which is rotatably mounted at a predetermined position in the magazine and which allows the cassettes to move in and out. In a cassette holding mechanism for preventing movement of the cassette in a magazine device composed of a plurality of fixed rotating bodies that are freely supported and guided, a cassette holding mechanism at a position different from the position supported and guided by the fixed rotating body. A movable rotary member rotatably attached to the magazine so as to come into contact therewith, and a movable rotary member contact position of the cassette for receiving the movable rotary member when the cassette is stored at a predetermined position in the magazine. It is characterized by comprising a groove-shaped step and a spring for pressing and moving the movable rotating body toward the inside of the step.

[Embodiment of the Invention] Hereinafter, an embodiment of the present invention will be described with reference to FIGS. The same members as those shown in FIGS. 8 and 9 which are conventional examples are designated by the same reference numerals, detailed description thereof will be omitted, and different portions will be described. In FIG. 1, when the cassette 15 is loaded into or unloaded from the magazine 11, it is guided by a fixed rotating body 16 (not shown) that rotates in the vertical direction and a fixed rotating body 17 that rotates in the horizontal direction in the conventional example. Same as FIG. 9, but in the present invention, the magazine 11
Movable Rotating Body 3 Rotating Facing to the Middle of the Inner Wall 11A
1 (the structure is the same as the fixed rotating body 17).

As shown in FIGS. 2 and 3, the movable rotator 31 is attached to the shaft 32, and the shaft 32 is always in contact with the other end of the coil spring 33 whose one end contacts the bottom surface of the hole provided in the inner wall 11A. It is biased toward the inside of the magazine 11. The shaft 32 is swingably inserted into a groove provided in a wall (not shown) of the magazine 11, and a plurality of intermediate pins 34 are inserted into holes provided in the inner wall 11A. The sliding is guided by. Here, the positions in the height direction of the movable rotary body 31 and the fixed rotary body 17 are in different phases as shown in FIG. On the other hand, in the middle of the side surface of the cassette 15, a step (groove) 3 into which the movable rotating body 31 is inserted.
5 is provided. Further, in FIG. 1, reference numeral 36 is a stopper for regulating the storage position of the cassette.

Next, the operation of the above-described embodiment will be described. When the cassette 15 is carried into the magazine 11, the cassette 15 advances while being guided by contacting the side surface of the cassette 15 with the lower fixed rotating body 17 in FIG. 1 and the lower surface of the cassette 15 with the fixed rotating body 16 not shown. To do. Next, when the cassette 15 advances a little, its tip comes into contact with the movable rotary body 31, but at this time, the movable rotary body 31 is pushed by the coil spring 33 and is in the forward position, and the movable rotary body 31 is retracted as the cassette 15 is advanced and the cassette 15 is moved forward.
Rotates with the progress of (the state of FIG. 3). Cassette 15
When the step 35 further advances and the step 35 faces the fixed rotary body 31, the rotary body 31 is pushed forward by the coil spring 33 and moves forward to engage with the step 35, and the tip of the cassette 15 comes into contact with the stopper 36 and stops to move to the magazine 11. Stored (1st
(State of figure and FIG. 2). The strength of the coil spring 33 is the same as that of the tension spring 26 of the conventional example.
When the movable rotator 31 is engaged with the step 35 of the cassette 15, the cassette 15 does not move even when the magazine 11 is moving or the force is applied to the cassette 15 by tilting the magazine 11.
The magazine 15 is installed in a designated place, and the cassette 15 is carried into the apparatus to be used, so that it is easily moved when a force is applied to the cassette 15. Therefore, when the movable rotary member 31 is engaged with the step 35 of the cassette 15, the magazine 1
Even if 1 is tilted, the cassette 15 maintains its position without moving. The coil spring 33 may be a leaf spring (not shown).

5 to 7 show another embodiment of the present invention, in which the cassette 15 is provided with a step 35 on a part of the lateral upper surface thereof, and both sides of the step 35 are formed on the inclined surface which is thinned outward. Has become. Further, a stopper 41 is attached to the magazine 11, and a coil spring 43 is attached to the tip of the stopper 41 and the tip of a shaft 42 that supports the movable rotator 31, and the coil spring 43 and the stopper 41 are fixed by, for example, an adhesive agent. ing.

With such a configuration, the cassette 15 is loaded into the magazine 11
When the cassette 15 is carried in, the lower surface of the cassette 15 is first supported by the fixed rotor 16 as shown in FIG.
The movable rotating body 31 rides up on the slope by bending 3. Next, when the cassette 15 further enters, the movable rotating body 31 engages with the step 35 as shown in FIG. In this state, even if the magazine 11 is tilted as in the above-described embodiment, the cassette 1
5 does not move.

[Advantages of the Invention] As described above, the cassette holding mechanism of the present invention is provided with a stepped portion on the cassette and a movable rotating body that is pressed by a spring on the magazine side, and can be moved to the stepped portion when the cassette is stored in the magazine. Since the rotor is engaged, the cassette does not come out of the magazine even if the magazine is tilted or a slight force is applied to the cassette. On the other hand, it is possible to easily carry out the cassette when the magazine is installed at a designated place and the cassette is carried to a device using the magazine. Further, since the step portion of the cassette and the traveling surface of the fixed rotating body for guiding the cassette are out of phase with each other, the cassette can be smoothly transported.

[Brief description of drawings]

1 to 4 show an embodiment of the present invention, FIG. 1 is a plan view, and FIGS. 2 and 3 are first views at different times.
FIG. 3 is a sectional view taken along line 2-3, FIG. 4 is an explanatory view, FIGS. 5 to 7 show another embodiment of the present invention, FIG. 5 is a perspective view of a cassette, and FIGS. 6 and 7 are FIGS. 8 to 11 show a conventional example, FIG. 8 is a perspective view of the magazine, and FIGS. 9 and 10 are side views with different shapes. FIG. 11 is an enlarged view of a main part of FIG. 11 ... Magazine, 12 ... Mask glass, 15 ... Cassette, 31 ... Movable rotating body, 35 ... Step.

Claims (1)

[Scope of utility model registration request] 1. A cassette in which sample substrates are loaded one by one,
Preventing movement of the cassette in a magazine device including a magazine that stores a plurality of the same cassettes and a plurality of fixed rotating bodies that are rotatably mounted at predetermined positions in the magazines and that support and guide the cassettes so that they can be moved in and out. In the cassette holding mechanism for, the movable rotary member rotatably attached to the magazine by contacting a position on the cassette different from the position supported and guided by the fixed rotary member, and the cassette at a predetermined position in the magazine. A groove-shaped step provided at the movable rotating body contact position of the cassette to receive the movable rotating body when stored in the housing; and a spring for pressing and moving the movable rotating body toward the inside of the step. A cassette holding mechanism comprising: