JPS63110032U - - Google Patents
Info
- Publication number
- JPS63110032U JPS63110032U JP140087U JP140087U JPS63110032U JP S63110032 U JPS63110032 U JP S63110032U JP 140087 U JP140087 U JP 140087U JP 140087 U JP140087 U JP 140087U JP S63110032 U JPS63110032 U JP S63110032U
- Authority
- JP
- Japan
- Prior art keywords
- film
- forming
- carrier
- developing
- liquid tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP140087U JPS63110032U (cs) | 1987-01-08 | 1987-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP140087U JPS63110032U (cs) | 1987-01-08 | 1987-01-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110032U true JPS63110032U (cs) | 1988-07-15 |
Family
ID=30779275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP140087U Pending JPS63110032U (cs) | 1987-01-08 | 1987-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110032U (cs) |
-
1987
- 1987-01-08 JP JP140087U patent/JPS63110032U/ja active Pending