JPS6242236U - - Google Patents
Info
- Publication number
- JPS6242236U JPS6242236U JP13427685U JP13427685U JPS6242236U JP S6242236 U JPS6242236 U JP S6242236U JP 13427685 U JP13427685 U JP 13427685U JP 13427685 U JP13427685 U JP 13427685U JP S6242236 U JPS6242236 U JP S6242236U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- heating holder
- window portion
- molecular beam
- substrate heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13427685U JPS6242236U (cs) | 1985-09-02 | 1985-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13427685U JPS6242236U (cs) | 1985-09-02 | 1985-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6242236U true JPS6242236U (cs) | 1987-03-13 |
Family
ID=31035368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13427685U Pending JPS6242236U (cs) | 1985-09-02 | 1985-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6242236U (cs) |
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1985
- 1985-09-02 JP JP13427685U patent/JPS6242236U/ja active Pending