JPS63110025U - - Google Patents
Info
- Publication number
- JPS63110025U JPS63110025U JP166587U JP166587U JPS63110025U JP S63110025 U JPS63110025 U JP S63110025U JP 166587 U JP166587 U JP 166587U JP 166587 U JP166587 U JP 166587U JP S63110025 U JPS63110025 U JP S63110025U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- heat sink
- chamber
- holder
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 14
- 238000001816 cooling Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Cooling Or The Like Of Electrical Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP166587U JPS63110025U (enrdf_load_html_response) | 1987-01-08 | 1987-01-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP166587U JPS63110025U (enrdf_load_html_response) | 1987-01-08 | 1987-01-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63110025U true JPS63110025U (enrdf_load_html_response) | 1988-07-15 |
Family
ID=30779789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP166587U Pending JPS63110025U (enrdf_load_html_response) | 1987-01-08 | 1987-01-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63110025U (enrdf_load_html_response) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2006095575A1 (ja) * | 2005-03-07 | 2008-08-14 | シャープ株式会社 | プラズマ処理装置およびそれを用いた半導体薄膜の製造方法 |
-
1987
- 1987-01-08 JP JP166587U patent/JPS63110025U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2006095575A1 (ja) * | 2005-03-07 | 2008-08-14 | シャープ株式会社 | プラズマ処理装置およびそれを用いた半導体薄膜の製造方法 |