JPS63109438U - - Google Patents

Info

Publication number

JPS63109438U

JPS63109438U JP128887U JP128887U JPS63109438U JP S63109438 U JPS63109438 U JP S63109438U JP 128887 U JP128887 U JP 128887U JP 128887 U JP128887 U JP 128887U JP S63109438 U JPS63109438 U JP S63109438U

Authority

JP

Japan

Prior art keywords

workpiece

ion beam

current measuring

emitting means

conductive

Prior art date

1987-01-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005468 ion implantation Methods 0.000 claims description 5
• 238000010884 ion-beam technique Methods 0.000 claims description 4
• 239000007943 implant Substances 0.000 claims 1
• 150000002500 ions Chemical class 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3

Cited By (1)