JPS63109321A - 光学式変位検出器 - Google Patents
光学式変位検出器Info
- Publication number
- JPS63109321A JPS63109321A JP25546886A JP25546886A JPS63109321A JP S63109321 A JPS63109321 A JP S63109321A JP 25546886 A JP25546886 A JP 25546886A JP 25546886 A JP25546886 A JP 25546886A JP S63109321 A JPS63109321 A JP S63109321A
- Authority
- JP
- Japan
- Prior art keywords
- origin signal
- grid
- signal
- counting
- grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 title claims description 17
- 230000003287 optical effect Effects 0.000 title claims description 13
- 238000005286 illumination Methods 0.000 claims abstract description 23
- 230000000737 periodic effect Effects 0.000 claims description 9
- 230000001427 coherent effect Effects 0.000 claims description 7
- 239000000523 sample Substances 0.000 claims description 2
- 239000011295 pitch Substances 0.000 abstract 2
- 230000000694 effects Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25546886A JPS63109321A (ja) | 1986-10-27 | 1986-10-27 | 光学式変位検出器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25546886A JPS63109321A (ja) | 1986-10-27 | 1986-10-27 | 光学式変位検出器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63109321A true JPS63109321A (ja) | 1988-05-14 |
| JPH0411808B2 JPH0411808B2 (enrdf_load_stackoverflow) | 1992-03-02 |
Family
ID=17279186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25546886A Granted JPS63109321A (ja) | 1986-10-27 | 1986-10-27 | 光学式変位検出器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63109321A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013217833A (ja) * | 2012-04-11 | 2013-10-24 | Mitsutoyo Corp | エンコーダ |
-
1986
- 1986-10-27 JP JP25546886A patent/JPS63109321A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013217833A (ja) * | 2012-04-11 | 2013-10-24 | Mitsutoyo Corp | エンコーダ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0411808B2 (enrdf_load_stackoverflow) | 1992-03-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |