JPS63106761U - - Google Patents

Info

Publication number
JPS63106761U
JPS63106761U JP20188586U JP20188586U JPS63106761U JP S63106761 U JPS63106761 U JP S63106761U JP 20188586 U JP20188586 U JP 20188586U JP 20188586 U JP20188586 U JP 20188586U JP S63106761 U JPS63106761 U JP S63106761U
Authority
JP
Japan
Prior art keywords
workpiece
lower receiving
film
chamber
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20188586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20188586U priority Critical patent/JPS63106761U/ja
Publication of JPS63106761U publication Critical patent/JPS63106761U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP20188586U 1986-12-27 1986-12-27 Pending JPS63106761U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20188586U JPS63106761U (enrdf_load_stackoverflow) 1986-12-27 1986-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20188586U JPS63106761U (enrdf_load_stackoverflow) 1986-12-27 1986-12-27

Publications (1)

Publication Number Publication Date
JPS63106761U true JPS63106761U (enrdf_load_stackoverflow) 1988-07-09

Family

ID=31165759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20188586U Pending JPS63106761U (enrdf_load_stackoverflow) 1986-12-27 1986-12-27

Country Status (1)

Country Link
JP (1) JPS63106761U (enrdf_load_stackoverflow)

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