JPH0187155U - - Google Patents

Info

Publication number
JPH0187155U
JPH0187155U JP18250487U JP18250487U JPH0187155U JP H0187155 U JPH0187155 U JP H0187155U JP 18250487 U JP18250487 U JP 18250487U JP 18250487 U JP18250487 U JP 18250487U JP H0187155 U JPH0187155 U JP H0187155U
Authority
JP
Japan
Prior art keywords
substrate holder
target
view
sputtering apparatus
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18250487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18250487U priority Critical patent/JPH0187155U/ja
Publication of JPH0187155U publication Critical patent/JPH0187155U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP18250487U 1987-11-30 1987-11-30 Pending JPH0187155U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18250487U JPH0187155U (enrdf_load_stackoverflow) 1987-11-30 1987-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18250487U JPH0187155U (enrdf_load_stackoverflow) 1987-11-30 1987-11-30

Publications (1)

Publication Number Publication Date
JPH0187155U true JPH0187155U (enrdf_load_stackoverflow) 1989-06-08

Family

ID=31473951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18250487U Pending JPH0187155U (enrdf_load_stackoverflow) 1987-11-30 1987-11-30

Country Status (1)

Country Link
JP (1) JPH0187155U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02298263A (ja) * 1989-05-12 1990-12-10 Tokyo Electron Ltd スパッタ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02298263A (ja) * 1989-05-12 1990-12-10 Tokyo Electron Ltd スパッタ装置

Similar Documents

Publication Publication Date Title
JPH0187155U (enrdf_load_stackoverflow)
JPH0347604U (enrdf_load_stackoverflow)
JPH01175978U (enrdf_load_stackoverflow)
JPS6161059U (enrdf_load_stackoverflow)
JPH0198159U (enrdf_load_stackoverflow)
JPH01168551U (enrdf_load_stackoverflow)
JPS61145711U (enrdf_load_stackoverflow)
JPS6420943U (enrdf_load_stackoverflow)
JPS6277132U (enrdf_load_stackoverflow)
JPH0418446U (enrdf_load_stackoverflow)
JPH02117139U (enrdf_load_stackoverflow)
JPS646037U (enrdf_load_stackoverflow)
JPS61197067U (enrdf_load_stackoverflow)
JPS6235769U (enrdf_load_stackoverflow)
JPS6422495U (enrdf_load_stackoverflow)
JPS63106761U (enrdf_load_stackoverflow)
JPS6365611U (enrdf_load_stackoverflow)
JPS63194842U (enrdf_load_stackoverflow)
JPS61145011U (enrdf_load_stackoverflow)
JPH0315060U (enrdf_load_stackoverflow)
JPH0293086U (enrdf_load_stackoverflow)
JPH0392768U (enrdf_load_stackoverflow)
JPH01175149U (enrdf_load_stackoverflow)
JPS6450244U (enrdf_load_stackoverflow)
JPS63127847U (enrdf_load_stackoverflow)