JPS63106760U - - Google Patents
Info
- Publication number
- JPS63106760U JPS63106760U JP20203186U JP20203186U JPS63106760U JP S63106760 U JPS63106760 U JP S63106760U JP 20203186 U JP20203186 U JP 20203186U JP 20203186 U JP20203186 U JP 20203186U JP S63106760 U JPS63106760 U JP S63106760U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- heating
- vacuum evaporation
- spacing
- evaporation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000007738 vacuum evaporation Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20203186U JPH0311228Y2 (ja�@�@) | 1986-12-25 | 1986-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20203186U JPH0311228Y2 (ja�@�@) | 1986-12-25 | 1986-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63106760U true JPS63106760U (ja�@�@) | 1988-07-09 |
| JPH0311228Y2 JPH0311228Y2 (ja�@�@) | 1991-03-19 |
Family
ID=31166040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20203186U Expired JPH0311228Y2 (ja�@�@) | 1986-12-25 | 1986-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0311228Y2 (ja�@�@) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010534770A (ja) * | 2007-07-27 | 2010-11-11 | クレア テック フィッシャー・ウント・コー・ゲーエムベーハー | 並列接続された加熱ゾーンを有する高温蒸発器セル |
-
1986
- 1986-12-25 JP JP20203186U patent/JPH0311228Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010534770A (ja) * | 2007-07-27 | 2010-11-11 | クレア テック フィッシャー・ウント・コー・ゲーエムベーハー | 並列接続された加熱ゾーンを有する高温蒸発器セル |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0311228Y2 (ja�@�@) | 1991-03-19 |