JPS63106759U - - Google Patents

Info

Publication number
JPS63106759U
JPS63106759U JP20184586U JP20184586U JPS63106759U JP S63106759 U JPS63106759 U JP S63106759U JP 20184586 U JP20184586 U JP 20184586U JP 20184586 U JP20184586 U JP 20184586U JP S63106759 U JPS63106759 U JP S63106759U
Authority
JP
Japan
Prior art keywords
molten metal
discharge electrode
evaporation crucible
evaporation
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20184586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523564Y2 (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20184586U priority Critical patent/JPH0523564Y2/ja
Publication of JPS63106759U publication Critical patent/JPS63106759U/ja
Application granted granted Critical
Publication of JPH0523564Y2 publication Critical patent/JPH0523564Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP20184586U 1986-12-26 1986-12-26 Expired - Lifetime JPH0523564Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20184586U JPH0523564Y2 (en, 2012) 1986-12-26 1986-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20184586U JPH0523564Y2 (en, 2012) 1986-12-26 1986-12-26

Publications (2)

Publication Number Publication Date
JPS63106759U true JPS63106759U (en, 2012) 1988-07-09
JPH0523564Y2 JPH0523564Y2 (en, 2012) 1993-06-16

Family

ID=31165680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20184586U Expired - Lifetime JPH0523564Y2 (en, 2012) 1986-12-26 1986-12-26

Country Status (1)

Country Link
JP (1) JPH0523564Y2 (en, 2012)

Also Published As

Publication number Publication date
JPH0523564Y2 (en, 2012) 1993-06-16

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