JPS63106127U - - Google Patents

Info

Publication number
JPS63106127U
JPS63106127U JP19949386U JP19949386U JPS63106127U JP S63106127 U JPS63106127 U JP S63106127U JP 19949386 U JP19949386 U JP 19949386U JP 19949386 U JP19949386 U JP 19949386U JP S63106127 U JPS63106127 U JP S63106127U
Authority
JP
Japan
Prior art keywords
output signal
correction
arm
weight detector
controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19949386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19949386U priority Critical patent/JPS63106127U/ja
Publication of JPS63106127U publication Critical patent/JPS63106127U/ja
Pending legal-status Critical Current

Links

JP19949386U 1986-12-26 1986-12-26 Pending JPS63106127U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19949386U JPS63106127U (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19949386U JPS63106127U (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Publications (1)

Publication Number Publication Date
JPS63106127U true JPS63106127U (enrdf_load_stackoverflow) 1988-07-08

Family

ID=31161171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19949386U Pending JPS63106127U (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Country Status (1)

Country Link
JP (1) JPS63106127U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11251401A (ja) * 1998-02-27 1999-09-17 Canon Inc 基板搬送装置
WO2005004230A1 (ja) * 2003-07-04 2005-01-13 Rorze Corporation 薄板状基板の搬送装置、及びその搬送制御方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11251401A (ja) * 1998-02-27 1999-09-17 Canon Inc 基板搬送装置
WO2005004230A1 (ja) * 2003-07-04 2005-01-13 Rorze Corporation 薄板状基板の搬送装置、及びその搬送制御方法

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