JPS63106127U - - Google Patents
Info
- Publication number
- JPS63106127U JPS63106127U JP19949386U JP19949386U JPS63106127U JP S63106127 U JPS63106127 U JP S63106127U JP 19949386 U JP19949386 U JP 19949386U JP 19949386 U JP19949386 U JP 19949386U JP S63106127 U JPS63106127 U JP S63106127U
- Authority
- JP
- Japan
- Prior art keywords
- output signal
- correction
- arm
- weight detector
- controller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19949386U JPS63106127U (cs) | 1986-12-26 | 1986-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19949386U JPS63106127U (cs) | 1986-12-26 | 1986-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106127U true JPS63106127U (cs) | 1988-07-08 |
Family
ID=31161171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19949386U Pending JPS63106127U (cs) | 1986-12-26 | 1986-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106127U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11251401A (ja) * | 1998-02-27 | 1999-09-17 | Canon Inc | 基板搬送装置 |
| WO2005004230A1 (ja) * | 2003-07-04 | 2005-01-13 | Rorze Corporation | 薄板状基板の搬送装置、及びその搬送制御方法 |
-
1986
- 1986-12-26 JP JP19949386U patent/JPS63106127U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11251401A (ja) * | 1998-02-27 | 1999-09-17 | Canon Inc | 基板搬送装置 |
| WO2005004230A1 (ja) * | 2003-07-04 | 2005-01-13 | Rorze Corporation | 薄板状基板の搬送装置、及びその搬送制御方法 |