JPS63106126U - - Google Patents
Info
- Publication number
- JPS63106126U JPS63106126U JP19949186U JP19949186U JPS63106126U JP S63106126 U JPS63106126 U JP S63106126U JP 19949186 U JP19949186 U JP 19949186U JP 19949186 U JP19949186 U JP 19949186U JP S63106126 U JPS63106126 U JP S63106126U
- Authority
- JP
- Japan
- Prior art keywords
- hawk
- reaction tube
- cylindrical portion
- boat
- larger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000032258 transport Effects 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19949186U JPS63106126U (enExample) | 1986-12-26 | 1986-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19949186U JPS63106126U (enExample) | 1986-12-26 | 1986-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106126U true JPS63106126U (enExample) | 1988-07-08 |
Family
ID=31161167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19949186U Pending JPS63106126U (enExample) | 1986-12-26 | 1986-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106126U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101191598B1 (ko) | 2010-10-20 | 2012-10-15 | 주식회사 지오스 | 웜 및 웜휠 기어를 이용하여 전체적으로 업 및 다운 구동되는 웨이퍼 기판 로더부 |
-
1986
- 1986-12-26 JP JP19949186U patent/JPS63106126U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101191598B1 (ko) | 2010-10-20 | 2012-10-15 | 주식회사 지오스 | 웜 및 웜휠 기어를 이용하여 전체적으로 업 및 다운 구동되는 웨이퍼 기판 로더부 |