JPS62192634U - - Google Patents

Info

Publication number
JPS62192634U
JPS62192634U JP8212386U JP8212386U JPS62192634U JP S62192634 U JPS62192634 U JP S62192634U JP 8212386 U JP8212386 U JP 8212386U JP 8212386 U JP8212386 U JP 8212386U JP S62192634 U JPS62192634 U JP S62192634U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
loading
unloading
core tube
furnace core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8212386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8212386U priority Critical patent/JPS62192634U/ja
Publication of JPS62192634U publication Critical patent/JPS62192634U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP8212386U 1986-05-29 1986-05-29 Pending JPS62192634U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8212386U JPS62192634U (enExample) 1986-05-29 1986-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8212386U JPS62192634U (enExample) 1986-05-29 1986-05-29

Publications (1)

Publication Number Publication Date
JPS62192634U true JPS62192634U (enExample) 1987-12-08

Family

ID=30934487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8212386U Pending JPS62192634U (enExample) 1986-05-29 1986-05-29

Country Status (1)

Country Link
JP (1) JPS62192634U (enExample)

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