JPS62192634U - - Google Patents
Info
- Publication number
- JPS62192634U JPS62192634U JP8212386U JP8212386U JPS62192634U JP S62192634 U JPS62192634 U JP S62192634U JP 8212386 U JP8212386 U JP 8212386U JP 8212386 U JP8212386 U JP 8212386U JP S62192634 U JPS62192634 U JP S62192634U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- loading
- unloading
- core tube
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8212386U JPS62192634U (enExample) | 1986-05-29 | 1986-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8212386U JPS62192634U (enExample) | 1986-05-29 | 1986-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62192634U true JPS62192634U (enExample) | 1987-12-08 |
Family
ID=30934487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8212386U Pending JPS62192634U (enExample) | 1986-05-29 | 1986-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62192634U (enExample) |
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1986
- 1986-05-29 JP JP8212386U patent/JPS62192634U/ja active Pending