JPS6310598B2 - - Google Patents

Info

Publication number
JPS6310598B2
JPS6310598B2 JP54002255A JP225579A JPS6310598B2 JP S6310598 B2 JPS6310598 B2 JP S6310598B2 JP 54002255 A JP54002255 A JP 54002255A JP 225579 A JP225579 A JP 225579A JP S6310598 B2 JPS6310598 B2 JP S6310598B2
Authority
JP
Japan
Prior art keywords
elliptical
laser
excitation
light
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54002255A
Other languages
Japanese (ja)
Other versions
JPS5595383A (en
Inventor
Ken Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP225579A priority Critical patent/JPS5595383A/en
Publication of JPS5595383A publication Critical patent/JPS5595383A/en
Publication of JPS6310598B2 publication Critical patent/JPS6310598B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/0915Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
    • H01S3/092Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp
    • H01S3/093Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp focusing or directing the excitation energy into the active medium
    • H01S3/0931Imaging pump cavity, e.g. elliptical
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/04Arrangements for thermal management
    • H01S3/0407Liquid cooling, e.g. by water

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Description

【発明の詳細な説明】 本発明は広範囲な動作領域において、その発振
効率を向上したレーザ発振装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser oscillation device with improved oscillation efficiency over a wide range of operating ranges.

従来固体レーザ発振装置においては、発振出力
を増大させることにより加工能力の向上が計られ
て来た。このためレーザロツドは長く太いものを
使用し、励起ランプは、それに見合つたほぼ同じ
放電部の長さを有するものが用いられるなどすべ
てが大形化の傾向にある。このような出力の大き
い装置の一例をあげると、第1図に示すようにレ
ーザ電源1から2個の励起ランプであるフラツシ
ユランプ2,3に電力を供給して、1個のレーザ
ロツド4を励起するように構成されている。そし
てこのような装置は第2図に示すようにそれぞれ
2個の焦点線5,6,5,7をもつた2個の楕円
集光面8,9を、一方の各焦点線5を共有するご
とく対向して組合わせて多重楕円集光面10を構
成した多重楕円集光体11が用いられていて、一
方の共有焦点線5にレーザロツド4とこれを囲む
ガラス管12を配置し、他方の焦点線6,7に励
起ランプ2,3を配置して構成されている。
In conventional solid-state laser oscillation devices, processing ability has been improved by increasing the oscillation output. For this reason, laser rods are becoming longer and thicker, and excitation lamps are being used that have approximately the same length of discharge portion to match this, and everything else is becoming larger. To give an example of such a device with a large output, as shown in FIG. 1, power is supplied from a laser power source 1 to two flash lamps 2 and 3, which are excitation lamps, to drive one laser rod 4. configured to excite. As shown in FIG. 2, such a device has two elliptical focusing surfaces 8, 9 each having two focal lines 5, 6, 5, 7, each of which shares one focal line 5. Multiple elliptical condensers 11 are used which are combined to face each other to form a multiple elliptical condensing surface 10. A laser rod 4 and a glass tube 12 surrounding it are disposed in one shared focal line 5, and the other It is constructed by arranging excitation lamps 2 and 3 on focal lines 6 and 7.

しかるに上述の装置によるレーザ発振効率と励
起ランプ2,3の印加電圧との間に第3図に示す
ような関係がある。本図は横軸に励起ランプ2,
3への印加電圧Vを、縦軸にレーザ発振効率yを
とつた線図である。使用した励起ランプ2,3が
放電部の内径8mm、長さ150mmでクリプトンガス
を約1気圧封入したものの場合は、印加電圧が
300V以下では発振効率が著しく低下することが
わかる。上述の装置に上記のランプ2,3を使用
した場合は300V以上の動作領域を選定すればレ
ーザ出力の発振効率は良いがレーザ出力をさらに
低いレベルで使用する場合は、発振効率は急に低
下することになる。さらに励起ランプ2,3に低
い電圧を印加すると、放電路内における発光部が
均一を欠き、レーザロツド4断面内での励起強度
が不均一になる欠点がある。このような欠点を避
けるため、発振出力を下げずに一定のレベル以上
に発振させるとともに発振器内に開口を入れて出
力を低下させたり、外部に減光手段を設けて出力
を調整するなどのことが行なわれている。また上
述の方法とは別に1個の励起ランプ7だけで励起
することも考えられる。この場合は、励起ランプ
7は正常の放電を行なうが、第4図で示すように
励起光の中、他方の集光面8に入つたもの、すな
わち図中θ1、θ2の領域の光はほとんど励起に寄与
することがない。第5図は横軸に励起ランプ6,
7への印加電圧Vを縦軸に上述の装置によるレー
ザ発振出力pをとつた線図で、曲線aは励起ラン
プ6,7 2個を発光させた場合のもの、曲線b
は後述する本実施例において励起ランプ7 1個
を発光させた場合のもの、曲線cは従来の装置
(第4図)において励起ランプ7 1個を発光さ
せた場合のものである。曲線cに示すように、励
起ランプ7 1個による場合は、曲線aの場合に
比べその出力は半分以下となる。これはレーザ発
振開始のしきい値があるためである。また上述し
たように領域θ1、θ2に放射した励起光は、レーザ
ロツド4に集まらずむだになるが、このように一
方向から照射された場合はレーザ発振パターンは
片寄つたレーザビーム断面強度分布となり易い不
都合があるのである。
However, there is a relationship as shown in FIG. 3 between the laser oscillation efficiency of the above-mentioned device and the voltage applied to the excitation lamps 2 and 3. In this figure, the horizontal axis shows the excitation lamp 2,
FIG. 3 is a diagram showing the applied voltage V to No. 3 and the laser oscillation efficiency y on the vertical axis. If the excitation lamps 2 and 3 used have a discharge part with an inner diameter of 8 mm and a length of 150 mm, and are filled with krypton gas at approximately 1 atm, the applied voltage will be
It can be seen that the oscillation efficiency decreases significantly below 300V. When using the above lamps 2 and 3 in the above device, the oscillation efficiency of the laser output is good if the operating range of 300V or more is selected, but if the laser output is used at an even lower level, the oscillation efficiency suddenly decreases. I will do it. Furthermore, when a low voltage is applied to the excitation lamps 2 and 3, the light emitting portion within the discharge path is not uniform, and the excitation intensity within the cross section of the laser rod 4 is also disadvantageous. In order to avoid such drawbacks, it is possible to oscillate above a certain level without reducing the oscillation output, reduce the output by putting an aperture in the oscillator, or adjust the output by installing an external dimming means. is being carried out. In addition to the method described above, it is also conceivable to excite with only one excitation lamp 7. In this case, the excitation lamp 7 performs normal discharge, but as shown in FIG . hardly contributes to excitation. In Figure 5, the horizontal axis shows the excitation lamp 6,
This is a diagram in which the laser oscillation output p from the above-mentioned device is plotted with the voltage V applied to 7 as the vertical axis, where curve a is the one when two excitation lamps 6 and 7 are emitted, and curve b is the one when the two excitation lamps 6 and 7 are emitted.
Curve c is a curve obtained when one excitation lamp 7 is emitted in this embodiment, which will be described later, and curve c is a curve obtained when one excitation lamp 7 is emitted in a conventional apparatus (FIG. 4). As shown in curve c, when one excitation lamp 7 is used, the output is less than half that of curve a. This is because there is a threshold value for starting laser oscillation. Furthermore, as mentioned above, the excitation light emitted to the regions θ 1 and θ 2 is not collected at the laser rod 4 and is wasted, but when irradiated from one direction in this way, the laser oscillation pattern is a skewed laser beam cross-sectional intensity distribution. This is an inconvenience that can easily occur.

本発明は、上述の不都合を除去するためになさ
れたもので、多重楕円集光体の内に、部分反射体
を着脱自在に設けることにより、低出力発振の場
合でも発振効率のよいレーザ発振装置を得るもの
である。
The present invention has been made to eliminate the above-mentioned disadvantages, and by detachably providing a partial reflector within a multiple elliptical condenser, a laser oscillation device with high oscillation efficiency even in the case of low output oscillation. This is what you get.

以下本発明の詳細を第6図に示す一実施例によ
り説明する。本実施例のレーザ発振装置は、第1
図に示した従来例とほぼ同様な構成をしており、
多重楕円集光体11のみが相違するので主として
この部分について説明する。
The details of the present invention will be explained below with reference to an embodiment shown in FIG. The laser oscillation device of this embodiment has a first
It has almost the same configuration as the conventional example shown in the figure.
Since only the multiple elliptical condenser 11 is different, this part will be mainly explained.

絶縁部材からなり直方体状をした容器体15
は、蓋体16と本体17とからなつていて、本体
17には凹所18が設けられており、蓋体16を
取外すことにより凹所18に多重楕円集光体11
が収容されるようになつている。多重楕円集光体
11は直方体状をなしていて、内部に従来例にお
けると同様に2個の楕円集光面8,9を一方の焦
点線5を共有して組合わせ、焦点線5近傍の反射
面20、例えば二点鎖線で示すように楕円集光面
8が楕円集光面9に入つた部分およびその反対の
部分を切除して連続した多重楕円集光面10が形
成されている。そして一方の焦点線5の位置には
レーザロツド4およびガラス管12が、他方の焦
点線6,7の位置には励起ランプ(フラツシユラ
ンプ)2,3が設けられて、この多重楕円集光体
11内に冷却水を流し、発振させるようになつて
いる。この多重楕円集光体11の中には、さらに
部分反射体21が着脱自在に設けられている。こ
れは切除した部分20と同じ楕円集光面9の一部
の反射面22を具えていて、裏面23は適宜円弧
状に形成されており、面接触で挿脱されるように
所定の厚みを有している。そして図示していない
が、多重楕円集光体11に着脱自在に端部に固定
されるようになつている。部分反射体21に低出
力の発振を行なわせる場合に、例えば励起ランプ
3のみ作動させるとき使用されるものであつて、
この反射面22により楕円集光面9は欠除した反
射面が補完されるのである。この状態で励起ラン
プ3を作動させると、従来無駄となつた第4図に
示す領域θ1、θ2に向つた光が反射面22によりレ
ーザロツドに入射され、すべての光が有効に励起
に寄与するのである。
A container body 15 made of an insulating material and having a rectangular parallelepiped shape
consists of a lid 16 and a main body 17, the main body 17 is provided with a recess 18, and by removing the lid 16, the multiple elliptical condenser 11 is inserted into the recess 18.
is now being accommodated. The multiple elliptical light condenser 11 has a rectangular parallelepiped shape, and has two elliptical light condensing surfaces 8 and 9 therein which share one focal line 5 as in the conventional example. The reflective surface 20, for example, as shown by the two-dot chain line, the portion where the elliptical condensing surface 8 enters the elliptical condensing surface 9 and the opposite portion thereof are removed to form a continuous multiple elliptical condensing surface 10. A laser rod 4 and a glass tube 12 are provided at one focal line 5, and excitation lamps (flash lamps) 2, 3 are provided at the other focal lines 6, 7, making this multiple elliptical condenser Cooling water is flowed into the chamber 11 to generate oscillation. A partial reflector 21 is further provided in the multiple elliptical condenser 11 in a detachable manner. This has a reflective surface 22 that is part of the elliptical condensing surface 9 that is the same as the cut out part 20, and the back surface 23 is appropriately formed in an arc shape and has a predetermined thickness so that it can be inserted and removed by surface contact. have. Although not shown, it is adapted to be detachably fixed to the end of the multiple elliptical condenser 11. It is used when causing the partial reflector 21 to oscillate at low output, for example when only the excitation lamp 3 is operated.
This reflective surface 22 complements the missing reflective surface of the elliptical condensing surface 9. When the excitation lamp 3 is operated in this state, the light directed to the regions θ 1 and θ 2 shown in FIG. That's what I do.

以上詳述したように本発明のレーザ発振装置は
多重楕円集光面の切除した一部を補う部分反射体
を着脱自在に設けたので、取外した状態では全励
起ランプを作動して高出力のレーザ発振を効率よ
く行ない、また部分反射体を取付けた場合は励起
ランプを減らして作動しても、作動側の楕円集光
面は切除した部分が補われているので、励起ラン
プの光はすべてレーザロツドに入射し、効率よく
しかも強度分布も一様で低出力のレーザ発振を行
なうことができるため、高出力から低出力まで高
効率の発振を行なうことができる。また、部分反
射体は楕円集光面に面接触しているため、挿入時
に回動してずれることがないので、二重楕円集光
体から単楕円集光体を簡易に構成することができ
る。
As detailed above, the laser oscillation device of the present invention is provided with a removable partial reflector to compensate for the cut off part of the multiple elliptical focusing surface, so when it is removed, all the excitation lamps are operated to generate high output. Even if the laser oscillation is performed efficiently and a partial reflector is installed, even if the excitation lamp is reduced, the elliptical focusing surface on the operating side is compensated for by the cut part, so all the light from the excitation lamp is The laser beam enters the laser rod and can efficiently oscillate a low-output laser with a uniform intensity distribution, making it possible to oscillate with high efficiency from high output to low output. In addition, since the partial reflector is in surface contact with the elliptical condensing surface, it will not rotate or shift when inserted, making it possible to easily configure a single elliptical condenser from a double elliptical condenser. .

なお本実施例においては二重楕円集光体の場合
について述べたが、これに限定されず、三重以上
の多重楕円集光体を用いた場合でもよい。また部
分反射面は切除した反射面と同一の焦点線を焦点
線とする楕円集光面で構成してもよいことは勿論
であるが、この際は切除した反射面より大きい方
が望ましい。
In this embodiment, the case of a double elliptical light condenser has been described, but the present invention is not limited to this, and a case where three or more multiple elliptical light condensers are used may be used. It goes without saying that the partial reflective surface may be constructed of an elliptical condensing surface whose focal line is the same as that of the excised reflective surface, but in this case it is preferable that the partially reflective surface be larger than the excised reflective surface.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来例および本発明の一実施例の概略
説明図、第2図は従来の多重楕円集光体の断面
図、第3図は励起ランプの印加電圧とレーザ発振
効率との関係線図、第4図は従来の多重楕円集光
体における反射状態説明図、第5図は従来例およ
び本発明の実施例における励起ランプの印加電圧
と発振出力との関係図、第6図は本発明の一実施
例の要部断面図である。 2,3……励起ランプ、4……レーザロツド、
5……一方の焦点線、6,7……他方の焦点線、
8,9……楕円集光面、10……多重楕円集光
面、11……多重楕円集光体、20……切除した
反射面、21……部分反射体。
Fig. 1 is a schematic explanatory diagram of a conventional example and an embodiment of the present invention, Fig. 2 is a cross-sectional view of a conventional multiple elliptical condenser, and Fig. 3 is a relationship line between the applied voltage of the excitation lamp and the laser oscillation efficiency. Figure 4 is an explanatory diagram of the reflection state in a conventional multiple elliptical condenser, Figure 5 is a diagram of the relationship between the applied voltage of the excitation lamp and the oscillation output in the conventional example and the embodiment of the present invention, and Figure 6 is a diagram of the present invention. FIG. 1 is a sectional view of a main part of an embodiment of the invention. 2, 3...excitation lamp, 4...laser rod,
5... One focal line, 6, 7... The other focal line,
8, 9...Elliptical light condensing surface, 10...Multiple elliptical light condensing surface, 11...Multiple elliptical light condensing body, 20...Reflecting surface cut out, 21...Partial reflector.

Claims (1)

【特許請求の範囲】[Claims] 1 複数個の楕円集光体をそれらの一方の焦点線
近傍の反射面部を切除して上記一方の焦点線が共
有されるように上記切除された楕円集光体どうし
を組合せて連続する多重楕円集光面を形成した多
重楕円集光体をもち上記一方の焦点線の位置にレ
ーザロツドを置き他方の各焦点線の位置にそれぞ
れ励起ランプを置いたレーザ発振装置において、
内面が上記切除された反射面になり上記楕円集光
体の上記切除した部分の一方に面接触で挿脱され
る厚みを有し挿入によつて上記多重楕円集光体内
を少なくとも単楕円集光体に区画する部分反射体
を備えていることを特徴とするレーザ発振装置。
1 A continuous multiple ellipse is created by cutting out the reflective surface portion of a plurality of elliptical light condensers near the focal line of one of them and combining the cut elliptical light condensers so that the one focal line is shared. In a laser oscillation device having multiple elliptical condensers forming a condensing surface, a laser rod is placed at the position of one of the focal lines, and an excitation lamp is placed at each of the other focal lines,
The inner surface becomes the cutout reflective surface and has a thickness that allows it to be inserted into and removed from one of the cutout portions of the elliptical light collector by surface contact, and by insertion, at least a single ellipse light is focused in the multiple ellipse light collector. A laser oscillation device characterized by comprising a partial reflector that divides the body.
JP225579A 1979-01-16 1979-01-16 Laser oscillator Granted JPS5595383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP225579A JPS5595383A (en) 1979-01-16 1979-01-16 Laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP225579A JPS5595383A (en) 1979-01-16 1979-01-16 Laser oscillator

Publications (2)

Publication Number Publication Date
JPS5595383A JPS5595383A (en) 1980-07-19
JPS6310598B2 true JPS6310598B2 (en) 1988-03-08

Family

ID=11524245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP225579A Granted JPS5595383A (en) 1979-01-16 1979-01-16 Laser oscillator

Country Status (1)

Country Link
JP (1) JPS5595383A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0641197U (en) * 1992-10-30 1994-05-31 ミツミ電機株式会社 Fixing device for shield plate in electronic equipment

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000124524A (en) * 1998-10-14 2000-04-28 Furukawa Electric Co Ltd:The Light amplifier, light amplification device using the same and method therefor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140894A (en) * 1974-10-04 1976-04-06 Tokyo Shibaura Electric Co REEZA HATSUSHI NKI
JPS53133457A (en) * 1977-04-27 1978-11-21 Hitachi Ltd Light and heat condenser

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140894A (en) * 1974-10-04 1976-04-06 Tokyo Shibaura Electric Co REEZA HATSUSHI NKI
JPS53133457A (en) * 1977-04-27 1978-11-21 Hitachi Ltd Light and heat condenser

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0641197U (en) * 1992-10-30 1994-05-31 ミツミ電機株式会社 Fixing device for shield plate in electronic equipment

Also Published As

Publication number Publication date
JPS5595383A (en) 1980-07-19

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