JPS6310554U - - Google Patents
Info
- Publication number
- JPS6310554U JPS6310554U JP10437986U JP10437986U JPS6310554U JP S6310554 U JPS6310554 U JP S6310554U JP 10437986 U JP10437986 U JP 10437986U JP 10437986 U JP10437986 U JP 10437986U JP S6310554 U JPS6310554 U JP S6310554U
- Authority
- JP
- Japan
- Prior art keywords
- rotation axis
- type optical
- transmission
- spinner
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 4
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10437986U JPS6310554U (OSRAM) | 1986-07-07 | 1986-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10437986U JPS6310554U (OSRAM) | 1986-07-07 | 1986-07-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6310554U true JPS6310554U (OSRAM) | 1988-01-23 |
Family
ID=30977820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10437986U Pending JPS6310554U (OSRAM) | 1986-07-07 | 1986-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6310554U (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018023918A (ja) * | 2016-08-09 | 2018-02-15 | 株式会社ディスコ | 薬液塗布装置 |
| JP2018114479A (ja) * | 2017-01-20 | 2018-07-26 | 株式会社ディスコ | 位置合わせ装置 |
-
1986
- 1986-07-07 JP JP10437986U patent/JPS6310554U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018023918A (ja) * | 2016-08-09 | 2018-02-15 | 株式会社ディスコ | 薬液塗布装置 |
| JP2018114479A (ja) * | 2017-01-20 | 2018-07-26 | 株式会社ディスコ | 位置合わせ装置 |