JPS6310546U - - Google Patents

Info

Publication number
JPS6310546U
JPS6310546U JP10321686U JP10321686U JPS6310546U JP S6310546 U JPS6310546 U JP S6310546U JP 10321686 U JP10321686 U JP 10321686U JP 10321686 U JP10321686 U JP 10321686U JP S6310546 U JPS6310546 U JP S6310546U
Authority
JP
Japan
Prior art keywords
core tube
furnace core
heat treatment
processed
treatment apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10321686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10321686U priority Critical patent/JPS6310546U/ja
Publication of JPS6310546U publication Critical patent/JPS6310546U/ja
Pending legal-status Critical Current

Links

JP10321686U 1986-07-07 1986-07-07 Pending JPS6310546U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10321686U JPS6310546U (OSRAM) 1986-07-07 1986-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10321686U JPS6310546U (OSRAM) 1986-07-07 1986-07-07

Publications (1)

Publication Number Publication Date
JPS6310546U true JPS6310546U (OSRAM) 1988-01-23

Family

ID=30975564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10321686U Pending JPS6310546U (OSRAM) 1986-07-07 1986-07-07

Country Status (1)

Country Link
JP (1) JPS6310546U (OSRAM)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58204529A (ja) * 1982-05-24 1983-11-29 Toshiba Corp 半導体ウエハ−の熱処理炉

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58204529A (ja) * 1982-05-24 1983-11-29 Toshiba Corp 半導体ウエハ−の熱処理炉

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