JPS63105334U - - Google Patents
Info
- Publication number
- JPS63105334U JPS63105334U JP19972086U JP19972086U JPS63105334U JP S63105334 U JPS63105334 U JP S63105334U JP 19972086 U JP19972086 U JP 19972086U JP 19972086 U JP19972086 U JP 19972086U JP S63105334 U JPS63105334 U JP S63105334U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- conversion mechanism
- pitch conversion
- transfer means
- mechanism section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 7
- 239000011295 pitch Substances 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19972086U JPS63105334U (US07714131-20100511-C00038.png) | 1986-12-25 | 1986-12-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19972086U JPS63105334U (US07714131-20100511-C00038.png) | 1986-12-25 | 1986-12-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63105334U true JPS63105334U (US07714131-20100511-C00038.png) | 1988-07-08 |
Family
ID=31161607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19972086U Pending JPS63105334U (US07714131-20100511-C00038.png) | 1986-12-25 | 1986-12-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63105334U (US07714131-20100511-C00038.png) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0228949A (ja) * | 1988-07-19 | 1990-01-31 | Tel Sagami Ltd | ピッチ変換機及びそれを用いたピッチ変換方法 |
JPH0528041U (ja) * | 1991-09-20 | 1993-04-09 | 東京応化工業株式会社 | 縦型ウエハー処理装置のウエハー移載機構 |
KR101108073B1 (ko) | 2009-04-20 | 2012-01-31 | 코리아테크노(주) | 더블 스테이지를 갖는 웨이퍼 분배장치와 이를 이용한 웨이퍼 분배방법 |
KR101108075B1 (ko) | 2009-04-20 | 2012-01-31 | 코리아테크노(주) | 더블 스테이지를 갖는 웨이퍼 분배장치의 덤핑모듈 |
JP2020061400A (ja) * | 2018-10-05 | 2020-04-16 | 川崎重工業株式会社 | 基板保持装置 |
-
1986
- 1986-12-25 JP JP19972086U patent/JPS63105334U/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0228949A (ja) * | 1988-07-19 | 1990-01-31 | Tel Sagami Ltd | ピッチ変換機及びそれを用いたピッチ変換方法 |
JPH0528041U (ja) * | 1991-09-20 | 1993-04-09 | 東京応化工業株式会社 | 縦型ウエハー処理装置のウエハー移載機構 |
KR101108073B1 (ko) | 2009-04-20 | 2012-01-31 | 코리아테크노(주) | 더블 스테이지를 갖는 웨이퍼 분배장치와 이를 이용한 웨이퍼 분배방법 |
KR101108075B1 (ko) | 2009-04-20 | 2012-01-31 | 코리아테크노(주) | 더블 스테이지를 갖는 웨이퍼 분배장치의 덤핑모듈 |
JP2020061400A (ja) * | 2018-10-05 | 2020-04-16 | 川崎重工業株式会社 | 基板保持装置 |