JPS63105334U - - Google Patents

Info

Publication number
JPS63105334U
JPS63105334U JP19972086U JP19972086U JPS63105334U JP S63105334 U JPS63105334 U JP S63105334U JP 19972086 U JP19972086 U JP 19972086U JP 19972086 U JP19972086 U JP 19972086U JP S63105334 U JPS63105334 U JP S63105334U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
conversion mechanism
pitch conversion
transfer means
mechanism section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19972086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19972086U priority Critical patent/JPS63105334U/ja
Publication of JPS63105334U publication Critical patent/JPS63105334U/ja
Pending legal-status Critical Current

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Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP19972086U 1986-12-25 1986-12-25 Pending JPS63105334U (US07714131-20100511-C00038.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19972086U JPS63105334U (US07714131-20100511-C00038.png) 1986-12-25 1986-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19972086U JPS63105334U (US07714131-20100511-C00038.png) 1986-12-25 1986-12-25

Publications (1)

Publication Number Publication Date
JPS63105334U true JPS63105334U (US07714131-20100511-C00038.png) 1988-07-08

Family

ID=31161607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19972086U Pending JPS63105334U (US07714131-20100511-C00038.png) 1986-12-25 1986-12-25

Country Status (1)

Country Link
JP (1) JPS63105334U (US07714131-20100511-C00038.png)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0228949A (ja) * 1988-07-19 1990-01-31 Tel Sagami Ltd ピッチ変換機及びそれを用いたピッチ変換方法
JPH0528041U (ja) * 1991-09-20 1993-04-09 東京応化工業株式会社 縦型ウエハー処理装置のウエハー移載機構
KR101108073B1 (ko) 2009-04-20 2012-01-31 코리아테크노(주) 더블 스테이지를 갖는 웨이퍼 분배장치와 이를 이용한 웨이퍼 분배방법
KR101108075B1 (ko) 2009-04-20 2012-01-31 코리아테크노(주) 더블 스테이지를 갖는 웨이퍼 분배장치의 덤핑모듈
JP2020061400A (ja) * 2018-10-05 2020-04-16 川崎重工業株式会社 基板保持装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0228949A (ja) * 1988-07-19 1990-01-31 Tel Sagami Ltd ピッチ変換機及びそれを用いたピッチ変換方法
JPH0528041U (ja) * 1991-09-20 1993-04-09 東京応化工業株式会社 縦型ウエハー処理装置のウエハー移載機構
KR101108073B1 (ko) 2009-04-20 2012-01-31 코리아테크노(주) 더블 스테이지를 갖는 웨이퍼 분배장치와 이를 이용한 웨이퍼 분배방법
KR101108075B1 (ko) 2009-04-20 2012-01-31 코리아테크노(주) 더블 스테이지를 갖는 웨이퍼 분배장치의 덤핑모듈
JP2020061400A (ja) * 2018-10-05 2020-04-16 川崎重工業株式会社 基板保持装置

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