JPS63105328U - - Google Patents
Info
- Publication number
- JPS63105328U JPS63105328U JP19822786U JP19822786U JPS63105328U JP S63105328 U JPS63105328 U JP S63105328U JP 19822786 U JP19822786 U JP 19822786U JP 19822786 U JP19822786 U JP 19822786U JP S63105328 U JPS63105328 U JP S63105328U
- Authority
- JP
- Japan
- Prior art keywords
- mounting
- hole
- vacuum vessel
- mounting structure
- vacuum container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19822786U JPS63105328U (enExample) | 1986-12-25 | 1986-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19822786U JPS63105328U (enExample) | 1986-12-25 | 1986-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63105328U true JPS63105328U (enExample) | 1988-07-08 |
Family
ID=31158718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19822786U Pending JPS63105328U (enExample) | 1986-12-25 | 1986-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63105328U (enExample) |
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1986
- 1986-12-25 JP JP19822786U patent/JPS63105328U/ja active Pending