JPS63104787U - - Google Patents

Info

Publication number
JPS63104787U
JPS63104787U JP20184686U JP20184686U JPS63104787U JP S63104787 U JPS63104787 U JP S63104787U JP 20184686 U JP20184686 U JP 20184686U JP 20184686 U JP20184686 U JP 20184686U JP S63104787 U JPS63104787 U JP S63104787U
Authority
JP
Japan
Prior art keywords
vacuum processing
processing chamber
flange
ring
chamber side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20184686U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410472Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20184686U priority Critical patent/JPH0410472Y2/ja
Publication of JPS63104787U publication Critical patent/JPS63104787U/ja
Application granted granted Critical
Publication of JPH0410472Y2 publication Critical patent/JPH0410472Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
  • Physical Vapour Deposition (AREA)
JP20184686U 1986-12-26 1986-12-26 Expired JPH0410472Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20184686U JPH0410472Y2 (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20184686U JPH0410472Y2 (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Publications (2)

Publication Number Publication Date
JPS63104787U true JPS63104787U (enrdf_load_stackoverflow) 1988-07-07
JPH0410472Y2 JPH0410472Y2 (enrdf_load_stackoverflow) 1992-03-16

Family

ID=31165682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20184686U Expired JPH0410472Y2 (enrdf_load_stackoverflow) 1986-12-26 1986-12-26

Country Status (1)

Country Link
JP (1) JPH0410472Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180043953A (ko) * 2016-10-21 2018-05-02 삼성중공업 주식회사 배관 플랜지 어셈블리 및 배관 플랜지 어셈블리 설치방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180043953A (ko) * 2016-10-21 2018-05-02 삼성중공업 주식회사 배관 플랜지 어셈블리 및 배관 플랜지 어셈블리 설치방법

Also Published As

Publication number Publication date
JPH0410472Y2 (enrdf_load_stackoverflow) 1992-03-16

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