JPS6310436U - - Google Patents

Info

Publication number
JPS6310436U
JPS6310436U JP1986103778U JP10377886U JPS6310436U JP S6310436 U JPS6310436 U JP S6310436U JP 1986103778 U JP1986103778 U JP 1986103778U JP 10377886 U JP10377886 U JP 10377886U JP S6310436 U JPS6310436 U JP S6310436U
Authority
JP
Japan
Prior art keywords
piezoelectric
piezoelectric element
diaphragm
elements
thin plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986103778U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986103778U priority Critical patent/JPS6310436U/ja
Publication of JPS6310436U publication Critical patent/JPS6310436U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1986103778U 1986-07-08 1986-07-08 Pending JPS6310436U (US06373033-20020416-M00035.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986103778U JPS6310436U (US06373033-20020416-M00035.png) 1986-07-08 1986-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986103778U JPS6310436U (US06373033-20020416-M00035.png) 1986-07-08 1986-07-08

Publications (1)

Publication Number Publication Date
JPS6310436U true JPS6310436U (US06373033-20020416-M00035.png) 1988-01-23

Family

ID=30976659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986103778U Pending JPS6310436U (US06373033-20020416-M00035.png) 1986-07-08 1986-07-08

Country Status (1)

Country Link
JP (1) JPS6310436U (US06373033-20020416-M00035.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006058180A (ja) * 2004-08-20 2006-03-02 National Institute Of Advanced Industrial & Technology 高感度圧電素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006058180A (ja) * 2004-08-20 2006-03-02 National Institute Of Advanced Industrial & Technology 高感度圧電素子

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