JPS63104347A - Semiconductor conveyor - Google Patents

Abstract

PURPOSE:To obtain a semiconductor conveyor of simple structure inexpensively by arranging rollers on first and second stations, and placing boxes thereon to convey it from the first station to the second station. CONSTITUTION:Cylindrical rollers 16a, 16b are respectively provided on a conveying carrier 14 of a first station 12 and a second station 15. An arm 17 is provided at the end of one roller 16b to dram or push a box 18 for containing a plurality of semiconductor parts. Accordingly, even if the number of the stations is increased, the number of robot hands is not increased as the conventional one to reduce a facility investment inexpensively. Thus, a semiconductor conveyor of simple structure can be obtained inexpensively.

Description

DETAILED DESCRIPTION OF THE INVENTION [Objective of the Invention 1 (Industrial Field of Application) The present invention relates to a semiconductor transport device, and in particular, the present invention relates to a semiconductor transport device that transports semiconductor component storage boxes that pass between narrow tunnels from a station between the tunnels to another station. It is related to a moving semiconductor transport device.

(Prior Art) Conventionally, as a semiconductor transport device for transporting a storage box containing a plurality of semiconductor components, one shown in FIG. 2, for example, is known.

In the figure, la and 1b are members that form a tunnel, respectively. Guide rails 3 are disposed within the members 1a, lb and at the first stations 2 between the members 1a, lb, respectively. A transport carrier 4 is provided on the guide rail 3 of the first station 2, and a robot hand 5 is provided above the first station 2. After gripping the storage box 6 of the first station 2, the robot hand 5 moves sequentially in the directions of arrows A, B, and C to transfer it onto the station table 7. Moreover, the robot hand 5 is
, B, and A are also performed.

However, according to the conventional device, since the robot hand 5 is used to transfer the storage box 6, the number of robot hands 5 increases as the number of transfer stations increases, leading to higher costs. Moreover, since the robot hand 5 performs operations such as gripping, lifting, moving laterally, and lowering the storage box 6, the time required for transfer is very long, and the structure is complicated and space efficiency is poor.

(Problems to be Solved by the Invention) The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a semiconductor transport device that is low cost and has a simple structure.

[Structure of the Invention] (Means for Solving the Problems) The present invention transports a storage box for semiconductor components that passes through a narrow tunnel on a guide rail from a first station between the tunnels to another second station. In the semiconductor device according to the first aspect. The gist is that rollers are disposed at each of the second stations, and the storage box is mounted on the rollers and conveyed from the first station to the second station.

(Function) According to the present invention, by arranging rollers at each station, it is possible to obtain a low-cost semiconductor transport device with a simple structure.

(Example) An embodiment of the present invention will be described below with reference to FIG.

Reference numerals 118 and 11b in the figure are members that form tunnels. Inside these members 11a, 11b and member 11a
, 11b, a guide rail 13 is provided at each of the first stations 12 between them. Said first guide rail 1
A transport carrier 14 is provided on top of the transport carrier 3 . Said first
Cylindrical rollers 16a are provided on the transport carrier 14 of the station 12 and on the second station 15, respectively.

16b is provided. Here, one roller 16b
An arm 17 is provided at the end of the device, and the arm 17 is used to pull out or push out a storage box 18 containing a plurality of semiconductor components.

As shown in FIG. 1, the semiconductor transfer device according to the above embodiment has first and second stations 12. It has a structure in which cylindrical rollers 16a and 16b are respectively disposed at 'n. Therefore, even if the number of transfer stations increases, the number of robot hands does not increase as in the past, and equipment investment can be kept low. In addition, since the storage box 18 is moved by the rollers 16a and 16b, it is easy to move the storage box 18 by just rolling it thereon, and a device with a simple structure can be obtained.

In the above embodiment, an arm is provided at the end of the second station as a means for transporting the storage box from the first station to the second station, but the present invention is not limited to this.

For example, it is conceivable to provide a cylinder on the side opposite to the moving direction of the storage box at the first station, or to have the operator roll it by hand.

[Effects of the Invention] As described in detail above, according to the present invention, it is possible to provide a semiconductor transfer device that is lower in cost than conventional devices and has a simple structure without complicated moving members such as a robot hand.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram of a semiconductor transport device according to an embodiment of the present invention, and FIG. 2 is an explanatory diagram of a conventional semiconductor transport device. 11a, 11b... Member, 12.15-station, 13... Guide rail, 14... Conveyance carrier,
16a, 16b...roller, 17...arm, 18
...Storage box.

Claims (1)

[Claims] In a semiconductor transport device that transports a semiconductor component storage box that passes through a narrow tunnel on a guide rail from a first station between the tunnels to another second station, rollers are provided at each of the first and second stations. A semiconductor transport device, wherein the storage box is mounted on the semiconductor transport device and transported from a first station to a second station.