JPS63104346U - - Google Patents
Info
- Publication number
- JPS63104346U JPS63104346U JP20165086U JP20165086U JPS63104346U JP S63104346 U JPS63104346 U JP S63104346U JP 20165086 U JP20165086 U JP 20165086U JP 20165086 U JP20165086 U JP 20165086U JP S63104346 U JPS63104346 U JP S63104346U
- Authority
- JP
- Japan
- Prior art keywords
- work holding
- protruding
- holding mechanism
- openings
- holding jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20165086U JPS63104346U (it) | 1986-12-24 | 1986-12-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20165086U JPS63104346U (it) | 1986-12-24 | 1986-12-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63104346U true JPS63104346U (it) | 1988-07-06 |
Family
ID=31165301
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20165086U Pending JPS63104346U (it) | 1986-12-24 | 1986-12-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63104346U (it) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH052050A (ja) * | 1991-06-25 | 1993-01-08 | Nec Corp | 高電力半導体集積回路冷却試験治具 |
JP2013232450A (ja) * | 2012-04-27 | 2013-11-14 | Towa Corp | 個片化装置用真空吸着シート及びそれを用いた固定治具の製造方法 |
-
1986
- 1986-12-24 JP JP20165086U patent/JPS63104346U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH052050A (ja) * | 1991-06-25 | 1993-01-08 | Nec Corp | 高電力半導体集積回路冷却試験治具 |
JP2013232450A (ja) * | 2012-04-27 | 2013-11-14 | Towa Corp | 個片化装置用真空吸着シート及びそれを用いた固定治具の製造方法 |