JPS63103907A - Measuring instrument utilizing compressed air - Google Patents
Measuring instrument utilizing compressed airInfo
- Publication number
- JPS63103907A JPS63103907A JP25035086A JP25035086A JPS63103907A JP S63103907 A JPS63103907 A JP S63103907A JP 25035086 A JP25035086 A JP 25035086A JP 25035086 A JP25035086 A JP 25035086A JP S63103907 A JPS63103907 A JP S63103907A
- Authority
- JP
- Japan
- Prior art keywords
- compressed air
- air
- temperature
- measuring instrument
- heat exchanger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 27
- 238000005259 measurement Methods 0.000 claims abstract description 15
- 230000005855 radiation Effects 0.000 abstract description 6
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 239000000523 sample Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- 239000002470 thermal conductor Substances 0.000 description 1
Abstract
Description
本発明は、圧縮空気利用測定機に係り、特に、相対移動
する部材の運動に関与する空気軸受や空気バランス機構
等の圧縮空気利用機構を有する圧縮空気利用測定機の改
良に関する。The present invention relates to a measuring instrument that utilizes compressed air, and particularly relates to an improvement of a measuring instrument that utilizes compressed air that has a compressed air utilizing mechanism such as an air bearing or an air balance mechanism that is involved in the motion of relatively moving members.
【従来の技術］
被測定物に対して三次元的に相対移動可能なプローブを
用いて形状測定を行う三次元測定機は、多種多様な形状
が容易にしかも高能率に測定可能であるため、あらゆる
産業分野で活用されている。
最近は、更に測定結反の改善や高別能化の要求に応える
ため、機構部の中に圧縮空気を利用する空気軸受や空気
バランス機構部が組込まれるようになっている。
ＴＡ５図は、圧縮空気利用機構の一例としての空気ｈｌ
ｌ受を用いた従来の移動ブリッジ型の三次元測定機の一
例を示したものである。この三次元測定機８においては
、被測定物が載置される載物台１０に対して、プローブ
１２がＸ軸スライダ１４、Ｙ軸スライダ１６、Ｚ軸スラ
イダ１８の摺動によって三次元的に移動可能とされてお
り、各軸に備えられた図示しないスケールを用いてプロ
ーブ１２の移動量を読取ることによって、被測定物の形
状が測定できるようにされている。
各スライダ１４．１６．１８は空気軸受で支持されてい
るが、そのうちのＹ軸スライダ１６の空気軸受の構造を
第６図に示す。第６図は、第５図の矢印■方向から見た
矢祝図である。この空気軸受２０においては、案内レー
ル２２に対して、３個のエアバッド２４を介してＹ軸ス
ライダ１６の胛部１６Ｂの下端支持部１６Ａが支承され
ている。
各エアバッド２４には、コンプレッサや工場配管等の、
外部の図示しなシ）圧力源からエアチューブ２６を介し
て圧縮空気が供給され、この圧縮空気が各エアバッド２
４の底面の■孔から案内レール２２に対して定常的に吹
き出ずようにされている。
従って、機械式の軸受と異なり、非接触であり、周動が
滑らかで摩耗がないため、より高′ｖｉ度なより定が可
能とな少。
又、第７図は、圧縮空気利用ｖ１４Ｍの他の例として、
出願人が特開昭５７−７３６０１で提案した空気バラン
ス機構を用いた従来の三次元測定機の他の例を示したも
のである。この空気バランスは横３０においては、連結
稈３２と接続された図示しないピストンが、エアチュー
ブ３４から供給される圧縮空気のダンパ作用を受けるよ
うにされている。従って、連結稈３２に係合された７帖
スライダ１８及びプローブ１２は、操作者が手を離して
も落下せず、操作する際には負荷が少ない等、高機能と
なっている。
これらの圧縮空気利用８５！程４を有する三次元測定機
は、一般に室温が例えば２０℃で一定に制御された恒温
室等に設置され、測定機もその状態で精度保証が行われ
ている。
［′ｆｌ明が解決しようとする問題点］しかしながら、
外部の圧力源から供給される圧縮空気の温度は、例えば
コンプレッサの場合は断熱圧縮のため空温より高くなり
、又、工場配管の場合は、配管途中で熱交換が行われる
ため、夏では高い温度、冬では室温よりかなり低い温度
になることがある。
従って、測定機が２０℃の部屋に設置されていても、前
記のような圧縮空気が供給されると、測定機内部で圧縮
空気の流通する部分と室温に慣らされている部分とに温
度差が生じて構造体が変形し、精度が劣化するという問
題点を有していた。
このような問題点を解決するべく、電気的なり−ラヤヒ
ータを用いて圧縮空気の温度をｉｔ、ＩＩ御することも
考えられるが、クーラやヒータは価格的に高く大型であ
り、何よりも制ｔ１１装置自体の発熱琵が大きいため、
恒ＷＷ等には導入が困難であるという問題点を有してい
た。
【発明の目的］
本発明は、前記従来の問題点を解消するべくなされたも
ので、温度制御手段の発熱口が少なく、高精度の測定が
可能な圧縮空気利用測定機を提供することを目的とする
。
【問題点を解決するための手段】
本発明は、被測定物の測定点を指示する手段を保持する
第１の部材と、被測定物に対して静止している第２の部
材と、外部の圧力源に接続され、前記第１及び第２の部
材の相対移動に関与する圧縮空気利用機構とを含み、前
記第１及び第２の部材の相対移動量から被測定物の形状
測定を行う圧縮空気利用測定機において、前記圧力源と
圧縮空気利用機構の間に、圧縮空気の温度を測定はの雰
囲気温度に近づけるための熱交換器を配設することによ
り、前記目的を達成したものである。
又、本発明の実施態様は、前記熱交換器を、圧縮空気の
流通する配管と、該配管の表面に外気を循環させる手段
とを含んで構成したものである。
又、本発明の実施悪球は、前記圧縮空気利用機構を、空
気軸受としたものである。
又、本発明の実施態様は、１１１Ｊ記圧縮空気利用機構
を、空気バランス機構としたものである。[Prior Art] A three-dimensional measuring machine that measures the shape of an object using a probe that can move relative to the object in three dimensions can easily and efficiently measure a wide variety of shapes. It is used in all industrial fields. Recently, in order to meet the demands for further improvement in measurement results and higher performance, air bearings and air balance mechanisms that utilize compressed air have been incorporated into the mechanism. TA5 diagram shows air hl as an example of a compressed air utilization mechanism.
This figure shows an example of a conventional moving bridge type three-dimensional measuring machine using a receiver. In this three-dimensional measuring machine 8, a probe 12 is moved three-dimensionally by sliding of an X-axis slider 14, a Y-axis slider 16, and a Z-axis slider 18 with respect to a stage 10 on which an object to be measured is placed. The probe 12 is movable, and the shape of the object to be measured can be measured by reading the amount of movement of the probe 12 using scales (not shown) provided on each axis. Each slider 14, 16, 18 is supported by an air bearing, and the structure of the air bearing of the Y-axis slider 16 is shown in FIG. FIG. 6 is an arrow diagram viewed from the direction of the arrow ■ in FIG. In this air bearing 20, the lower end support portion 16A of the flange portion 16B of the Y-axis slider 16 is supported by the guide rail 22 via three air pads 24. Each air bud 24 has a compressor, factory piping, etc.
Compressed air is supplied from an external pressure source (not shown) through the air tube 26, and this compressed air is supplied to each air bud 2.
4 from the hole 4 on the bottom surface to prevent it from constantly blowing out against the guide rail 22. Therefore, unlike mechanical bearings, there is no contact, smooth circumferential motion, and no wear, making it possible to maintain a higher degree of vibration. In addition, FIG. 7 shows another example of compressed air usage v14M.
This figure shows another example of the conventional three-dimensional measuring machine using the air balance mechanism proposed by the applicant in Japanese Patent Laid-Open No. 57-73601. This air balance is such that in the lateral direction 30, a piston (not shown) connected to the connecting culm 32 receives the damping effect of compressed air supplied from the air tube 34. Therefore, the seven-layer slider 18 and the probe 12 engaged with the connecting culm 32 do not fall even if the operator removes his/her hand, and the load is small when operating them, resulting in high functionality. These compressed air uses 85! A three-dimensional measuring machine having a temperature range of 4 is generally installed in a constant temperature room or the like where the room temperature is controlled to be constant at, for example, 20° C., and the accuracy of the measuring machine is guaranteed in that state. [The problem that 'fl Ming tries to solve] However,
For example, in the case of a compressor, the temperature of compressed air supplied from an external pressure source is higher than the air temperature due to adiabatic compression, and in the case of factory piping, heat exchange occurs in the middle of the piping, so it can be high in summer. Temperatures can be considerably lower than room temperature in winter. Therefore, even if the measuring device is installed in a room at 20°C, when compressed air is supplied as described above, there will be a temperature difference between the part of the measuring machine where the compressed air flows and the part that is used to room temperature. This has caused problems such as deformation of the structure and deterioration of accuracy. In order to solve these problems, it is possible to control the temperature of compressed air using an electric heater, but coolers and heaters are expensive and large, and above all, they are difficult to control. Because the heat generation of the device itself is large,
The problem was that it was difficult to introduce into the World Wide Web. [Object of the Invention] The present invention was made to solve the above-mentioned conventional problems, and an object of the present invention is to provide a measuring device using compressed air that has fewer heating ports in the temperature control means and is capable of highly accurate measurement. shall be. [Means for Solving the Problems] The present invention includes a first member holding a means for indicating a measurement point of an object to be measured, a second member that is stationary with respect to the object to be measured, and an external a compressed air utilization mechanism connected to a pressure source and involved in relative movement of the first and second members, and measuring the shape of the object from the amount of relative movement of the first and second members. In the compressed air measuring device, the above objective is achieved by disposing a heat exchanger between the pressure source and the compressed air utilization mechanism to bring the temperature of the compressed air close to the ambient temperature of the measuring device. be. Further, in an embodiment of the present invention, the heat exchanger is configured to include piping through which compressed air flows and means for circulating outside air on the surface of the piping. Further, in an embodiment of the present invention, the compressed air utilization mechanism is an air bearing. Further, in an embodiment of the present invention, the compressed air utilization mechanism described in 111J is an air balance mechanism.
本発明においては、外部の圧力源と圧縮空気利用機構の
間に、圧縮空気の温度を測定別の雰囲気温度に近づける
ための熱交換器を配設するようにしている。従って、タ
ープやヒータを用いることなく、圧縮空気の温度を測定
機の雰囲気湿度に近づけることができ、発熱ｆａが少な
いので、高精度の測定を行うことが可能となる。
又、前記熱交ｌ！２ｉ器を、圧縮空気の流通する配管と
、該配管の表面に外気を循環させる手段とを含んで構成
した場合には、熱交換器を安価に打４成でき、発熱量も
少ない。
更に、１１な記圧縮空気利用は構を、空気軸受とした場
合には、空気軸受の熱変形による精度低下を防止できる
。
又、＋ｉＱ記前記圧縮空気利用機構を、空気バランス機
転１とした場合には、空気バランス機構の熱変形による
精度低下を防止できる。In the present invention, a heat exchanger is disposed between the external pressure source and the compressed air utilization mechanism to bring the temperature of the compressed air close to the ambient temperature for each measurement. Therefore, the temperature of the compressed air can be brought close to the atmospheric humidity of the measuring device without using a tarp or a heater, and since the heat generation fa is small, highly accurate measurement can be performed. Also, the heat exchange l! When the 2i device is configured to include piping through which compressed air flows and means for circulating outside air on the surface of the piping, the heat exchanger can be constructed at low cost and generates less heat. Furthermore, if the compressed air utilization mechanism mentioned above is an air bearing, it is possible to prevent a decrease in accuracy due to thermal deformation of the air bearing. Further, when the compressed air utilization mechanism described in +iQ is set to air balance mechanism 1, it is possible to prevent a decrease in accuracy due to thermal deformation of the air balance mechanism.
【実施例］
以下、図面を参照して、本発明に係るコラム移動型のジ
グポーラ型三次元測定機８の実施例を詳細に説明する。
本実施例は、第１図に示づ如く構成されており、Ｘ軸ス
ライダの代わりに載物台１０が空気１抛受でＸ方向に摺
動され、コラム３４を支持してＹ方向に摺動するＹ軸ス
ライダ１６、プローブ１２を支持して２方向に摺動する
２軸スライダ１８にも、それぞれ空気軸受が組込まれて
いる。図において、３６は被測定物である。なＪ３、測
定点を指示する手段としてプローブ１２が備えられてい
るが、これはビデオカメラ等でも可能である。
第２図は、前記三次元測定機８の空気供給系統を示した
もので、コンプレッサや工場配管等の圧力源３８から、
熱交換器４０及び例えばフィルタ４２、レギュレータ４
４及び圧力計４６を経由して圧縮空気が供給されている
。なお、フィルタ４２ヤ」レギュレータ４４は、熱交換
器４ｏと圧力源３８の間に設置することも可能である。
前記熱交換器４０は、第３図及び第４図に示す如く構成
されており、圧力源から供給される圧縮空気が一方の接
続ノズル５ｏから配管５２に入り、他方の接続ノズル５
４から測定機本体に流出するようにされている。
１〕う記配管５２はカバー５６で被覆されており、内部
に空気を循環させるための手段としてのファンモータ５
８が設置されている。前記カバー５６には、カバーの外
の空気（外気）を取入れるための外気取入孔５６Ａ及び
排出用の外気排出孔５６Ｂが多数穿設されている。
更に、前記配管５２の前後には、配管外の空気（外気）
との接触面積を増加させるための放熱フィン６０が複数
設けられている。
前記配管５２や放熱フィン６０の材質は、熱の良尋体で
ある鋼、アルミ等の全屈が好ましいが、合成樹脂やゴム
系の累材であってもよい。
以下、実施例の作用を説明する。
測定に際して熱交換器４０のファンモータ５８が回転す
ると、外気が配管５２及び放熱フィン６０の表面を循環
する。従って、配管内部の圧縮空気の温度は外気の温度
により近づくことになる。
よって、三次元測定１１８の本体には、雰囲気の温ｒｒ
ｉ＜室温）に近い圧縮空気が供給され、構造体の歪が減
少してより高ｖｉ度な測定が可能となる。
なお、本実施例においては、熱交換器４０の（１°４成
が前略であるため、熱交換器を安価で且つ小型に構成で
きる。なお、熱交換器の構成はこれに限定されない。
又、本実施例においては、熱交換器４０にカバー５６が
設けられでいたため、熱交換効率が高い。
なお、カバー５６を省略することも可能である。
更に、本実施例においては、配管５２の前後に放熱フィ
ン６０を設けていたため、熱交換効率が高い。なお、放
熱フィン６０を省略することも可能である。
又、本実施例においては、外気を循環させる手段として
ファンモータ５８を用いていたので、外気を循環させる
手段を安価に１閃成することができる。なお、外気を循
環ざゼる手段はこれに限定されず、他にヒートバイブで
配管５２と外気との間で熱交換させる機構等も考えられ
る。
更に、本実施例においては、熱交換器４０の配管５２が
曲線状のパイプとされているので、外気との接触面積を
大きくとることができる。なお配管５２の形状はこれに
限定されず、外気との接触面積を大きくできる構造であ
れば、例えば薄い層状の空気至を何層も川ねた構造等に
することも可能である。
なお、前記実施例においては、本発明が三次元測定機の
空気軸受に適用されていたが、本発明の適用範囲はこれ
に限定されず、−次元の測長６１にも同様に適用できる
。又、第７図に示したような空気バランス機構を有する
測定機等で、圧縮空気利用機構を有する測定改一般にも
同様に適用することができる。
【発明の効果】
以上説明した通り、本発明によれば、クーラヤヒータを
使用ずろことなく圧縮空気を空温に近づけることができ
、発熱扮が少ない。従って、ａ８！ｆａ度の測定を行う
ことが可能となるという優れた効果を有する。[Embodiment] Hereinafter, an embodiment of the column-moving jig polar type coordinate measuring machine 8 according to the present invention will be described in detail with reference to the drawings. The present embodiment is constructed as shown in FIG. 1, and instead of the X-axis slider, the stage 10 is slid in the X direction by receiving one air, and supports the column 34 to slide in the Y direction. The Y-axis slider 16 that moves and the two-axis slider 18 that supports the probe 12 and slides in two directions are each equipped with air bearings. In the figure, 36 is an object to be measured. Although a probe 12 is provided as a means for indicating a measurement point, a video camera or the like may also be used. FIG. 2 shows the air supply system of the coordinate measuring machine 8, in which air is supplied from a pressure source 38 such as a compressor or factory piping.
Heat exchanger 40 and e.g. filter 42, regulator 4
Compressed air is supplied via 4 and a pressure gauge 46. Note that the filter 42 and the regulator 44 can also be installed between the heat exchanger 4o and the pressure source 38. The heat exchanger 40 is constructed as shown in FIGS. 3 and 4, and compressed air supplied from a pressure source enters the pipe 52 from one connection nozzle 5o and passes through the other connection nozzle 5o.
4 into the measuring machine body. 1] The pipe 52 is covered with a cover 56, and a fan motor 5 is installed as a means for circulating air inside.
8 is installed. The cover 56 is provided with a large number of outside air intake holes 56A for taking in air outside the cover (outside air) and many outside air exhaust holes 56B for discharging air. Furthermore, air outside the pipe (outside air) is provided before and after the pipe 52.
A plurality of heat dissipation fins 60 are provided to increase the contact area with the heat dissipation fins 60. The material of the piping 52 and the radiation fins 60 is preferably fully bent, such as steel or aluminum, which is a good thermal conductor, but may also be made of synthetic resin or rubber-based composite material. The effects of the embodiment will be explained below. When the fan motor 58 of the heat exchanger 40 rotates during measurement, outside air circulates on the surfaces of the piping 52 and the heat radiation fins 60. Therefore, the temperature of the compressed air inside the pipe becomes closer to the temperature of the outside air. Therefore, the main body of the three-dimensional measurement 118 has the temperature rr of the atmosphere.
Compressed air close to i<room temperature) is supplied, which reduces strain on the structure and enables higher-vi measurements. In addition, in this embodiment, since the heat exchanger 40 has a 1° four-component configuration, the heat exchanger can be configured to be inexpensive and compact. Note that the configuration of the heat exchanger is not limited to this. In this embodiment, since the heat exchanger 40 was not provided with the cover 56, the heat exchange efficiency was high. Note that the cover 56 could also be omitted.Furthermore, in this embodiment, the piping 52 Heat exchange efficiency is high because the heat radiation fins 60 are provided before and after the heat radiation fins 60.It is also possible to omit the radiation fins 60.Furthermore, in this embodiment, the fan motor 58 is used as a means for circulating outside air. Therefore, a means for circulating the outside air can be created at a low cost.Means for circulating the outside air are not limited to this. A mechanism for exchanging the heat exchanger may also be considered.Furthermore, in this embodiment, since the piping 52 of the heat exchanger 40 is a curved pipe, the contact area with the outside air can be increased. The shape is not limited to this, and as long as the structure can increase the contact area with the outside air, it is also possible to have a structure in which several thin layers of air flow, for example. Although the present invention was applied to an air bearing of a coordinate measuring machine, the scope of application of the present invention is not limited thereto, and can be similarly applied to the -dimensional length measurement 61. The present invention can be similarly applied to a measuring device having an air balance mechanism as shown, and also to a general measuring device having a compressed air utilization mechanism. [Effects of the Invention] As explained above, according to the present invention, a cooler heater can be Compressed air can be brought close to the air temperature without any need for use, and there is little heat generation.Therefore, it has the excellent effect of making it possible to measure a8!fa degrees.
【図面の簡単な説明】
第１図は、本発明に係る、空気軸受を有するコラム移動
型のジグポーラ型三次元測定機の実施例の全体４ｉ４戒
を示す斜視図、第２図は、前記実施例の空気供給系統を
示す系統図、第３図は、前記実施例で用いられている熱
交換器の構成を示す正面断面図、第４図は、第３図のＩ
Ｖ −ＩＶ ８２に沿う横断面図、第５図は、空気軸受
を用いた従来の移動ブリッジ型三次元測定機の一例の構
成を示す斜視図、第６図は、前記三次元測定はで用いら
れている空気軸受の構成を示す、第５図の矢視■方向か
ら見た正面図、第７図は、空気バランス機構を用いた従
来の三次元測定層の他の例の要部構成を示す断面図であ
る。
８・・・三次元測定機、
１２・・・プローブ、
１６・・・Ｙ軸スライダ、
１８・・・Ｚ軸スライダ、
２０・・・空気軸受、
３０・・・空気バランス機構、
３６・・・被測定物、
３８・・・圧力源、
４０・・・熱交換器、
５２・・・配管、
５８・・・ファンモータ。[BRIEF DESCRIPTION OF THE DRAWINGS] Fig. 1 is a perspective view showing the entire 4i4 precepts of an embodiment of a column-moving jig-polar coordinate measuring machine with an air bearing according to the present invention, and Fig. FIG. 3 is a front sectional view showing the configuration of the heat exchanger used in the example, and FIG. 4 is a system diagram showing the air supply system of the example.
FIG. 5 is a perspective view showing the configuration of an example of a conventional moving bridge type coordinate measuring machine using an air bearing, and FIG. 6 is a cross-sectional view along V-IV 82. Fig. 5 shows the configuration of the air bearing as seen from the direction of the arrow (■), and Fig. 7 shows the main part configuration of another example of the conventional three-dimensional measurement layer using the air balance mechanism. FIG. 8... Coordinate measuring machine, 12... Probe, 16... Y-axis slider, 18... Z-axis slider, 20... Air bearing, 30... Air balance mechanism, 36... Object to be measured, 38... Pressure source, 40... Heat exchanger, 52... Piping, 58... Fan motor.
Claims (4)
の部材と、 被測定物に対して静止している第２の部材と、外部の圧
力源に接続され、前記第１及び第２の部材の相対移動に
関与する圧縮空気利用機構とを含み、 前記第１及び第２の部材の相対移動量から被測定物の形
状測定を行う圧縮空気利用測定機において、 前記圧力源と圧縮空気利用機構の間に、圧縮空気の温度
を測定機の雰囲気温度に近づけるための熱交換器を配設
したことを特徴とする圧縮空気利用測定機。(1) A first holding means for indicating the measurement point of the object to be measured.
a second member that is stationary with respect to the object to be measured; and a compressed air utilization mechanism that is connected to an external pressure source and is involved in relative movement of the first and second members, In a compressed air measuring device that measures the shape of an object to be measured based on the amount of relative movement of the first and second members, the temperature of the compressed air is connected between the pressure source and the compressed air utilizing mechanism to adjust the temperature of the compressed air to the ambient temperature of the measuring device. A measuring device that uses compressed air, characterized by being equipped with a heat exchanger to bring it closer to the air.
配管の表面に外気を循環させる手段とを含んで構成され
ている特許請求の範囲第１項記載の圧縮空気利用測定機
。(2) The compressed air measuring instrument according to claim 1, wherein the heat exchanger includes a pipe through which compressed air flows and a means for circulating outside air on the surface of the pipe.
求の範囲第１項記載の圧縮空気利用測定機。(3) The compressed air utilization measuring instrument according to claim 1, wherein the compressed air utilization mechanism is an air bearing.
る特許請求の範囲第１項記載の圧縮空気利用測定機。(4) The compressed air utilization measuring instrument according to claim 1, wherein the compressed air utilization mechanism is an air balance mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25035086A JPS63103907A (en) | 1986-10-21 | 1986-10-21 | Measuring instrument utilizing compressed air |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25035086A JPS63103907A (en) | 1986-10-21 | 1986-10-21 | Measuring instrument utilizing compressed air |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63103907A true JPS63103907A (en) | 1988-05-09 |
| JPH04527B2 JPH04527B2 (en) | 1992-01-07 |
Family
ID=17206607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25035086A Granted JPS63103907A (en) | 1986-10-21 | 1986-10-21 | Measuring instrument utilizing compressed air |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63103907A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03289510A (en) * | 1990-04-05 | 1991-12-19 | Showa Alum Corp | Device for detecting shape of rolled foil having air-bearing type shape detecting roll |
| JP2008296303A (en) * | 2007-05-30 | 2008-12-11 | Tokyo Seimitsu Co Ltd | Method of controlling pressure and temperature of compressed air for measuring machine |
| US7966743B2 (en) * | 2007-07-31 | 2011-06-28 | Eastman Kodak Company | Micro-structured drying for inkjet printers |
| JP2012068039A (en) * | 2010-09-21 | 2012-04-05 | Mitsutoyo Corp | Industrial machine |
-
1986
- 1986-10-21 JP JP25035086A patent/JPS63103907A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03289510A (en) * | 1990-04-05 | 1991-12-19 | Showa Alum Corp | Device for detecting shape of rolled foil having air-bearing type shape detecting roll |
| JP2008296303A (en) * | 2007-05-30 | 2008-12-11 | Tokyo Seimitsu Co Ltd | Method of controlling pressure and temperature of compressed air for measuring machine |
| US7966743B2 (en) * | 2007-07-31 | 2011-06-28 | Eastman Kodak Company | Micro-structured drying for inkjet printers |
| JP2012068039A (en) * | 2010-09-21 | 2012-04-05 | Mitsutoyo Corp | Industrial machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04527B2 (en) | 1992-01-07 |
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