JPS63103738U - - Google Patents

Info

Publication number
JPS63103738U
JPS63103738U JP19679986U JP19679986U JPS63103738U JP S63103738 U JPS63103738 U JP S63103738U JP 19679986 U JP19679986 U JP 19679986U JP 19679986 U JP19679986 U JP 19679986U JP S63103738 U JPS63103738 U JP S63103738U
Authority
JP
Japan
Prior art keywords
electromagnetic waves
oven
vacuum container
plasma
stirrer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19679986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517150Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19679986U priority Critical patent/JPH0517150Y2/ja
Publication of JPS63103738U publication Critical patent/JPS63103738U/ja
Application granted granted Critical
Publication of JPH0517150Y2 publication Critical patent/JPH0517150Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP19679986U 1986-12-23 1986-12-23 Expired - Lifetime JPH0517150Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19679986U JPH0517150Y2 (cg-RX-API-DMAC7.html) 1986-12-23 1986-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19679986U JPH0517150Y2 (cg-RX-API-DMAC7.html) 1986-12-23 1986-12-23

Publications (2)

Publication Number Publication Date
JPS63103738U true JPS63103738U (cg-RX-API-DMAC7.html) 1988-07-05
JPH0517150Y2 JPH0517150Y2 (cg-RX-API-DMAC7.html) 1993-05-10

Family

ID=31155935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19679986U Expired - Lifetime JPH0517150Y2 (cg-RX-API-DMAC7.html) 1986-12-23 1986-12-23

Country Status (1)

Country Link
JP (1) JPH0517150Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0517150Y2 (cg-RX-API-DMAC7.html) 1993-05-10

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