JPS63102994U - - Google Patents
Info
- Publication number
- JPS63102994U JPS63102994U JP20297486U JP20297486U JPS63102994U JP S63102994 U JPS63102994 U JP S63102994U JP 20297486 U JP20297486 U JP 20297486U JP 20297486 U JP20297486 U JP 20297486U JP S63102994 U JPS63102994 U JP S63102994U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- housing
- unit assembly
- supports
- drives
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案の一実施例を示すＴＭＰの概略
断面図であり、第２図はその要部の半断面図であ
る。
１……ポンプベース、７……ロータ、８……駆
動部アセンブリ、９……ハウジング、１０……ロ
ータシヤフト、１１，１２……モータ、１３ａ，
１３ｂ……磁気軸受、１４ａ，１４ｂ……磁気軸
受、１５ａ，１５ｂ……磁気軸受、１９……ボル
ト。
FIG. 1 is a schematic sectional view of a TMP showing an embodiment of the present invention, and FIG. 2 is a half sectional view of the main part thereof. DESCRIPTION OF SYMBOLS 1... Pump base, 7... Rotor, 8... Drive unit assembly, 9... Housing, 10... Rotor shaft, 11, 12... Motor, 13a,
13b...Magnetic bearing, 14a, 14b...Magnetic bearing, 15a, 15b...Magnetic bearing, 19...Volt.
Claims (1)
シヤフトを駆動する駆動源と、同シヤフトを軸支
する軸受機構とを組立ててなる駆動部アセンブリ
を、ポンプベースに着脱可能に取着してなること
を特徴とするターボ分子ポンプ。 A drive unit assembly, which is made up of a drive source that drives a rotor shaft that is inserted into the housing and a bearing mechanism that supports the shaft, is removably attached to the pump base. A turbo molecular pump featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20297486U JPS63102994U (en) | 1986-12-23 | 1986-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20297486U JPS63102994U (en) | 1986-12-23 | 1986-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102994U true JPS63102994U (en) | 1988-07-04 |
Family
ID=31167863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20297486U Pending JPS63102994U (en) | 1986-12-23 | 1986-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102994U (en) |
-
1986
- 1986-12-23 JP JP20297486U patent/JPS63102994U/ja active Pending