JPS63102767U - - Google Patents
Info
- Publication number
- JPS63102767U JPS63102767U JP19459286U JP19459286U JPS63102767U JP S63102767 U JPS63102767 U JP S63102767U JP 19459286 U JP19459286 U JP 19459286U JP 19459286 U JP19459286 U JP 19459286U JP S63102767 U JPS63102767 U JP S63102767U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holding ring
- holding
- epitaxial growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19459286U JPS63102767U (enExample) | 1986-12-19 | 1986-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19459286U JPS63102767U (enExample) | 1986-12-19 | 1986-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102767U true JPS63102767U (enExample) | 1988-07-04 |
Family
ID=31151706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19459286U Pending JPS63102767U (enExample) | 1986-12-19 | 1986-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102767U (enExample) |
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1986
- 1986-12-19 JP JP19459286U patent/JPS63102767U/ja active Pending