JPS63102767U - - Google Patents

Info

Publication number
JPS63102767U
JPS63102767U JP19459286U JP19459286U JPS63102767U JP S63102767 U JPS63102767 U JP S63102767U JP 19459286 U JP19459286 U JP 19459286U JP 19459286 U JP19459286 U JP 19459286U JP S63102767 U JPS63102767 U JP S63102767U
Authority
JP
Japan
Prior art keywords
substrate
holding ring
holding
epitaxial growth
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19459286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19459286U priority Critical patent/JPS63102767U/ja
Publication of JPS63102767U publication Critical patent/JPS63102767U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP19459286U 1986-12-19 1986-12-19 Pending JPS63102767U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19459286U JPS63102767U (enrdf_load_stackoverflow) 1986-12-19 1986-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19459286U JPS63102767U (enrdf_load_stackoverflow) 1986-12-19 1986-12-19

Publications (1)

Publication Number Publication Date
JPS63102767U true JPS63102767U (enrdf_load_stackoverflow) 1988-07-04

Family

ID=31151706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19459286U Pending JPS63102767U (enrdf_load_stackoverflow) 1986-12-19 1986-12-19

Country Status (1)

Country Link
JP (1) JPS63102767U (enrdf_load_stackoverflow)

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