JPS63102756U - - Google Patents
Info
- Publication number
- JPS63102756U JPS63102756U JP19767186U JP19767186U JPS63102756U JP S63102756 U JPS63102756 U JP S63102756U JP 19767186 U JP19767186 U JP 19767186U JP 19767186 U JP19767186 U JP 19767186U JP S63102756 U JPS63102756 U JP S63102756U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sputtering
- holder
- target
- mask member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19767186U JPS63102756U (ru) | 1986-12-23 | 1986-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19767186U JPS63102756U (ru) | 1986-12-23 | 1986-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102756U true JPS63102756U (ru) | 1988-07-04 |
Family
ID=31157637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19767186U Pending JPS63102756U (ru) | 1986-12-23 | 1986-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102756U (ru) |
-
1986
- 1986-12-23 JP JP19767186U patent/JPS63102756U/ja active Pending