JPS63102297A - Manufacture of shielded multilayer board - Google Patents
Manufacture of shielded multilayer boardInfo
- Publication number
- JPS63102297A JPS63102297A JP24797486A JP24797486A JPS63102297A JP S63102297 A JPS63102297 A JP S63102297A JP 24797486 A JP24797486 A JP 24797486A JP 24797486 A JP24797486 A JP 24797486A JP S63102297 A JPS63102297 A JP S63102297A
- Authority
- JP
- Japan
- Prior art keywords
- shield
- layer
- multilayer board
- manufacture
- ferromagnetic material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000003302 ferromagnetic material Substances 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 229910052799 carbon Inorganic materials 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 239000011889 copper foil Substances 0.000 claims description 7
- 238000007733 ion plating Methods 0.000 claims description 7
- 238000010030 laminating Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 230000005294 ferromagnetic effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000003475 lamination Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000005291 magnetic effect Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
く産業上の利用分野〉
この発明は、シールド〉層基板、すなわち内層にシール
ド効果を持つシールド板を備えた多層プリント配線板の
製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION Industrial Application Field The present invention relates to a method for manufacturing a shield layer board, that is, a multilayer printed wiring board having a shield plate having a shielding effect as an inner layer.
く従来の技術〉
第3図にこの種の多層基板を製造する従来の方法の一般
的な例を示す。1はエツチングしてない銅箔を両面に備
えたプリント配線板であり、この両面にそれぞれプリプ
レグ2,2を積層し、その外側両面に銅箔3,3を積層
し、更にその外側に離型フィルム4.4を介して鏡面板
5,5を置き、これを熱板6,6によりプレス成形する
ことによって、1枚の4層のシールド多層基板を得るの
である。尚、7はクッションシート、8は送り板である
。2. Prior Art FIG. 3 shows a general example of a conventional method for manufacturing this type of multilayer board. 1 is a printed wiring board with non-etched copper foil on both sides, prepregs 2, 2 are laminated on both sides, copper foils 3, 3 are laminated on both outer sides, and mold release is applied on the outside. By placing the mirror plates 5, 5 through the film 4.4 and press-molding them with the hot plates 6, 6, one four-layer shield multilayer board is obtained. Note that 7 is a cushion sheet and 8 is a feed plate.
〈発明が解決しようとする間厘点〉
上述の方法によって製造されたシールド多層基板は、シ
ールド板として銅箔を用いているためシールド効果が小
さく、使用場所によっては所期の目的を果たすことがで
きない場合があった。<The problem that the invention seeks to solve> The shield multilayer board manufactured by the above method has a small shielding effect because copper foil is used as the shield plate, and may not be able to achieve the intended purpose depending on the place of use. There were times when I couldn't do it.
この発明はこのような間2.αにlし、シールド効果の
高いシールド多層基板を得ることを目的としてなされた
ものである。This invention is applicable to such a period 2. This was done for the purpose of obtaining a shield multilayer board with a high shielding effect.
く問題点を解決するための手段〉
上述の目的を達成するために、この発明では、導電性の
カーボンシートにイオンプレーティング法により強磁性
体の層を形成し、更にこれを内層としてその両面にプリ
プレグを介して坩箔をプレス積層している。Means for Solving the Problems> In order to achieve the above object, the present invention forms a ferromagnetic layer on a conductive carbon sheet by ion plating, and further uses this as an inner layer on both sides of the sheet. The crucible foil is laminated by pressing through the prepreg.
く作用〉
X遣された多層基板の内層には強磁性体からなるシール
ド層が形e、されるので、高いシールド効果を持つシー
ルド多層基板が得られる。Effect> Since a shield layer made of a ferromagnetic material is formed on the inner layer of the X-layered multilayer board, a shield multilayer board with a high shielding effect can be obtained.
〈実施例〉
次に図示の一実施例について説明する。m1図はプレス
積層の状況を示す図、第2図はシールド板の製造手順を
示す図であり、第3図と同一の部分は同一の符号で示し
、異なる部分についてのみ説明する。<Example> Next, an example shown in the drawings will be described. Figure m1 is a diagram showing the state of press lamination, and Figure 2 is a diagram showing the manufacturing procedure of the shield plate. The same parts as in Figure 3 are indicated by the same symbols, and only the different parts will be explained.
11は強磁性体からなるシールド層を備えたシールド板
であり、第2図に示すような工程で製造される。先ず、
強磁性体である鉄、コバルト、ニッケルあるいはこれら
の合金を用意し、るつぼ12に入れる。また、導電性の
カーボンシート11゛を別に用意し、これと上記のるつ
ハ12を第2図のような配置でイオンプレーティング槽
13内に置く。Reference numeral 11 denotes a shield plate having a shield layer made of a ferromagnetic material, and is manufactured by the process shown in FIG. First of all,
Ferromagnetic materials such as iron, cobalt, nickel, or an alloy thereof are prepared and placed in a crucible 12. Further, a conductive carbon sheet 11' is separately prepared, and this and the above-mentioned crucible 12 are placed in the ion plating tank 13 in the arrangement as shown in FIG.
このイオンプレーティング槽13にはあらかじめアルゴ
ン〃ス14を封入しておき、これを排気して1/102
〜1/103torrの真空に維持しながら、カーボン
シート11゛とるっぽ12内の金属の間に電源15によ
り数千ボルトの直流電圧を印加し、電源15によりるつ
ぼ12に交流電圧を印加してるつぼ12内の強磁性体の
金属を溶融させる。これにより、溶融金Xx17からイ
オン化された気化金属17aが発生し、気化金属17a
は電位差によってカーボンシート11゛に吸引され、そ
の周囲にメッキ層、すなわち強磁性体の層17bが形成
される。この層17bは、例えば1分間のイオンプレー
ティング処理によって5〜8μmのa厚のものとするこ
とは容易であり、この処理により、両面全面に強磁性体
の/1i17bを備えたシールド板11を得るのである
。This ion plating tank 13 is filled with argon gas 14 in advance, and the gas is evacuated to 1/102
While maintaining a vacuum of ~1/103 torr, a DC voltage of several thousand volts was applied between the carbon sheet 11 and the metal in the crucible 12 by the power supply 15, and an AC voltage was applied to the crucible 12 by the power supply 15. The ferromagnetic metal in the crucible 12 is melted. As a result, ionized vaporized metal 17a is generated from molten gold Xx17, and vaporized metal 17a
is attracted to the carbon sheet 11' by the potential difference, and a plating layer, that is, a ferromagnetic layer 17b is formed around it. This layer 17b can be easily made to have a thickness of 5 to 8 μm by, for example, 1 minute of ion plating treatment, and by this treatment, the shield plate 11 having ferromagnetic material /1i17b on both surfaces can be formed. You get it.
次にこのシールド板11の両面に、第1図(a)に示す
ようにまずプリプレグ2,2をそれぞれ積層し、その外
側両面にw4箔3,3を積層し、更にその外側に離型フ
ィルム4,4を介して鏡面板5,5を置き、第1図(b
)に示すようにこれを熱板6,6によりホットプレス成
形して、1枚の3W1のシールド多層基板を得るのであ
る。Next, prepregs 2, 2 are laminated on both sides of this shield plate 11 as shown in FIG. Place mirror plates 5 and 5 through 4 and 4, and
), this is hot-press molded using hot plates 6, 6 to obtain one 3W1 shield multilayer board.
!fSi図、第2図でプリプレグ2の厚みは100[μ
m1が一般的で、鏡面板5の厚みは25〜70[μm1
である。! In the fSi diagram and Figure 2, the thickness of the prepreg 2 is 100 [μ
m1 is common, and the thickness of the mirror plate 5 is 25 to 70 [μm1
It is.
こうして製造された多層基板の内層には、シールド板1
1がサンドイッチ状に積層され、その表裏両面には、所
定の厚さの強磁性体の層17bからなるシールド層がそ
れぞれ形成されているので、シールド板として銅箔を用
いたものに比較して高いシールド効果を奏する多層プリ
ント配線板となる。A shield plate 1 is included in the inner layer of the multilayer board manufactured in this way.
1 are stacked in a sandwich-like manner, and a shield layer consisting of a ferromagnetic material layer 17b of a predetermined thickness is formed on both the front and back sides, so compared to a shield plate using copper foil, This results in a multilayer printed wiring board that exhibits a high shielding effect.
尚、各図において各層の厚さや粒子の大きさはそれぞれ
拡大しで示しである。In each figure, the thickness of each layer and the size of particles are shown enlarged.
〈発明の効果〉
上述の実施例から明らかなように、この発明のシールド
多層基板の製造方法は、導電性のカーボンシートにイオ
ンプレーティング法により強磁性体の層を形成し、更に
これを内層としてその両面にプリプレグを介して銅箔を
プレス積層するようにしたものであり、シールド層とし
て比透磁率が1よりも逼かに大きく、磁化の程度も強い
強磁性体を用いているため、高いシールド効果を持つシ
ールド多層基板を容易に5i!遺することができるので
ある。<Effects of the Invention> As is clear from the above embodiments, the method for manufacturing a shield multilayer board of the present invention involves forming a ferromagnetic layer on a conductive carbon sheet by ion plating, and further forming an inner layer on the conductive carbon sheet. Copper foil is press laminated on both sides of the shield via prepreg, and the shield layer is made of a ferromagnetic material with a relative magnetic permeability much higher than 1 and a strong degree of magnetization. Easy 5i shield multilayer board with high shielding effect! It can be left behind.
PIS1図及び第2図はこの発明の一実施例であり、第
1図(、)は、層の構成を示す斜視図、第1図(b)は
、プレス積層の状況を示す図、第2図は、シールド板の
!ll造工程を示す図、第3図(a)は、従来例の層の
構成を示す斜視図、第3図(b)は、プレス積層の状況
を示す図である。
2・・・プリプレグ 、3・・・銅箔4・・・離型
フィルム 、6・・・熱板11・・・シールド板
、11゛・・・カーボンシート12・・・るつぼ
、13・・・イオンプレーティング槽17・・・強磁性
体の溶融金属、17a・・・気化金属17b・・・強磁
性体の層PIS Figures 1 and 2 show one embodiment of the present invention, and Figure 1 (,) is a perspective view showing the structure of the layers, Figure 1 (b) is a diagram showing the state of press lamination, and Figure 2 The diagram shows the shield plate! FIG. 3(a) is a perspective view showing the layer structure of a conventional example, and FIG. 3(b) is a diagram showing the state of press lamination. 2... Prepreg, 3... Copper foil 4... Release film, 6... Hot plate 11... Shield plate
, 11゛... Carbon sheet 12... Crucible
, 13... Ion plating tank 17... Molten metal of ferromagnetic material, 17a... Vaporized metal 17b... Layer of ferromagnetic material
Claims (1)
ティング法により強磁性体の層を形成し、更にこれを内
層としてその両面にプリプレグを介して銅箔をプレス積
層することを特徴とするシールド多層基板の製造方法。1. A shield multilayer characterized by forming a layer of ferromagnetic material on both surfaces of a conductive carbon sheet by ion plating, and then press laminating copper foil on both sides using prepreg as an inner layer. Substrate manufacturing method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24797486A JPS63102297A (en) | 1986-10-18 | 1986-10-18 | Manufacture of shielded multilayer board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24797486A JPS63102297A (en) | 1986-10-18 | 1986-10-18 | Manufacture of shielded multilayer board |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63102297A true JPS63102297A (en) | 1988-05-07 |
Family
ID=17171319
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24797486A Pending JPS63102297A (en) | 1986-10-18 | 1986-10-18 | Manufacture of shielded multilayer board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63102297A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0287593A (en) * | 1988-09-24 | 1990-03-28 | Mitsubishi Electric Corp | Printed wiring board |
-
1986
- 1986-10-18 JP JP24797486A patent/JPS63102297A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0287593A (en) * | 1988-09-24 | 1990-03-28 | Mitsubishi Electric Corp | Printed wiring board |
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