JPS63101859U - - Google Patents
Info
- Publication number
- JPS63101859U JPS63101859U JP20337486U JP20337486U JPS63101859U JP S63101859 U JPS63101859 U JP S63101859U JP 20337486 U JP20337486 U JP 20337486U JP 20337486 U JP20337486 U JP 20337486U JP S63101859 U JPS63101859 U JP S63101859U
- Authority
- JP
- Japan
- Prior art keywords
- sensor body
- sensor
- gas
- heat
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229920003002 synthetic resin Polymers 0.000 claims description 3
- 239000000057 synthetic resin Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20337486U JPS63101859U (sv) | 1986-12-23 | 1986-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20337486U JPS63101859U (sv) | 1986-12-23 | 1986-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63101859U true JPS63101859U (sv) | 1988-07-02 |
Family
ID=31168643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20337486U Pending JPS63101859U (sv) | 1986-12-23 | 1986-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63101859U (sv) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07299876A (ja) * | 1994-05-02 | 1995-11-14 | Takei Jushi Seisakusho:Kk | センサー容器及びその製造方法 |
-
1986
- 1986-12-23 JP JP20337486U patent/JPS63101859U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07299876A (ja) * | 1994-05-02 | 1995-11-14 | Takei Jushi Seisakusho:Kk | センサー容器及びその製造方法 |