JPS6299915A - Magnetic recording medium and its production - Google Patents

Magnetic recording medium and its production

Info

Publication number
JPS6299915A
JPS6299915A JP23719885A JP23719885A JPS6299915A JP S6299915 A JPS6299915 A JP S6299915A JP 23719885 A JP23719885 A JP 23719885A JP 23719885 A JP23719885 A JP 23719885A JP S6299915 A JPS6299915 A JP S6299915A
Authority
JP
Japan
Prior art keywords
film layer
layer
plasma
polymerized
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23719885A
Other languages
Japanese (ja)
Inventor
Minoru Ichijo
稔 一條
Fumio Komi
文夫 小海
Takashi Kubota
隆 久保田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Ltd
Original Assignee
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Maxell Ltd filed Critical Hitachi Maxell Ltd
Priority to JP23719885A priority Critical patent/JPS6299915A/en
Publication of JPS6299915A publication Critical patent/JPS6299915A/en
Pending legal-status Critical Current

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  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To improve running property and durability without spoiling the corrosion preventive effect of a thin ferromagnetic metallic film by a plasma- polymerized film layer by forming the thin plasma-polymerized film layer of an org. compd. on the thin ferromagnetic metallic film layer and forming a graft-polymerized layer to the thin plasma-polymerized film layer. CONSTITUTION:The thin ferromagnetic metallic film consisting of a prescribed metal or alloy is formed on a substrate 5 and the plasma-polymerized protective film layer 1 of the org. compd. is formed thereon; thereafter, the protective layer is exposed to a gaseous monomer of the vinyl deriv. expressed by the general formula CH2=CHX or the vinyli dene deriv. expressed by CH2=CXX', by which the graft-polymerized layer 4 consisting of the plasma-polymerized film layer as a backbone polymer is formed. The magnetic recording medium having excellent corrosion resistance, running property and durability is thus obtd.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は磁気記録媒体およびその製造方法はに係り、特
に高い耐食性を保持しながら摩擦係数を低減するように
した磁気記録媒体の構成及びこの構成を有する磁気記録
媒体の製造方法に関する。
[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to a magnetic recording medium and a method for manufacturing the same, and particularly to a structure of a magnetic recording medium that reduces the coefficient of friction while maintaining high corrosion resistance, and a method for manufacturing the same. The present invention relates to a method of manufacturing a magnetic recording medium having the above structure.

〈従来の技術〉 磁気記録媒体のうち強磁性金属薄膜層を磁気記録層とす
る磁気記録媒体は、通常、磁性金属やこれらの合金等を
、真空蒸着、スパッタリング等によって基体」二に被着
して形成され、高密度記録に適した特性を持つ。反面、
磁性金属が直接大気と接触するために腐食を生じ、これ
により磁性の劣化が生じる。また磁気ヘッドとの摩擦係
数が大きいため摩耗や貼りつきを生じ易いという問題が
ある。このため、最近、有機化合物のプラズマ重合保護
膜層を設ける技術が提案されている(特開昭57−82
229号、特開昭58−102330号)、このプラズ
マ重合保護膜層は、強磁性金属薄膜層上に薄く均一に形
成でき、また高度に架橋した稠密な構造を持つので、N
l性金属の防食という点では大きな効果を発揮する。
<Prior Art> Among magnetic recording media, magnetic recording media that have a ferromagnetic metal thin film layer as a magnetic recording layer are usually made by depositing magnetic metals or their alloys on a substrate by vacuum deposition, sputtering, etc. It has characteristics suitable for high-density recording. On the other hand,
Direct contact of magnetic metal with the atmosphere causes corrosion, which causes deterioration of magnetism. Furthermore, since the coefficient of friction with the magnetic head is large, there is a problem that wear and sticking are likely to occur. For this reason, a technique has recently been proposed to provide a plasma-polymerized protective film layer of an organic compound (Japanese Unexamined Patent Publication No. 57-82
229, JP-A No. 58-102330), this plasma polymerized protective film layer can be formed thinly and uniformly on the ferromagnetic metal thin film layer, and has a highly crosslinked dense structure, so it is possible to
It is highly effective in preventing corrosion of lactic metals.

〈本発明が解決しようとする問題点〉 しかしながら、以上の方法で得られる保護膜層のみでは
磁気ヘッドとの摩擦が依然と1.7で大きく、磁気記録
媒体の走行性、耐久性を大幅に改善することはできなか
った。
<Problems to be Solved by the Present Invention> However, with only the protective film layer obtained by the above method, the friction with the magnetic head is still large at 1.7, and the running performance and durability of the magnetic recording medium are significantly reduced. Couldn't improve it.

く問題点を解決するための手段〉 本発明は以上の問題点を解決すべく構成したものであり
、基体上に形成したプラズマ重合膜上に、更に摩擦係数
を低減させる保護層を形成した磁気記録媒体である。
Means for Solving the Problems> The present invention was constructed to solve the above problems, and includes a magnetic film in which a protective layer for further reducing the coefficient of friction is formed on a plasma polymerized film formed on a base. It is a recording medium.

以下具体的に説明する。This will be explained in detail below.

発明者等は、プラズマ重合膜による強磁性金属薄膜の腐
食保護効果を生かしながら、走行性、耐久性を改善する
ために、プラズマ重合膜上に、摩擦係数が小さく、この
ため良好な潤滑作用を有する第2の保護膜層を形成する
ことを試みた。この試みの結果、基体上に所定の金属或
いは合金からなる強磁性金属薄膜層を形成し、この上に
有機化合物のプラズマ重合保護膜層を形成した後に、真
空を破らずに、一般式GHz”CHXで表されるビニル
誘導体71:、たはCH□=cxx ′で表されるゲン
或いはメチル基、ビニル基、カルボキシル基等の官能基
を表す)のモノマーガスに晒すことによってプラズマ重
合膜層を幹ポリマーとしたグラフト重合層が形成され、
耐食性、走行性、耐久性に優れた磁気記録媒体を得られ
ること見出した。
In order to improve runnability and durability while taking advantage of the corrosion protection effect of the ferromagnetic metal thin film provided by the plasma polymerized film, the inventors created a coating on the plasma polymerized film that has a small coefficient of friction and therefore has a good lubrication effect. An attempt was made to form a second protective film layer having the following properties. As a result of this attempt, after forming a ferromagnetic metal thin film layer made of a predetermined metal or alloy on a substrate, and forming a plasma polymerized protective film layer of an organic compound on top of this, the general formula GHz was obtained without breaking the vacuum. The plasma-polymerized film layer is exposed to a monomer gas of a vinyl derivative 71 represented by CHX, or a gene represented by CH□=cxx', or a functional group such as a methyl group, a vinyl group, or a carboxyl group. A graft polymer layer with the backbone polymer is formed,
It has been found that a magnetic recording medium with excellent corrosion resistance, runnability, and durability can be obtained.

第1図はこのクラフト重合層の形成過程を示す。FIG. 1 shows the process of forming this kraft polymer layer.

同図において、プラズマ重合膜形成直後にはこのプラズ
マ重合膜1上には多数のラジカル2が存在する〔同図(
a)〕。この状態に於いて上記の千ツマ−3が接触する
と容易に二重結合、或いはエポキシ結合が開裂して、プ
ラズマ重合膜1上のラジカル2と結合し〔同図(b)]
 、その後連鎖的に重合反応が進行し〔同図(c)〕、
やがて重合体末端どうしが結合したり、モノマーから水
素原子を引き抜いたりしてラジカルが消滅して重合反応
が終了し、最終的にグラフト重合層4が形成される〔同
図(d)〕。このグラフト重合層は一方の端末が幹ポリ
マーであるプラズマ重合膜層上にしっかりと結合した直
鎖状高分子の構造を持つ。
In the figure, a large number of radicals 2 are present on the plasma polymerized film 1 immediately after the plasma polymerized film is formed [the same figure (
a)]. In this state, when the above-mentioned spring 3 comes into contact, the double bond or epoxy bond is easily cleaved and combines with the radical 2 on the plasma polymerized film 1 [Figure (b)].
, then the polymerization reaction proceeds in a chain manner [Figure (c)],
Eventually, the polymer ends bond together or hydrogen atoms are extracted from the monomer, the radicals disappear, and the polymerization reaction ends, finally forming the graft polymer layer 4 [FIG. 4(d)]. This graft-polymerized layer has a linear polymer structure with one end firmly bonded to the plasma-polymerized membrane layer, which is a backbone polymer.

このため、例えば金属表面にステアリン酸などの潤滑剤
を塗布した場合と同様の構造を有するために潤滑(滑走
)作用が生じるものと考えられる。
For this reason, it is thought that a lubricating (gliding) effect occurs because it has a structure similar to that when a lubricant such as stearic acid is applied to a metal surface.

以上の構成とするための具体的方法の一例を以下に示す
An example of a specific method for achieving the above configuration is shown below.

強磁性金属薄膜層に対するプラズマ重合層の形成は、処
理槽内で、有機化合物のモノマーガスを流しながら高周
波を印加し、生成した活性種を強磁性金属薄膜層上に被
着させ、プラズマ重合体を成長させることにより行う。
To form a plasma polymerized layer on a ferromagnetic metal thin film layer, a high frequency wave is applied while flowing an organic compound monomer gas in a processing tank, and the generated active species are deposited on the ferromagnetic metal thin film layer. This is done by growing.

この際使用する有機化合物は、プロパン、エチレン、プ
ロピレンなどの炭化水素に限らず、酸素や窒素や硫黄等
を含有するもの、テトラフルオロエチレン等のフッ素を
含有するもの、テトラメチルシランやオクタメチルシク
ロテトラシロキサン等の珪素を含有するもの、更にはテ
トラメチル錫等の金属元素を含むもの等のうち、常温で
気体、あるいは液体で充分な蒸気圧を有する有機化合物
が、いずれも好適に使用される。実際にプラズマ重合保
護膜層を形成する際は、これらの有機化合物の一種、或
いは数種を混合して真空槽に導入する。また、形成速度
を速めたり、異種元素を導入する目的で、)l eやA
「などの希ガス、酸素ガス、窒素ガス、フッ素ガス等を
上記の有機化合物と混合して真空槽に導入することもあ
る。
The organic compounds used at this time are not limited to hydrocarbons such as propane, ethylene, and propylene, but also those containing oxygen, nitrogen, sulfur, etc., those containing fluorine such as tetrafluoroethylene, and tetramethylsilane and octamethylcyclo. Among those containing silicon such as tetrasiloxane and those containing metal elements such as tetramethyltin, organic compounds that have sufficient vapor pressure as a gas or liquid at room temperature are preferably used. . When actually forming a plasma polymerized protective film layer, one or more of these organic compounds are mixed and introduced into a vacuum chamber. In addition, for the purpose of accelerating the formation rate or introducing different elements,
In some cases, rare gases such as oxygen gas, nitrogen gas, fluorine gas, etc. are mixed with the above organic compounds and introduced into the vacuum chamber.

以上の様にして形成したプラズマ重合膜層−ヒー・のグ
ラフト重合体の成長は、プラズマ重合直後に、真空を破
らずにグラフト重合が可能なモノマーガスの雰囲気に対
しプラズマ重合膜層表面を晒すことにより行う。この際
使用する千ツマ−としては、エチレン、ブタジェン、塩
化ビニル、アクリル酸、酢酸ビニル、アクリロニトリル
等のビニル誘導体、塩化ビニリデン、メタクリル酸、メ
タクリル酸メチルなどのビニリデン誘導体、さらにはエ
チレンオキシド、プロピレンオキシド等のエポキシ化合
物が好適に使用される。プラズマ重合層を晒すときのこ
れら千ツマーガスの圧力は0.1Torr以上が適当で
あり、これ以下であると反応が速やかに行われず、実用
的でない。またグラフト重合反応中も、モノマーガス圧
を一定に保つためにモノマーガスを供給する必要がある
The graft polymer of the plasma-polymerized film layer formed as described above is grown by exposing the surface of the plasma-polymerized film layer to an atmosphere of monomer gas that allows graft polymerization without breaking the vacuum immediately after plasma polymerization. To do this. Examples of chemicals used in this case include ethylene, butadiene, vinyl chloride, acrylic acid, vinyl acetate, vinyl derivatives such as acrylonitrile, vinylidene chloride, methacrylic acid, vinylidene derivatives such as methyl methacrylate, and ethylene oxide, propylene oxide, etc. The following epoxy compounds are preferably used. The pressure of these 1,000-ton gas when exposing the plasma-polymerized layer is suitably 0.1 Torr or more; if it is less than this, the reaction will not occur quickly and it is not practical. Also, during the graft polymerization reaction, it is necessary to supply monomer gas to keep the monomer gas pressure constant.

強磁性金属薄膜の形成材料としては、C0% Fe、N
i、Co−Ni合金、Go−Cr合金、Co−P合金、
Co−N1−P合金等の強磁性材が使用され、これらの
強磁性材からなる強磁性金属薄膜層は、真空蒸着、イオ
ンブレーティング、スパッタリング、メッキ等の手段に
よって基体上に被着形成される。
Materials for forming the ferromagnetic metal thin film include C0% Fe, N
i, Co-Ni alloy, Go-Cr alloy, Co-P alloy,
A ferromagnetic material such as a Co-N1-P alloy is used, and a ferromagnetic metal thin film layer made of these ferromagnetic materials is deposited on a substrate by means such as vacuum evaporation, ion blasting, sputtering, or plating. Ru.

また、磁気記録媒体としてはポリエステルフィルム、ポ
リイミドフィルム等の合成樹脂フィルムを基体とする磁
気テープ、合成樹脂フィルム、アルミニウム板およびガ
ラス板等からなる円板やドラムを基体とする磁気ディス
クや磁気ドラム等、磁気ヘッドと摺接する構造の種々の
形態を包含する。
In addition, magnetic recording media include magnetic tapes based on synthetic resin films such as polyester films and polyimide films, magnetic disks and magnetic drums based on disks and drums made of synthetic resin films, aluminum plates, glass plates, etc. , including various forms of structures that come into sliding contact with the magnetic head.

次にこの発明の実施例について説明する。Next, embodiments of this invention will be described.

〈実施例1〉 先ず、厚さ10AtI11のポリエチレンテレフタレー
トフィルムを真空蒸着装置に対して装填し、lX 10
’ Torrの圧力下で、コバルトを加熱蒸発させてこ
のポリエチレンテレフタレートフィルムに対し、厚さ1
000人のコバルトからなる強磁性金属′R膜層を形成
した。次いで、第2図に示す処理装置を使用して次のよ
うな処理を行った。
<Example 1> First, a polyethylene terephthalate film with a thickness of 10AtI11 was loaded into a vacuum evaporation apparatus, and
' Cobalt is heated and evaporated under a pressure of Torr to form a polyethylene terephthalate film with a thickness of 1
A ferromagnetic metal R film layer made of 0,000 cobalt was formed. Next, the following processing was performed using the processing apparatus shown in FIG.

強磁性金属薄膜層を形成したポリエチレンテレフタレー
トフィルム5をフィルム送り室6に配置した原反ロール
7から繰り出し、円筒状のキャンロール8に沿って移動
させ、グラフト重合室9を経て巻き取りロール10に巻
き取るようセットした。次いで、フィルム5を’l m
+/1llinの速度で図中矢印方向に走行させながら
、プラズマ重合室11に取りつけたガス導入管12から
テトラメチルシランのモノマーガスを30scemの流
量を以て導入し、ガス圧を0゜03 Torrとして電
極13を用いて13.56 MHzの高周波を0.5W
/ calの電力密度で印加してプラズマ重合を行い、
プラズマ重合膜層を形成した。この時プラズマ重合膜の
膜厚は120人だった。更に同時にグラフト重合室9に
取り付けたガス導入管14から塩化ビニルの七ツマーガ
スを1000scemの流量で導入し、ガス圧を100
Torrとして、プラズマ重合層の上にポリ塩化ビニル
のグラフト重合層を形成した。フィルム5がグラフト重
合室9を通過する時間は10分で、グラフト重合層の1
模厚は130人だった。その後所定の幅に裁断して第3
図に示す様な磁気テープを製作した。なお第2図中の符
号15.16.17は・それぞれフィルム送り室6、プ
ラズマ重合室11、グラフト重合室9を減圧するための
排気孔であり、18は電極13に高周波を印加するため
の高周波電源であり、19.20はフィルム送り室6と
グラフト重合室9の間の真空シール部である。また第3
図中の符号21は強磁性金属fiiJ膜層、1はプラズ
マ重合層、22はグラフト重合層である。
A polyethylene terephthalate film 5 with a ferromagnetic metal thin film layer formed thereon is unwound from a raw roll 7 placed in a film feed chamber 6, moved along a cylindrical can roll 8, passed through a graft polymerization chamber 9, and transferred to a take-up roll 10. I set it to wind up. Then film 5 is
While traveling in the direction of the arrow in the diagram at a speed of 13 using a high frequency of 13.56 MHz at 0.5W
Plasma polymerization is performed by applying a power density of / cal.
A plasma polymerized film layer was formed. At this time, the thickness of the plasma polymerized film was 120 people. Furthermore, at the same time, vinyl chloride 7-mer gas was introduced from the gas introduction pipe 14 attached to the graft polymerization chamber 9 at a flow rate of 1000 scem, and the gas pressure was increased to 100 scem.
As Torr, a graft polymerized layer of polyvinyl chloride was formed on the plasma polymerized layer. The time it takes for the film 5 to pass through the graft polymerization chamber 9 is 10 minutes, and one of the graft polymerization layers
Moatoshi had 130 people. Then cut it to the specified width and make a third
A magnetic tape as shown in the figure was manufactured. Reference numerals 15, 16, and 17 in FIG. It is a high frequency power source, and 19.20 is a vacuum seal part between the film feeding chamber 6 and the graft polymerization chamber 9. Also the third
In the figure, reference numeral 21 is a ferromagnetic metal fiiJ film layer, 1 is a plasma polymerization layer, and 22 is a graft polymerization layer.

〈実施例2〉 実施例1におけるグラフト重合層形成の際、塩化ビニル
のモノマーに代えてエチレンオキシドモノマーガスを1
000secmの流量で導入し、ガス圧を2Q Tor
rとした他は、実施例1と同様の条件で磁気テープを製
作した。この際のグラフト重合層の厚さは90人だった
<Example 2> When forming the graft polymerization layer in Example 1, ethylene oxide monomer gas was used instead of vinyl chloride monomer.
Introduced at a flow rate of 000 sec, and the gas pressure was set to 2Q Tor.
A magnetic tape was manufactured under the same conditions as in Example 1, except that r was used. The thickness of the graft polymer layer at this time was 90 layers.

〈実施例3〉 実施例1におけるグラフト重合層形成の際、塩化ビニル
の千ツマ−に代えてブタジェンの七ツマーガスを導入し
た他は実施例1と同様の条件で磁気テープを製作した。
<Example 3> A magnetic tape was manufactured under the same conditions as in Example 1, except that when forming the graft polymerization layer in Example 1, a butadiene gas was introduced instead of a vinyl chloride gas.

この際のグラフト重合層の厚さは100人だった。The thickness of the graft polymer layer at this time was 100 layers.

〈実施例4〉 実施例1におけるプラズマ重合層形成の際、テトラメチ
ルシランのモノマーガスに代えて、プロパンのモノマー
ガスを100secmの流量で導入し、ガス圧を0.0
7 Torrとし、印加する高周波の電力密度を0.7
 W/−にした他は実施例1と同様の条件で磁気テープ
を製作した。この際のプラズマ重合層の厚さは140人
だった。
<Example 4> During the plasma polymerization layer formation in Example 1, propane monomer gas was introduced at a flow rate of 100 sec instead of tetramethylsilane monomer gas, and the gas pressure was set to 0.0.
7 Torr, and the power density of the applied high frequency is 0.7
A magnetic tape was manufactured under the same conditions as in Example 1 except that the magnetic tape was changed to W/-. The thickness of the plasma polymerized layer at this time was 140.

く比較例1〉 実施例1において、ポリ塩化ビニルのグラフト重合層を
省いた以外は実施例1と同様の条件で磁気テープを製作
した。
Comparative Example 1 A magnetic tape was manufactured under the same conditions as in Example 1 except that the polyvinyl chloride graft polymer layer was omitted.

く比較例2〉 実施例4において、ポリ塩化ビニルのグラフト重合層を
省いた以外は実施例4と同様の条件で磁気テープを製作
した。
Comparative Example 2 A magnetic tape was manufactured under the same conditions as in Example 4 except that the polyvinyl chloride graft polymer layer was omitted.

〈比較例3〉 実施例1と同様に蒸着した強磁性金属薄膜層上に保護膜
を一切付けずに磁気テープを製作した。
<Comparative Example 3> A magnetic tape was manufactured in the same manner as in Example 1 without attaching any protective film on the ferromagnetic metal thin film layer.

以上各実施例及び比較例で得られた磁気テープについて
耐食性、走行性、耐久性についてそれぞれ調査した。こ
の結果を以下の表に示す。
Corrosion resistance, runnability, and durability of the magnetic tapes obtained in each of the Examples and Comparative Examples above were investigated. The results are shown in the table below.

なお耐食性は60″と90%RHの雰囲気に1週間放置
した時の飽和磁化の劣化率により評価した。また走行性
はステンレスピンとの摩擦係数を測定して評価した。さ
らに耐久性はスチル試験を行って、出力が6db低下す
る状態となるまでの時間により評価した。
Corrosion resistance was evaluated by the deterioration rate of saturation magnetization when left in an atmosphere of 60" and 90% RH for one week. Running performance was evaluated by measuring the coefficient of friction with a stainless steel pin. Furthermore, durability was evaluated by a still test. The evaluation was made based on the time it took for the output to drop by 6 db.

以上の結果から明らかな様に本発明で得られた磁気テー
プ(実施例1〜4)ついては、飽和磁化の劣化率は、プ
ラズマ重合膜のみを保護膜層とした比較例1.2の磁気
テープと同水準にあり、保護膜なしの比較例3の磁気テ
ープと比較して小さく、また摩擦係数、耐スチル時間は
共に比較例1〜3に比べて著しく良好な値を示した。
As is clear from the above results, for the magnetic tapes obtained by the present invention (Examples 1 to 4), the deterioration rate of saturation magnetization was lower than that of the magnetic tapes of Comparative Example 1.2 in which only the plasma polymerized film was used as a protective film layer. It was at the same level as the magnetic tape of Comparative Example 3 without a protective film, and was smaller than that of the magnetic tape of Comparative Example 3 without a protective film, and both the friction coefficient and anti-still time showed significantly better values than Comparative Examples 1 to 3.

以上の点から、プラズマ重合膜形成後に真空を破らずに
グラフト重合が可能なモノマーに晒すことにより、プラ
ズマ重合層上に第2の保護層としてグラフト重合層が形
成され、プラズマ重合膜層による強磁性金属薄膜の防食
効果を損なうことなく、走行性、耐久性を格段に向上さ
せた磁気記録媒を得ることが可能であることを確認した
From the above points, by exposing the plasma-polymerized film to a monomer that can be graft-polymerized without breaking the vacuum after forming the plasma-polymerized film, a graft-polymerized layer is formed as a second protective layer on the plasma-polymerized layer, and the plasma-polymerized film layer becomes stronger. It was confirmed that it is possible to obtain a magnetic recording medium with significantly improved runnability and durability without impairing the anticorrosion effect of the magnetic metal thin film.

〈効果〉 本発明は以上に示したように、プラズマ重合膜層による
強磁性金属薄膜の防食効果を損なうことなく、走行性、
耐久性を格段に向上させた磁気記録媒を得ることができ
る。
<Effects> As shown above, the present invention improves runnability, without impairing the anticorrosion effect of the ferromagnetic metal thin film by the plasma polymerized film layer.
A magnetic recording medium with significantly improved durability can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(a)ないしくd)はグラフト重合層の形成過程
を示す模式的図、第2図はプラズマ重合膜層およびグラ
フト重合層を形成する際に使用される処理装置の配置例
を示す装置断面の概略図、第3図は本発明にかかる磁気
テープの拡大部分図である。 1・・・プラズマ重合層 4・・・グラフト重合層 21・・・強磁性金属薄膜層 第1図 第2図 第3図
Figures 1 (a) to d) are schematic diagrams showing the process of forming a graft polymerization layer, and Figure 2 shows an example of the arrangement of processing equipment used when forming a plasma polymerization film layer and a graft polymerization layer. A schematic cross-sectional view of the device, and FIG. 3 is an enlarged partial view of the magnetic tape according to the present invention. 1... Plasma polymerization layer 4... Graft polymerization layer 21... Ferromagnetic metal thin film layer Fig. 1 Fig. 2 Fig. 3

Claims (2)

【特許請求の範囲】[Claims] (1)基体上に強磁性金属薄膜層を形成し、この強磁性
金属薄膜層に有機化合物のプラズマ重合薄膜層を形成し
、更にこのプラズマ重合薄膜層にグラフト重合層を形成
することにより、4層構造としたことを特徴とする磁気
記録媒体。
(1) By forming a ferromagnetic metal thin film layer on a substrate, forming a plasma polymerized thin film layer of an organic compound on this ferromagnetic metal thin film layer, and further forming a graft polymerization layer on this plasma polymerized thin film layer, A magnetic recording medium characterized by having a layered structure.
(2)前記グラフト重合層の形成を、有機化合物のプラ
ズマ重合薄膜層を形成した後に、真空を破らずに、一般
式CH_2=CHXで表されるビニル誘導体、またはC
H_2=CXX’で表されるビニリデン誘導体、または
▲数式、化学式、表等があります▼で表される エポキシ化合物(但し、XX’は水素、ハロゲン或いは
メチル基、ビニル基、カルボキシル基等の官能基を表す
)のモノマーガスに晒すことにより行うことを特徴とす
る磁気記録媒体の製造方法。
(2) After forming the plasma polymerized thin film layer of the organic compound, the graft polymerization layer is formed using a vinyl derivative represented by the general formula CH_2=CHX, or C
Vinylidene derivatives represented by H_2=CXX', or epoxy compounds represented by ▲There are mathematical formulas, chemical formulas, tables, etc. (However, XX' is hydrogen, halogen, or a functional group such as a methyl group, vinyl group, or carboxyl group. A method for producing a magnetic recording medium, characterized in that the method is carried out by exposing it to a monomer gas of
JP23719885A 1985-10-25 1985-10-25 Magnetic recording medium and its production Pending JPS6299915A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23719885A JPS6299915A (en) 1985-10-25 1985-10-25 Magnetic recording medium and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23719885A JPS6299915A (en) 1985-10-25 1985-10-25 Magnetic recording medium and its production

Publications (1)

Publication Number Publication Date
JPS6299915A true JPS6299915A (en) 1987-05-09

Family

ID=17011823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23719885A Pending JPS6299915A (en) 1985-10-25 1985-10-25 Magnetic recording medium and its production

Country Status (1)

Country Link
JP (1) JPS6299915A (en)

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