JPS6298320A - Phased array semiconductor laser optical system - Google Patents

Phased array semiconductor laser optical system

Info

Publication number
JPS6298320A
JPS6298320A JP60237280A JP23728085A JPS6298320A JP S6298320 A JPS6298320 A JP S6298320A JP 60237280 A JP60237280 A JP 60237280A JP 23728085 A JP23728085 A JP 23728085A JP S6298320 A JPS6298320 A JP S6298320A
Authority
JP
Japan
Prior art keywords
splitter
optical system
array semiconductor
semiconductor laser
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60237280A
Other languages
Japanese (ja)
Inventor
Kimio Tateno
立野 公男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60237280A priority Critical patent/JPS6298320A/en
Priority to GB8625309A priority patent/GB2182168B/en
Priority to US06/922,673 priority patent/US4791650A/en
Priority to DE19863636336 priority patent/DE3636336A1/en
Publication of JPS6298320A publication Critical patent/JPS6298320A/en
Pending legal-status Critical Current

Links

Landscapes

  • Optical Head (AREA)

Abstract

PURPOSE:To obtain the spot of a diffraction limit on a recording medium by converging a beam from a phase-locked array semiconductor laser and forming a single lobe through an optical system composed of a wavelength plate and a polarization beam splitter in combination. CONSTITUTION:The beam emitted by the phase-locked array semiconductor is collimated by a coupling lens 2. The far field pattern of the beam from the laser 1 is separated into two lobes 3 and 3'. One beam 3 is reflected by a total reflecting mirror 4 to reach a splitter 5. At this time, the planes of polarization of the beams 3 and 3' both correspond to P polarization to the mirror 4 and splitter 5. The beam 3 is therefore, transmitted through the splitter 5. The beam 3', on the other hand, is transmitted through the half-wavelength plate 6 to become an S- polarized beam 7, which is reflected by the splitter 5 to have the same optical axis with the transmitted beam 3 in common, so that they are put together into one composite beam. The composite beam 10 obtained through the prism 9 is guided to a stop-down lens 11 and image-formed in a spot on the recording medium 13.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、フェーズドアレー半導体レーザのビームを集
光し、かつ媒体上に絞り込むのみ好適な光学系に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an optical system suitable only for condensing a beam of a phased array semiconductor laser and focusing it onto a medium.

〔発明の背景〕[Background of the invention]

フェーズドアレー半導体レーザは、第1図のようにおよ
ぞ10ケの半導体レーザをモノリシックに一列に並べ、
隣接距離を短かくすることにより、フェーズをカップル
させ、全部が互いにコヒーレントに発振させようとする
ものである。ところが、例えば10ケの発光点よりなる
場合、10種の発振モードがある。これらのモードのう
ち、最も立ちやすいのは第2図に示すような18o°ア
ウトオブフエーズ(out of please )す
なわち、ファーフィールド(F or Field)で
は二つのピークを有するダブルローブのモード(第3図
)であることはよく知られている。このようなダブルロ
ーブのレーザ光を記録媒体上に絞り込んだ場合レーザの
波長と光学系のNA(開口数)で決まる回折限界のスポ
ットを得ることはできず、高い解像度をもつ光学系は実
現できない 〔発明の目的〕 本発明の目的は上述の欠点を克服し、フェーズドアレー
半導体レーザを用いても記録媒体上に回折限界のスポッ
トを得ることができる光学系を提供することにある。
A phased array semiconductor laser is made by arranging approximately 10 semiconductor lasers monolithically in a line as shown in Figure 1.
By shortening the adjacent distance, the phases are coupled and all are attempted to oscillate coherently with each other. However, in the case of, for example, 10 light emitting points, there are 10 types of oscillation modes. Among these modes, the one that is most likely to occur is the 18o degree out of phase (out of please) as shown in Figure 2, that is, the double lobe mode with two peaks in the far field (F or Field). 3) is well known. If such double-lobed laser light is focused onto a recording medium, it will not be possible to obtain a diffraction-limited spot determined by the wavelength of the laser and the NA (numerical aperture) of the optical system, and an optical system with high resolution will not be possible. [Object of the Invention] An object of the present invention is to overcome the above-mentioned drawbacks and to provide an optical system capable of obtaining a diffraction-limited spot on a recording medium even when using a phased array semiconductor laser.

〔発明の概要〕[Summary of the invention]

すなわち、本発明は、アウトオブフェーズ(outof
 phase)で発振しているフェーズロックアレー半
導体レーザからのビームを集光し、波音板と、偏光ビー
ムスプリッタ−とを組合せた光学系により、ファーフィ
ールド(F or Fjeld)で昨−ローブとなるよ
うにし、最終的に回折限界の絞り込みスポットを得んと
するものである。
That is, the present invention provides out-of-phase
The beam from the phase-locked array semiconductor laser oscillating in the phase is focused, and an optical system that combines a wave plate and a polarizing beam splitter is used to focus the beam into a beam in the far field (F or Fjeld). The aim is to finally obtain a narrowed-down spot with a diffraction limit.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を第4図により説明する。フェ
ーズロックアレー半導体レーザ1から発散するビームを
カップリングレンズ3で受は集光して平行化する。先述
のように、フェーズロックアレー半導体レーザ1からの
ビームのファーフィールドパタンは3および3′の二つ
のローブに分かれている。これらのうち一方のビーム3
は全反射ミラー4で反射され偏光ビームスプリッタ−5
にいたる。この時、ビーム3および3′の偏光面は、い
ずれも紙面内すなわち反射ミラー4、偏光ビームスプリ
ッタ5に対しP偏光となっている。
An embodiment of the present invention will be described below with reference to FIG. A beam diverging from a phase-locked array semiconductor laser 1 is received by a coupling lens 3 and is collimated. As mentioned above, the far field pattern of the beam from the phase-locked array semiconductor laser 1 is divided into two lobes, 3 and 3'. One of these beams 3
is reflected by total reflection mirror 4 and polarized beam splitter 5
It comes to. At this time, the polarization planes of the beams 3 and 3' are both P-polarized within the plane of the drawing, that is, with respect to the reflecting mirror 4 and the polarizing beam splitter 5.

従って、ビーム3は、偏光ビームスプリッタ−5を透過
することになる6一方、ビーム3′は、172波長板6
を透過してS偏光ビーム7となり、偏光ビームスプリン
ター5で反射されて、ビーム3による透過ビームと光軸
を共有し、一つの合成されたビームとなる。本実施例で
は、反射ミラー4、波長板6及び偏光ビームスプリッタ
−5は密着されて一体化されている。
Therefore, beam 3 will pass through the polarizing beam splitter 56, while beam 3' will pass through the 172 wave plate 6.
The beam passes through and becomes an S-polarized beam 7, which is reflected by the polarized beam splinter 5, shares the optical axis with the beam transmitted by the beam 3, and becomes one combined beam. In this embodiment, the reflecting mirror 4, the wavelength plate 6, and the polarizing beam splitter 5 are integrated in close contact with each other.

プリズム9は、偏光ビームスプリンター5からのビーム
が楕円形状をしているため、これを円形に整形するため
のものである。図では1ケであるが、2コ以上のプリズ
ムの組合せでもかまわない。
Since the beam from the polarized beam splinter 5 has an elliptical shape, the prism 9 is used to shape the beam into a circular shape. In the figure, there is only one prism, but a combination of two or more prisms may be used.

このようにして得られた、合成ビーム10を絞り込みレ
ンズ11にいたたらしめ、例えば光ディスク、あるいは
レーザプリンタ用感光ドラム、あるいは、液晶などの記
録媒体1;3上にスポットとして結像する。
The combined beam 10 thus obtained is directed to a focusing lens 11 and is imaged as a spot on a recording medium 1; 3 such as an optical disk, a photosensitive drum for a laser printer, or a liquid crystal.

第5図は本発明の第2の実施例を示すものである。ビー
ムの合成の方法は第一の実施例と全く同じであるが、楕
円形状をしたビームの整形方法として、シリンダレンズ
14.15の組を用いるところが異なる。楕円形状ビー
ムの長短軸の比をrとした時、シリンダレンズ14.1
5の焦点距離の比をrとするものである。ここで注意を
必要とするのは、一般にゲインガイド型のフェーズロッ
クアレー半導体レーザでは、位相のずれの他に、位相の
曲りも同時に生じている。これは非点収差と呼ばれてい
るものであるが、水弟2の実施例によれば、二つのシリ
ンダレンズの相対位置を、光源の非点隔差を相殺する分
だけずらして設定すれ。
FIG. 5 shows a second embodiment of the invention. The method of combining the beams is exactly the same as in the first embodiment, except that a set of cylinder lenses 14 and 15 is used to shape the elliptical beam. When the ratio of the long and short axes of the elliptical beam is r, the cylinder lens 14.1
Let r be the ratio of the focal lengths of 5 and 5. What needs to be noted here is that in general, gain-guided phase-locked array semiconductor lasers experience not only phase shift but also phase curvature. This is called astigmatism, but according to the embodiment of Suihiro 2, the relative positions of the two cylinder lenses are set to be shifted by an amount that cancels out the astigmatism difference of the light source.

ば、同時に該非点収差の補正も行える。For example, the astigmatism can be corrected at the same time.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、位相が180’ずれたモードで発振し
ているフェーズアレー半導体レーザをファーフィールド
で合成して単一ビームとし、絞り込みレンズにいたらし
めるため、常に半導体レーザ波長、および絞り込みレン
ズのNAで決る回折限界のスポットが得られることにな
る。さらに、互いに位相が180°ずれたビーム3およ
び3′は合成された後で互いに偏光面が垂直となるので
、干渉効果は生じず、強度のスカラー和として合成され
ることは本発明のもう一つの効果である。
According to the present invention, phase array semiconductor lasers oscillating in a mode with a phase shift of 180' are synthesized in the far field into a single beam, which is then used as a diaphragm lens. A diffraction-limited spot determined by NA will be obtained. Furthermore, another aspect of the present invention is that the beams 3 and 3', which are out of phase with each other by 180°, have their polarization planes perpendicular to each other after being combined, so that no interference effect occurs and they are combined as a scalar sum of intensities. This is one effect.

以上述べた本発明を、光デイスク記録光学系、レーザビ
ームプリンタ、画像スキャナー、あるいは液晶ディスプ
レー用光学系などに適用すれば、より高速でかつ高解像
度の光学系を実現できることになる。
If the present invention described above is applied to an optical disk recording optical system, a laser beam printer, an image scanner, an optical system for a liquid crystal display, etc., a faster and higher resolution optical system can be realized.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はフェーズロックアレー半導体レーザの概念図、
第2図はその発振モードを示す図、第3図はフェーズロ
ックアレー半導体レーザのファーフィールドバタンを示
す図、第4図は本発明による光学系の第1の実施例の平
面図、第5図は本発明の第2の実施例の平面図である。 1・・・フェーズロックアレー半導体レーザ、2・・・
結合レンズ、3・・・ビーム、3′・・・ビーム、4・
・・全反射ミラー、5・・・偏光ビームスプリッタ、6
・・・1/2波長板、7・・・S偏光ビーム、8・・・
合成ビーム、9・・・プリズム、10・・・整形ビーム
、11・・・絞り込みレンズ、12・・・スポット、1
3・・・記録媒体(光ディスク)、14・・・シリンダ
レンズ、15・・・シリンダレンズ、16・・・記録媒
体(感光ドラム)。 多1囚 茅2凪 嬰3囚 壕40 茅50
Figure 1 is a conceptual diagram of a phase-locked array semiconductor laser.
FIG. 2 is a diagram showing the oscillation mode, FIG. 3 is a diagram showing the far field baton of the phase-locked array semiconductor laser, FIG. 4 is a plan view of the first embodiment of the optical system according to the present invention, and FIG. 5 is a diagram showing the oscillation mode. FIG. 2 is a plan view of a second embodiment of the present invention. 1... Phase-locked array semiconductor laser, 2...
Coupling lens, 3...beam, 3'...beam, 4.
... Total reflection mirror, 5 ... Polarizing beam splitter, 6
...1/2 wavelength plate, 7...S polarized beam, 8...
Combined beam, 9... Prism, 10... Shaped beam, 11... Stopping lens, 12... Spot, 1
3... Recording medium (optical disk), 14... Cylinder lens, 15... Cylinder lens, 16... Recording medium (photosensitive drum). 1 prisoner, 2 Nagiyang, 3 prisoners, 40 grass, 50 grass.

Claims (1)

【特許請求の範囲】[Claims] フエーズドアレー型半導体レーザと、該レーザからの互
いに位相が異なる光束を受ける集光レンズと、該集光レ
ンズによつて集光された光束を媒体上に絞り込む結像レ
ンズとからなる光学系において、該光学系の光路中に、
反射ミラー、液長板、偏光ビームスプリッタを配置し、
上記互いに位相が異なる光束を1つの光束に合成するこ
とを特徴とするフエーズドアレー半導体レーザ光学系。
An optical system consisting of a phased array semiconductor laser, a condenser lens that receives light beams of different phases from the laser, and an imaging lens that narrows the light beam condensed by the condenser lens onto a medium. In the optical path of the optical system,
A reflective mirror, liquid length plate, and polarizing beam splitter are arranged.
A phased array semiconductor laser optical system characterized in that the light beams having different phases are combined into one light beam.
JP60237280A 1985-10-25 1985-10-25 Phased array semiconductor laser optical system Pending JPS6298320A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP60237280A JPS6298320A (en) 1985-10-25 1985-10-25 Phased array semiconductor laser optical system
GB8625309A GB2182168B (en) 1985-10-25 1986-10-22 Phased-array semiconductor laser apparatus
US06/922,673 US4791650A (en) 1985-10-25 1986-10-24 Phased-array semiconductor laser apparatus
DE19863636336 DE3636336A1 (en) 1985-10-25 1986-10-24 SEMICONDUCTOR LASER DEVICE WITH PHASE CONTROLLED ARRANGEMENT

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60237280A JPS6298320A (en) 1985-10-25 1985-10-25 Phased array semiconductor laser optical system

Publications (1)

Publication Number Publication Date
JPS6298320A true JPS6298320A (en) 1987-05-07

Family

ID=17013049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60237280A Pending JPS6298320A (en) 1985-10-25 1985-10-25 Phased array semiconductor laser optical system

Country Status (1)

Country Link
JP (1) JPS6298320A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01287527A (en) * 1988-01-29 1989-11-20 Konica Corp Laser beam image formation system and radiographic device using same
US4971412A (en) * 1988-05-31 1990-11-20 Fuji Photo Film Co., Ltd. Laser optical system having a phase correction for controlling intensity distribution
US5185290A (en) * 1989-08-17 1993-02-09 Mitsubishi Denki Kabushiki Kaisha Method of coating facet of semiconductor optical element
US5581403A (en) * 1992-10-01 1996-12-03 Olympus Optical Co., Ltd. Beam shaping and beam splitting device and optical head comprising the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01287527A (en) * 1988-01-29 1989-11-20 Konica Corp Laser beam image formation system and radiographic device using same
US4971412A (en) * 1988-05-31 1990-11-20 Fuji Photo Film Co., Ltd. Laser optical system having a phase correction for controlling intensity distribution
US5185290A (en) * 1989-08-17 1993-02-09 Mitsubishi Denki Kabushiki Kaisha Method of coating facet of semiconductor optical element
US5581403A (en) * 1992-10-01 1996-12-03 Olympus Optical Co., Ltd. Beam shaping and beam splitting device and optical head comprising the same

Similar Documents

Publication Publication Date Title
US5220454A (en) Cata-dioptric reduction projection optical system
US7391521B2 (en) Position detection apparatus and method
US4791650A (en) Phased-array semiconductor laser apparatus
JPH05257085A (en) Lighting optical system
JP3380820B2 (en) Optical scanning system
JP3990472B2 (en) Beam diameter control method and apparatus
US4878747A (en) Aperture image beam splitter
KR100219605B1 (en) An optical pickup device
JPH1139705A (en) Optical pickup device
JPS6298320A (en) Phased array semiconductor laser optical system
JPH07294739A (en) Polarized light separating element
JPS63767B2 (en)
JP2000147382A (en) Polarization optical correction objective lens
JP4350203B2 (en) Optical device for optical communication
JPS60149985A (en) Optical distance measuring apparatus
JPH06235865A (en) Confocal microscope
JPH06333289A (en) Optical head
USRE36740E (en) Cata-dioptric reduction projection optical system
JP2003149576A (en) Optical scanning unit and image forming device equipped therewith
JPH06215413A (en) Optical pickup device
JP2888624B2 (en) Polarized illumination device and projection display device having the polarized illumination device
JPH10135571A (en) Optical condensing system of semiconductor laser
JP3166783B2 (en) Light head
JPH0695106A (en) Projection display device
SU1469520A1 (en) Device for adjusting optical channel of laser record-player