JPS6297981U - - Google Patents
Info
- Publication number
- JPS6297981U JPS6297981U JP19161385U JP19161385U JPS6297981U JP S6297981 U JPS6297981 U JP S6297981U JP 19161385 U JP19161385 U JP 19161385U JP 19161385 U JP19161385 U JP 19161385U JP S6297981 U JPS6297981 U JP S6297981U
- Authority
- JP
- Japan
- Prior art keywords
- particle beam
- beam line
- monitoring device
- disposed
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 4
- 238000012806 monitoring device Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
Description
第１図は本考案の装置の一実施例の説明図、第
２図は第１図に示した−の磁気閉回路による粒子
ビームのモニタリング状態を示す説明図である。
１は荷電粒子ビームライン、２，３は磁気閉回
路、４，７は鉄芯枠、５，８はコイル、６，９は
電流計を示す。
FIG. 1 is an explanatory diagram of one embodiment of the apparatus of the present invention, and FIG. 2 is an explanatory diagram showing the monitoring state of a particle beam by the magnetic closed circuit shown in FIG. 1. 1 is a charged particle beam line, 2 and 3 are magnetic closed circuits, 4 and 7 are iron core frames, 5 and 8 are coils, and 6 and 9 are ammeters.
Claims (1)
交する平面内を互いに直向する方向に別個に移動
し得るよう２つの磁器閉回路を夫々配設してなる
ことを特徴とする粒子ビームモニタリング装置。 A particle beam monitoring device characterized in that two closed magnetic circuits are disposed on a charged particle beam line so as to be able to move independently in directions perpendicular to each other within a plane orthogonal to the beam line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19161385U JPS6297981U (en) | 1985-12-11 | 1985-12-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19161385U JPS6297981U (en) | 1985-12-11 | 1985-12-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6297981U true JPS6297981U (en) | 1987-06-22 |
Family
ID=31145914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19161385U Pending JPS6297981U (en) | 1985-12-11 | 1985-12-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6297981U (en) |
-
1985
- 1985-12-11 JP JP19161385U patent/JPS6297981U/ja active Pending
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