JPS6297948U - - Google Patents

Info

Publication number

JPS6297948U

JPS6297948U JP18956985U JP18956985U JPS6297948U JP S6297948 U JPS6297948 U JP S6297948U JP 18956985 U JP18956985 U JP 18956985U JP 18956985 U JP18956985 U JP 18956985U JP S6297948 U JPS6297948 U JP S6297948U

Authority

JP

Japan

Prior art keywords

inductively coupled

coupled plasma

gas consumption

reduced gas

plasma analyzer

Prior art date

1985-12-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000009616 inductively coupled plasma Methods 0.000 claims description 4
• 238000010586 diagram Methods 0.000 description 3
• 239000006199 nebulizer Substances 0.000 description 2
• 230000003321 amplification Effects 0.000 description 1
• 239000000446 fuel Substances 0.000 description 1
• 230000006698 induction Effects 0.000 description 1
• 238000003199 nucleic acid amplification method Methods 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 230000003595 spectral effect Effects 0.000 description 1