JPS6296850U - - Google Patents

Info

Publication number
JPS6296850U
JPS6296850U JP18921985U JP18921985U JPS6296850U JP S6296850 U JPS6296850 U JP S6296850U JP 18921985 U JP18921985 U JP 18921985U JP 18921985 U JP18921985 U JP 18921985U JP S6296850 U JPS6296850 U JP S6296850U
Authority
JP
Japan
Prior art keywords
manufacturing
semiconductor
transport line
semiconductor elements
manufacturing equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18921985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18921985U priority Critical patent/JPS6296850U/ja
Publication of JPS6296850U publication Critical patent/JPS6296850U/ja
Pending legal-status Critical Current

Links

JP18921985U 1985-12-09 1985-12-09 Pending JPS6296850U (US08063081-20111122-C00115.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18921985U JPS6296850U (US08063081-20111122-C00115.png) 1985-12-09 1985-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18921985U JPS6296850U (US08063081-20111122-C00115.png) 1985-12-09 1985-12-09

Publications (1)

Publication Number Publication Date
JPS6296850U true JPS6296850U (US08063081-20111122-C00115.png) 1987-06-20

Family

ID=31141312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18921985U Pending JPS6296850U (US08063081-20111122-C00115.png) 1985-12-09 1985-12-09

Country Status (1)

Country Link
JP (1) JPS6296850U (US08063081-20111122-C00115.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01253249A (ja) * 1988-03-31 1989-10-09 Tokyo Electron Ltd 処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01253249A (ja) * 1988-03-31 1989-10-09 Tokyo Electron Ltd 処理装置

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