JPS6296642U - - Google Patents
Info
- Publication number
- JPS6296642U JPS6296642U JP1985189704U JP18970485U JPS6296642U JP S6296642 U JPS6296642 U JP S6296642U JP 1985189704 U JP1985189704 U JP 1985189704U JP 18970485 U JP18970485 U JP 18970485U JP S6296642 U JPS6296642 U JP S6296642U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- wafer
- aligning
- marks
- orientation flat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985189704U JPS6296642U (OSRAM) | 1985-12-09 | 1985-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985189704U JPS6296642U (OSRAM) | 1985-12-09 | 1985-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6296642U true JPS6296642U (OSRAM) | 1987-06-19 |
Family
ID=31142246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985189704U Pending JPS6296642U (OSRAM) | 1985-12-09 | 1985-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6296642U (OSRAM) |
-
1985
- 1985-12-09 JP JP1985189704U patent/JPS6296642U/ja active Pending