JPS6296530U - - Google Patents
Info
- Publication number
- JPS6296530U JPS6296530U JP18714885U JP18714885U JPS6296530U JP S6296530 U JPS6296530 U JP S6296530U JP 18714885 U JP18714885 U JP 18714885U JP 18714885 U JP18714885 U JP 18714885U JP S6296530 U JPS6296530 U JP S6296530U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- flow rate
- circuit
- valve
- gas flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Flow Control (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18714885U JPS6296530U (nl) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18714885U JPS6296530U (nl) | 1985-12-04 | 1985-12-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6296530U true JPS6296530U (nl) | 1987-06-19 |
Family
ID=31137356
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18714885U Pending JPS6296530U (nl) | 1985-12-04 | 1985-12-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6296530U (nl) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6123488A (ja) * | 1984-07-11 | 1986-01-31 | Sharp Corp | カラ−固体撮像装置 |
-
1985
- 1985-12-04 JP JP18714885U patent/JPS6296530U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6123488A (ja) * | 1984-07-11 | 1986-01-31 | Sharp Corp | カラ−固体撮像装置 |