JPS6296530U - - Google Patents
Info
- Publication number
- JPS6296530U JPS6296530U JP18714885U JP18714885U JPS6296530U JP S6296530 U JPS6296530 U JP S6296530U JP 18714885 U JP18714885 U JP 18714885U JP 18714885 U JP18714885 U JP 18714885U JP S6296530 U JPS6296530 U JP S6296530U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- flow rate
- circuit
- valve
- gas flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Flow Control (AREA)
Description
第１図は本考案になるガス流量測定装置の構成
図である。
１はマスフローコントローラ、２は入力口、３
はタンク、４は排気バルブ、５は圧力センサ、６
は温度センサ、７は演算制御回路、８は数字表示
器、９は流量設定器、１０はガス流量測定装置、
１１は入力バルブ、１２は排気ポンプである。
FIG. 1 is a configuration diagram of a gas flow rate measuring device according to the present invention. 1 is a mass flow controller, 2 is an input port, 3
is the tank, 4 is the exhaust valve, 5 is the pressure sensor, 6
is a temperature sensor, 7 is an arithmetic control circuit, 8 is a numerical display, 9 is a flow rate setting device, 10 is a gas flow rate measuring device,
11 is an input valve, and 12 is an exhaust pump.
Claims (1)
前記タンクの容積記憶回路と演算制御回路と排気
ポンプと排気バルブと前記タンクのガス入力側に
付加した入力バルブとからなることを特徴とした
ガス流量測定装置。 Gas flow rate measurement characterized by comprising a tank, a pressure sensor, a temperature sensor, a timing circuit, a volume storage circuit for the tank, an arithmetic control circuit, an exhaust pump, an exhaust valve, and an input valve added to the gas input side of the tank. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18714885U JPS6296530U (en) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18714885U JPS6296530U (en) | 1985-12-04 | 1985-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6296530U true JPS6296530U (en) | 1987-06-19 |
Family
ID=31137356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18714885U Pending JPS6296530U (en) | 1985-12-04 | 1985-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6296530U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6123488A (en) * | 1984-07-11 | 1986-01-31 | Sharp Corp | Color solid-state image pickup device |
-
1985
- 1985-12-04 JP JP18714885U patent/JPS6296530U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6123488A (en) * | 1984-07-11 | 1986-01-31 | Sharp Corp | Color solid-state image pickup device |
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