JPS6295863U - - Google Patents

Info

Publication number
JPS6295863U
JPS6295863U JP1985185980U JP18598085U JPS6295863U JP S6295863 U JPS6295863 U JP S6295863U JP 1985185980 U JP1985185980 U JP 1985185980U JP 18598085 U JP18598085 U JP 18598085U JP S6295863 U JPS6295863 U JP S6295863U
Authority
JP
Japan
Prior art keywords
workpiece
polishing
suction hole
vacuum source
utilizes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985185980U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0230211Y2 (US20020051482A1-20020502-M00012.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985185980U priority Critical patent/JPH0230211Y2/ja
Publication of JPS6295863U publication Critical patent/JPS6295863U/ja
Application granted granted Critical
Publication of JPH0230211Y2 publication Critical patent/JPH0230211Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP1985185980U 1985-12-04 1985-12-04 Expired JPH0230211Y2 (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985185980U JPH0230211Y2 (US20020051482A1-20020502-M00012.png) 1985-12-04 1985-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985185980U JPH0230211Y2 (US20020051482A1-20020502-M00012.png) 1985-12-04 1985-12-04

Publications (2)

Publication Number Publication Date
JPS6295863U true JPS6295863U (US20020051482A1-20020502-M00012.png) 1987-06-18
JPH0230211Y2 JPH0230211Y2 (US20020051482A1-20020502-M00012.png) 1990-08-14

Family

ID=31135116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985185980U Expired JPH0230211Y2 (US20020051482A1-20020502-M00012.png) 1985-12-04 1985-12-04

Country Status (1)

Country Link
JP (1) JPH0230211Y2 (US20020051482A1-20020502-M00012.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52155494A (en) * 1976-06-21 1977-12-23 Nippon Telegr & Teleph Corp <Ntt> Process for w orking parallel plane of wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52155494A (en) * 1976-06-21 1977-12-23 Nippon Telegr & Teleph Corp <Ntt> Process for w orking parallel plane of wafer

Also Published As

Publication number Publication date
JPH0230211Y2 (US20020051482A1-20020502-M00012.png) 1990-08-14

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