JPS629519A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS629519A
JPS629519A JP14873285A JP14873285A JPS629519A JP S629519 A JPS629519 A JP S629519A JP 14873285 A JP14873285 A JP 14873285A JP 14873285 A JP14873285 A JP 14873285A JP S629519 A JPS629519 A JP S629519A
Authority
JP
Japan
Prior art keywords
oxide
magnetic recording
recording medium
containing layer
polyphosphazene
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14873285A
Other languages
Japanese (ja)
Other versions
JPH0675285B2 (en
Inventor
Tokihiko Shimizu
清水 時彦
Yoshiki Goto
良樹 後藤
Sanemori Soga
眞守 曽我
Narihiro Sato
成広 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14873285A priority Critical patent/JPH0675285B2/en
Publication of JPS629519A publication Critical patent/JPS629519A/en
Publication of JPH0675285B2 publication Critical patent/JPH0675285B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a magnetic recording medium having excellent durability and high recording density by forming a metallic oxide-contg. layer on the surface of a thin ferromagnetic metallic film provided on a nonmagnetic substrate and forming a polyphosphazene-contg. layer on the surface of said layer. CONSTITUTION:The thin ferromagnetic metallic film 2 is formed on the nonmagnetic substrate 1. The metallic oxide-contg. layer 3 with is the oxide of any among Al, Fe, Si, Zr, Ti, W and Cr, or the ferrite expressed by the formula I or the composite glass consisting of silicon oxide and at least one selected from the group consisting of zirconia oxide, titanium oxide and tungsten oxide is formed on the surface of the film 2 and further the polyphosphazene- contg. layer 4 expressed by the formula II is provided on the surface thereof. The magnetic recording medium formed in such a manner has excellent lubricity and durability.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、情報産業分野等で利用される高記碌密度の磁
気記録媒体忙関する。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to high density magnetic recording media used in the information industry and the like.

従来の技術 情報の高密度記録の要求にともない有機バインダーにr
  F e 203等強磁性粉末を分散させた塗布型磁
気記録媒体に代って、プラスチック等の非磁性基板に真
空蒸着法、スパッタリング法、イオンプレーティング法
等で直接強磁性金属薄膜を設けた磁気記録媒体が研究開
発され、一部実用に供されている。
With the demand for high-density recording of conventional technical information, organic binders
Instead of coating-type magnetic recording media in which ferromagnetic powder such as Fe 203 is dispersed, magnetic recording media in which a ferromagnetic metal thin film is directly deposited on a non-magnetic substrate such as plastic by vacuum evaporation, sputtering, ion plating, etc. Recording media have been researched and developed, and some are in practical use.

発明が解決しようとする問題点 強磁性金属の媒体は、記録再生時に於いて、ヘッドとの
接触走査で該薄膜層が容易に剥離、摩耗。
Problems to be Solved by the Invention In ferromagnetic metal media, the thin film layer easily peels off and wears out during contact scanning with a head during recording and reproduction.

損傷等を起こす。上記欠陥を改善するため、媒体の表面
上に保護膜を設けることが提案されている。
This may cause damage, etc. In order to improve the above defects, it has been proposed to provide a protective film on the surface of the medium.

例えばSio2.An203.等の金属酸化物層を形成
し、その表面に脂肪酸系潤滑剤の皮膜を形成し、複合保
護膜とする(特開昭59−154642号公報)提案が
、なされている。しかしながらこの場合、脂肪酸系潤滑
剤が、下地の酸化物層との結合が弱くかつ、耐熱性が低
いために、磁気記録ヘッドとの接触走行中に、剥離及び
摩擦熱による分解が生じて長期の耐久性に対して効果が
少ない。
For example, Sio2. An203. A proposal has been made to form a composite protective film by forming a metal oxide layer such as the above, and forming a film of a fatty acid lubricant on the surface thereof (Japanese Patent Application Laid-open No. 154642/1983). However, in this case, the fatty acid-based lubricant has a weak bond with the underlying oxide layer and has low heat resistance, so it peels off and decomposes due to frictional heat during contact with the magnetic recording head, resulting in long-term problems. It has little effect on durability.

問題点を解決するための手段 非磁性基板上に設けた強磁性金属薄膜面上に、金属酸化
物含有層を形成し、その金属酸化物含有層表面に、ポリ
ホスファゼン含有層を形成して保護膜とする。
Means for solving the problem A metal oxide-containing layer is formed on the surface of a ferromagnetic metal thin film provided on a non-magnetic substrate, and a polyphosphazene-containing layer is formed on the surface of the metal oxide-containing layer for protection. Make it a membrane.

作  用 強磁性金属薄膜表面の金属酸化物含有層による耐摩耗性
向上と滑剤ホスファゼンとの結合力を高めると同時に、
滑剤自身の耐熱性、耐酸化性により離脱及び分解が抑制
されるために、耐久性の優れた高記録密度の磁気記録媒
体を得ることが出来る。
Function The metal oxide-containing layer on the surface of the ferromagnetic metal thin film improves wear resistance and increases the bonding force with the lubricant phosphazene.
Since detachment and decomposition are suppressed by the heat resistance and oxidation resistance of the lubricant itself, a magnetic recording medium with excellent durability and high recording density can be obtained.

実施例 図は、本発明の磁気記録媒体の断面図である。Example The figure is a cross-sectional view of the magnetic recording medium of the present invention.

図において、1は非磁性基板、2は強磁性金属薄膜、3
は金属酸化物含有層、4はポリホスファゼン含有層であ
る。本発明による磁気記録媒体に使用し得る非磁性基板
1としては、ポリ塩化ビニル。
In the figure, 1 is a non-magnetic substrate, 2 is a ferromagnetic metal thin film, and 3 is a non-magnetic substrate.
4 is a metal oxide-containing layer, and 4 is a polyphosphazene-containing layer. The nonmagnetic substrate 1 that can be used in the magnetic recording medium according to the present invention is polyvinyl chloride.

ポリエチレンテレフタレート、ポリイミド、ポリアミド
等の高分子材料、アルミニウム等の非磁性金属材料、ガ
ラス、磁器等のセラミック材料等周知の材料からなるフ
ィルム、板状等が挙げられる。
Examples include films and plates made of well-known materials such as polymer materials such as polyethylene terephthalate, polyimide, and polyamide, non-magnetic metal materials such as aluminum, and ceramic materials such as glass and porcelain.

また本発明の磁気記録媒体に使用し得る強磁性金属薄膜
2としては、鉄、コバルト、ニッケルの1種以上の合金
または、これらとマンガン、クロム。
The ferromagnetic metal thin film 2 that can be used in the magnetic recording medium of the present invention is an alloy of one or more of iron, cobalt, and nickel, or an alloy of these with manganese and chromium.

チタン、リン、イツトリウム、サマリウム、ビスマス等
とを組合せた合金等がある。非磁性基板1上に強磁性金
属薄膜2を形成させるには、真空蒸着法、スパッタリン
グ法、イオンブレーティング法、メッキ法等周知の方法
を用いる。本発明においては、上述した如き強磁性金属
薄膜2面上に、金属酸化物含有層3を形成し、さらにそ
の表面にポリホスファゼン含有層4を設けるものである
There are alloys that combine titanium, phosphorus, yttrium, samarium, bismuth, etc. In order to form the ferromagnetic metal thin film 2 on the non-magnetic substrate 1, a well-known method such as a vacuum evaporation method, a sputtering method, an ion blasting method, a plating method, etc. is used. In the present invention, a metal oxide-containing layer 3 is formed on the ferromagnetic metal thin film 2 as described above, and a polyphosphazene-containing layer 4 is further provided on the surface thereof.

本発明で使用し得る金属酸化物層3としては、A2゜0
3.Fe2o3,5IO2,ZrO2,TiO2,WO
2゜CrO2,フェライト、複合ガラスが挙げられる。
As the metal oxide layer 3 that can be used in the present invention, A2°0
3. Fe2o3, 5IO2, ZrO2, TiO2, WO
Examples include 2°CrO2, ferrite, and composite glass.

フェライトは、一般式MO・Fe2o3(式中Mは、M
n  、Co  、Nl  、Cu  、Zn  から
選ばれた少くとも一種である)なる組成を持つものであ
る。
Ferrite has the general formula MO・Fe2o3 (in the formula, M is M
The composition is at least one selected from n, Co, Nl, Cu, and Zn.

上記の金属酸化物含有層を形成させる方法としては、ス
パッタリング法9反応性蒸着2反応性イオンブレーティ
ング及び、AIl、Si 、Zr、Ti 、Wアルコラ
ードを加水分解して重合する塗膜法があり、特に、St
アルコラードと2τアルコラード、Tiアルコラード、
Wアルコラードのいずれかを混合して作製した複合ガラ
ス皮膜は、熱膨張係数等の物性制御、量産性において有
効であった。CrO2の場合は、上記方法以外に、Co
−Cr系強磁性金属膜をある一定条件で希硝酸処理をす
る事により選択的にCr O2皮膜を磁性薄膜上に形成
することが出来た。
Methods for forming the above-mentioned metal oxide-containing layer include a sputtering method, 9 reactive vapor deposition, and 2 reactive ion blating, and a coating method in which Al, Si, Zr, Ti, and W alcolade are hydrolyzed and polymerized. , especially St.
Alcorado, 2τ Alcorado, Ti Alcorado,
Composite glass films prepared by mixing any of the W Alcolades were effective in controlling physical properties such as the coefficient of thermal expansion and in mass production. In the case of CrO2, in addition to the above method, Co
By treating the -Cr-based ferromagnetic metal film with dilute nitric acid under certain conditions, it was possible to selectively form a CrO2 film on the magnetic thin film.

ポリホスファゼンとしては、一般式; (式中、m 、 m’  は0〜7の整数、nは、4〜
3oの整数である) で表ワされるポリフロロアルコキシホスファゼンが特に
好ましい。側鎖分子のm 、 m’  が7以上の場合
は、耐熱性、潤滑性が低下をきたした。主鎖のnが4未
満の場合は、耐熱性、下地との結合力の低下をきたし耐
久性を充分発揮出来ず又、31以上の場合は、ポリホス
ファゼンが溶媒に難溶になるため下地表面に均一膜を作
り難くなシ保護膜の機能を発揮できなかった。ポリホス
ファゼン含有層の形成法は、エタノール、メチルイソブ
チルケトン、テトラヒドロフラン、メチルエチルケトン
、ジメチルケトン、ジメチルホルムアミド、ジメチルス
ルフォオキシドの溶媒に、溶解し、塗布工程で薄膜を形
成した。金属酸化物含有層厚みとポリホスファゼン含有
層厚みの和は、50〜600人が好適であった。601
Å以上になると信号再生時にスペーシングロスにより出
力低下が生じ、ω人未満の時は、均一な保護膜を形成し
難く、耐摩耗性、潤滑性に問題を生じた。
Polyphosphazene has the general formula; (wherein, m and m' are integers of 0 to 7, and n is 4 to
Particularly preferred are polyfluoroalkoxyphosphazenes represented by: When m and m' of the side chain molecules were 7 or more, heat resistance and lubricity decreased. If n in the main chain is less than 4, the heat resistance and bonding strength with the substrate will decrease, making it impossible to fully demonstrate durability. If n is 31 or more, the polyphosphazene will be poorly soluble in the solvent and the surface of the substrate will deteriorate. It was difficult to form a uniform film, and the protective film could not function as a protective film. The polyphosphazene-containing layer was formed by dissolving it in a solvent of ethanol, methyl isobutyl ketone, tetrahydrofuran, methyl ethyl ketone, dimethyl ketone, dimethyl formamide, or dimethyl sulfoxide, and forming a thin film in a coating process. The sum of the thickness of the metal oxide-containing layer and the thickness of the polyphosphazene-containing layer was preferably 50 to 600 people. 601
When it is more than Å, the output decreases due to spacing loss during signal reproduction, and when it is less than ω, it is difficult to form a uniform protective film, causing problems in wear resistance and lubricity.

以下に実施例をもって説明する。This will be explained below using examples.

実施例−1 厚さ20μmのポリイミドフィルム基板上に、真空蒸着
法によりコバルト(90wt%)−クロム(1owtl
からなる膜厚1600人の強磁性金属薄膜を作った。こ
の媒体の表面に、反応性蒸着法によりAt203の酸化
物層を112人形成し、さらにその表面にポリジトリフ
ロロエトキシホスファゼン(m 、 m’= O、n 
= 4 )のo、1wt %エタノール溶液を塗布乾燥
し厚みが164人の薄膜を形成した。膜厚測定は、エリ
プソメーターで測定した(以下すべてこの方法を用いた
。)。試料形状は3.6インチのディスクとした。
Example-1 Cobalt (90wt%)-chromium (1wtl) was deposited on a 20μm thick polyimide film substrate by vacuum evaporation method.
A ferromagnetic metal thin film with a thickness of 1600 nm was made. On the surface of this medium, an oxide layer of At203 was formed using a reactive vapor deposition method, and on the surface, polyditrifluoroethoxyphosphazene (m, m'=O, n
A 1 wt % ethanol solution of 4) was applied and dried to form a thin film with a thickness of 164 mm. The film thickness was measured using an ellipsometer (this method was used in all of the following). The sample shape was a 3.6 inch disk.

実施例−2 実施例1と同構成の強磁性金属薄膜表面に、スパッタ法
により膜厚105人のZnフェライト薄膜を設けた。さ
らにその表面にポリジペンタフロロプロポオキシホスフ
ァゼン(m 、 m’= 1 、 n=6)の0.06
wt%テトラヒドロフラン溶液を塗布乾燥し210人の
薄膜を形成した。試料形状は、実施例1と同じ様に作製
した。
Example 2 On the surface of a ferromagnetic metal thin film having the same structure as in Example 1, a Zn ferrite thin film with a thickness of 105 oxides was provided by sputtering. Furthermore, 0.06 of polydipentafluoropropoxyphosphazene (m, m'=1, n=6) was added to the surface.
A wt% tetrahydrofuran solution was applied and dried to form a thin film of 210 people. The sample shape was prepared in the same manner as in Example 1.

実施例−3 厚さ60μmのポリエチレンテレフタレート基板上に、
スパッタ法でコバルト(86%)−クロム(151から
なる膜厚20oO人の強磁性金属薄膜表面にSiイソプ
ロピレートとZrインプロピレートの複合溶液(商品名
グラス力401、力板研究所製)を触媒存在下で100
℃で加水分解し重合させ、Zr0−3iO3の組成から
なるガラス皮膜(厚み2oo人)形成した。さらにその
表面ニポリフロロアルコキシホスファゼン(m 、 m
’=4 、rx=1o)の0 、05wt% (7)ジ
メチルホルムアミドとアセトン(体積比1:4)の混合
溶媒溶液を塗布乾燥し120人の厚みの薄膜を形成した
Example-3 On a polyethylene terephthalate substrate with a thickness of 60 μm,
A composite solution of Si isopropylate and Zr impropylate (trade name Glass Power 401, manufactured by Chikaraita Institute) was applied to the surface of a 20oO ferromagnetic metal thin film consisting of cobalt (86%) and chromium (151) by sputtering. 100 in the presence of catalyst
It was hydrolyzed and polymerized at ℃ to form a glass film (thickness: 20 mm) having a composition of Zr0-3iO3. Furthermore, the surface of nipolyfluoroalkoxyphosphazene (m, m
(7) A mixed solvent solution of dimethylformamide and acetone (volume ratio 1:4) was applied and dried to form a thin film with a thickness of 120 people.

試料は、実施例1,2と同様な形状に作製した。The sample was produced in the same shape as in Examples 1 and 2.

実施例−4 実施例3と同構成の強磁性金属薄膜を0.1さらにその
表面にポリフロロアルコキシホスファゼン(m、m’=
6.n=25)の0 、01 wt %のジメチルスル
ホオキシドとテトラヒドロフラン(体積比1:3)の混
合溶媒溶液を塗布乾燥し266人の厚みの薄膜を形成し
、前記実施例と同様な試料を作製した。
Example 4 A ferromagnetic metal thin film having the same structure as Example 3 was further coated with polyfluoroalkoxyphosphazene (m, m'=
6. A mixed solvent solution of 0.01 wt % dimethyl sulfoxide and tetrahydrofuran (volume ratio 1:3) of n = 25) was applied and dried to form a thin film with a thickness of 266 people to prepare a sample similar to the above example. did.

比較例−1 実施例1,2と同構成の強磁性金属薄膜上にステアリン
酸含有層厚み200人のみを設け、実施例と同形状の試
料を作製した。
Comparative Example 1 A stearic acid-containing layer with a thickness of 200 mm was provided on a ferromagnetic metal thin film having the same structure as in Examples 1 and 2, and a sample having the same shape as in Example was prepared.

比較例−2 実施例3,4と同構成の強磁性金属薄膜上に、スパッタ
法により膜厚200人の8102薄膜を設け、さらにそ
の表面にパーフルオロラウリン酸含有層を100人の厚
みに形成した。実施例と同様な形状の試料を作製した。
Comparative Example-2 On a ferromagnetic metal thin film having the same structure as Examples 3 and 4, an 8102 thin film with a thickness of 200 mm was provided by sputtering, and a perfluorolauric acid-containing layer was further formed on the surface with a thickness of 100 mm. did. A sample having the same shape as in the example was prepared.

上記実施例および比較例で得られた各磁気ディスクだつ
いて媒体表面の摩擦係数、耐久性を調べた結果を、表1
に示した。試験条件は下記に示した。
Table 1 shows the results of examining the friction coefficient and durability of the media surface of each magnetic disk obtained in the above examples and comparative examples.
It was shown to. The test conditions are shown below.

a 摩擦試験条件 測定機;往復静、動摩擦係数自動測定機ヘッド材料、形
状:鋼球(SUJ)直径3 m / m l 荷重   :20gr l走行速度  ;1oIIII/S 測定雰囲気 ;26℃ 6o%RH b 耐久試験条件 測定機;ディスクタイプ磁気記録測定機ヘッド荷重;1
0gr l走行速度: 3 m/S 測定雰囲気:25℃ 60%RH 出力が初期値より3dB低下するまでの走行回数を測定
した。
a Friction test condition measuring device; Reciprocating static, dynamic friction coefficient automatic measuring device Head material, shape: Steel ball (SUJ) diameter 3 m/ml Load: 20 gr l Running speed: 1oIII/S Measurement atmosphere: 26℃ 6o%RH b Endurance test condition measuring device; disk type magnetic recording measuring device; head load; 1
0gr l Running speed: 3 m/S Measurement atmosphere: 25°C, 60% RH The number of running times until the output decreased by 3 dB from the initial value was measured.

表−1 表−1の結果から明らかなように、本発明品は、潤滑性
、耐久性に共に優れている。実施何以外にも、5io2
−TiO□、5io2−WO2の複合ガラスとポリフロ
ロアルコキシホスファゼンの組み合せにおいても同等の
効果をもたらした。
Table 1 As is clear from the results in Table 1, the product of the present invention is excellent in both lubricity and durability. In addition to the implementation, 5io2
-TiO□, 5io2-WO2 composite glass and polyfluoroalkoxyphosphazene also produced similar effects.

発明の効果 本発明の磁気記録媒体は、潤滑性、耐久性に優れている
ことが確認され、実用上きわめて有益なものである。
Effects of the Invention The magnetic recording medium of the present invention has been confirmed to have excellent lubricity and durability, and is extremely useful in practice.

【図面の簡単な説明】[Brief explanation of the drawing]

図は、本発明の実施例における磁気記録媒体の断面図で
ある。 1・・・・・・非磁性基板、2・・・・・・強磁性金属
薄膜、3・・・・・・金属酸化物含有層、4・・・・・
・ポリホスファゼン含有層。
The figure is a cross-sectional view of a magnetic recording medium in an example of the present invention. 1...Nonmagnetic substrate, 2...Ferromagnetic metal thin film, 3...Metal oxide containing layer, 4...
- Polyphosphazene-containing layer.

Claims (5)

【特許請求の範囲】[Claims] (1)非磁性基板上に設けた強磁性金属薄膜面上に、金
属酸化物含有層を形成し、その金属酸化物含有層表面に
、ポリホスファゼン含有層を形成した磁気記録媒体。
(1) A magnetic recording medium in which a metal oxide-containing layer is formed on the surface of a ferromagnetic metal thin film provided on a non-magnetic substrate, and a polyphosphazene-containing layer is formed on the surface of the metal oxide-containing layer.
(2)金属酸化物含有層が、Al、Fe、Si、Zr、
Ti、W、Crの内の何れかの酸化物である特許請求の
範囲第1項記載の磁気記録媒体。
(2) The metal oxide-containing layer is made of Al, Fe, Si, Zr,
The magnetic recording medium according to claim 1, which is an oxide of any one of Ti, W, and Cr.
(3)金属酸化物含有層が、つぎの一般式;MO・Fe
_2O_3 (式中Mは、Mn^2^+、Fe^2^+、Co^2^
+、Ni^2^+、Cu^2^+、Zn^2^+から選
ばれた少なくとも一種である。)で表わされるフェライ
トである特許請求の範囲第1項記載の磁気記録媒体。
(3) The metal oxide-containing layer has the following general formula: MO・Fe
_2O_3 (In the formula, M is Mn^2^+, Fe^2^+, Co^2^
+, Ni^2^+, Cu^2^+, and Zn^2^+. 2. The magnetic recording medium according to claim 1, which is a ferrite represented by:
(4)金属酸化物含有層が、酸化硅素と酸化ジルコニア
、酸化チタン、酸化タングステンよりなる群から選んだ
少なくとも一つからなる複合ガラスからなる特許請求の
範囲第1項記載の磁気記録媒体。
(4) The magnetic recording medium according to claim 1, wherein the metal oxide-containing layer is made of a composite glass made of silicon oxide and at least one selected from the group consisting of zirconia oxide, titanium oxide, and tungsten oxide.
(5)ポリホスファゼンがつぎの一般式; ▲数式、化学式、表等があります▼ (式中m、m′は0〜7の整数、nは4〜30の整数で
ある。)で表わされるポリフロロアルコキシホスファゼ
ンである特許請求の範囲第1項記載の磁気記録媒体。
(5) Polyphosphazene is a polyphosphazene represented by the following general formula; ▲There are mathematical formulas, chemical formulas, tables, etc.▼ The magnetic recording medium according to claim 1, which is fluoroalkoxyphosphazene.
JP14873285A 1985-07-05 1985-07-05 Magnetic recording medium Expired - Lifetime JPH0675285B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14873285A JPH0675285B2 (en) 1985-07-05 1985-07-05 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14873285A JPH0675285B2 (en) 1985-07-05 1985-07-05 Magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS629519A true JPS629519A (en) 1987-01-17
JPH0675285B2 JPH0675285B2 (en) 1994-09-21

Family

ID=15459366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14873285A Expired - Lifetime JPH0675285B2 (en) 1985-07-05 1985-07-05 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0675285B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63262386A (en) * 1987-04-20 1988-10-28 株式会社日立製作所 Operating device for elevator
JPH02168419A (en) * 1988-12-22 1990-06-28 Asahi Glass Co Ltd Magnetic recording medium
JPH0383796A (en) * 1989-08-29 1991-04-09 Hitachi Elevator Eng & Service Co Ltd Elevator door control device
KR101209266B1 (en) 2010-06-30 2012-12-06 한국과학기술연구원 Biodegradable and thermosensitive poly(phosphazene)-superparamagnetic nano-particle complex, preparation method and use thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63262386A (en) * 1987-04-20 1988-10-28 株式会社日立製作所 Operating device for elevator
JPH02168419A (en) * 1988-12-22 1990-06-28 Asahi Glass Co Ltd Magnetic recording medium
JPH0383796A (en) * 1989-08-29 1991-04-09 Hitachi Elevator Eng & Service Co Ltd Elevator door control device
KR101209266B1 (en) 2010-06-30 2012-12-06 한국과학기술연구원 Biodegradable and thermosensitive poly(phosphazene)-superparamagnetic nano-particle complex, preparation method and use thereof
US9017726B2 (en) 2010-06-30 2015-04-28 Korea Institute Of Science And Technology Biodegradable and thermosensitive poly(organophosphazene)-superparamagnetic nanoparticle complex, preparation method and use thereof

Also Published As

Publication number Publication date
JPH0675285B2 (en) 1994-09-21

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