JPS6294638U - - Google Patents

Info

Publication number

JPS6294638U

JPS6294638U JP18742185U JP18742185U JPS6294638U JP S6294638 U JPS6294638 U JP S6294638U JP 18742185 U JP18742185 U JP 18742185U JP 18742185 U JP18742185 U JP 18742185U JP S6294638 U JPS6294638 U JP S6294638U

Authority

JP

Japan

Prior art keywords

semiconductor wafers

function

jig

transferring

clean air

Prior art date

1985-12-04

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 235000012431 wafers Nutrition 0.000 claims description 10
• 239000004065 semiconductor Substances 0.000 claims description 8
• 238000004519 manufacturing process Methods 0.000 description 1

Cited By (1)