JPS6294630U - - Google Patents

Info

Publication number
JPS6294630U
JPS6294630U JP18749985U JP18749985U JPS6294630U JP S6294630 U JPS6294630 U JP S6294630U JP 18749985 U JP18749985 U JP 18749985U JP 18749985 U JP18749985 U JP 18749985U JP S6294630 U JPS6294630 U JP S6294630U
Authority
JP
Japan
Prior art keywords
rotor
air passage
carrier
outer periphery
semiconductor material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18749985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18749985U priority Critical patent/JPS6294630U/ja
Publication of JPS6294630U publication Critical patent/JPS6294630U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP18749985U 1985-12-04 1985-12-04 Pending JPS6294630U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18749985U JPS6294630U (US07923587-20110412-C00022.png) 1985-12-04 1985-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18749985U JPS6294630U (US07923587-20110412-C00022.png) 1985-12-04 1985-12-04

Publications (1)

Publication Number Publication Date
JPS6294630U true JPS6294630U (US07923587-20110412-C00022.png) 1987-06-17

Family

ID=31138022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18749985U Pending JPS6294630U (US07923587-20110412-C00022.png) 1985-12-04 1985-12-04

Country Status (1)

Country Link
JP (1) JPS6294630U (US07923587-20110412-C00022.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295166A (en) * 1976-02-06 1977-08-10 Hitachi Ltd Wafer dryer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295166A (en) * 1976-02-06 1977-08-10 Hitachi Ltd Wafer dryer

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