JPS6294626U - - Google Patents
Info
- Publication number
- JPS6294626U JPS6294626U JP18593585U JP18593585U JPS6294626U JP S6294626 U JPS6294626 U JP S6294626U JP 18593585 U JP18593585 U JP 18593585U JP 18593585 U JP18593585 U JP 18593585U JP S6294626 U JPS6294626 U JP S6294626U
- Authority
- JP
- Japan
- Prior art keywords
- cvd apparatus
- cylinder
- air isolation
- vertical cvd
- outside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002955 isolation Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000012774 insulation material Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18593585U JPS6294626U (cs) | 1985-12-02 | 1985-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18593585U JPS6294626U (cs) | 1985-12-02 | 1985-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6294626U true JPS6294626U (cs) | 1987-06-17 |
Family
ID=31135028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18593585U Pending JPS6294626U (cs) | 1985-12-02 | 1985-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6294626U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0372649A (ja) * | 1989-08-11 | 1991-03-27 | Tokyo Electron Sagami Ltd | 処理装置 |
-
1985
- 1985-12-02 JP JP18593585U patent/JPS6294626U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0372649A (ja) * | 1989-08-11 | 1991-03-27 | Tokyo Electron Sagami Ltd | 処理装置 |